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The Feasibility Study of CMP Wastewater Treatment Using Tubular Membrane and Coagulants  

Jung, Ho Chan (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
Jung, Cheol Joong (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
Song, Ja Yeon (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
Kim, Youn Kook (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
Lee, Sun Yong (Woongjin Coway Co., Ltd. Institute of Environmental Technology, Environmental Technology Research Team)
Publication Information
Journal of Korean Society on Water Environment / v.28, no.5, 2012 , pp. 639-645 More about this Journal
Abstract
The purpose of this study is to identify the possibility of the CMP wastewater treatment from semiconductor fabrication under operating tubular membrane with coagulants. To find suitable coagulants treating CMP wastewater, we conducted Jar-test. After Jar-test experiments suitable coagulants are PAC(17%), $Ca(OH)_2$ and optimum coagulant dosage is PAC(17%) 10mg/L, $Ca(OH)_2$ 110 ~ 120mg/L. Based on these results, the tubular membrane was applied to CMP wastewater, the turbidity removal efficiency is $Ca(OH)_2$ > PAC(17%) > Nothing. The fast cross-flow velocity and backwash process what are operating characteristics of tubular membrane can be stable CMP wastewater treatment. But when the coagulant and tubular membrane are used at the same time, the withdraw and treatment of the CMP wastewater are possibile. However further treatment process needs if treated water will be used for semiconductor fabrications.
Keywords
CMP wastewater; Coagulant; Semiconductor wastewater; Tubular membrane; Wastewater treatment;
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Times Cited By KSCI : 2  (Citation Analysis)
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