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Fabrications and Characteristics of Microfluidic Systems Actuated by Thermopneumatic Method  

Yoo Jong-Chul (명지대학 전기공학과)
Kang C. J. (명지대학 물리학과)
Kim Yong-Sang (명지대학 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.55, no.2, 2006 , pp. 88-92 More about this Journal
Abstract
We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at. a duty ratio of 1 $\%$ and a frequency of 2 Hz with a fixed power of 500 mW. The measured power at flow cut-off is 500 mW for the microvalve whose channel width, depth and membrane thickness were 400 $\mu$m, 110 $\mu$m, and 320 $\mu$m, respectively.
Keywords
Microfluidic System; Micropump; Microvalve; PDMS; ITO;
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Times Cited By KSCI : 2  (Citation Analysis)
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