• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.87.2-87.2
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• 2005

• 대한기계학회논문집B
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• 제30권8호
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• pp.722-730
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• 2006

In this study, the flow characteristics of a FPN (Fountain Pen Nano-Lithography) using active membrane pumping are investigated. The FPN has integrated chamber, micro channel, and high capacity reservoir for continuous ink feed. The most important aspect in this probe provided control of fluid injection using active membrane pumping in chamber. The flow rates in channel by capillary force are theoretically analyzed, including the control of the mass flow rates by the deflection of the membrane. The above results are compared with the numerical simulations that calculated by commercial code, FLUENT. The velocity of the fluid in micro channel shows linear behaviors. And the mass flows are proportional to the second order function of the pumping pressure that is imposed to the membrane.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.922-929
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• 2006

In this study, flow characteristics of the FPN (Fountain Pen Nano-Lithography) using active membrane pumping are investigated. This FPN has integrated chamber, micro channel, and high capacity reservoir for continuous ink feed. The most important aspect in this probe provided control of fluid injection using active membrane pumping in chamber. The flow rates in channel by capillary force are theoretically analyzed, including the control of mass flow rates by deflection of membrane. The above results are compared with numerical simulations that calculated by commercial code, FLUENT. The velocity of fluid in micro channel shows linear behaviors. And the mass flows are proportional to the second order function of pumping pressure that is imposed to membrane.

• International Journal of Aeronautical and Space Sciences
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• 제12권1호
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• 한국정밀공학회지
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• 제27권10호
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• pp.84-92
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• 2010

In this study a numerical analysis has been conducted for the flow characteristics and pumping performance of a piezoelectric-based micropump with electromagnetic resistance exerted on electrically conducting fluid. Here, electromagnetic resistance is alternately applied at the inlet and outlet with alternately applied magnetic fields in association with the reciprocal membrane motion of the piezoelectric-based micropump. A model of Prescribed Deformation is used for the description of the membrane motion. The internal flow characteristics and pumping performance are investigated with the variation of magnetic flux density, tube size, displacement of membrane and the frequency of the membrane. It turns out that the current micropump has a wide range of pumping flow rate compared with diffuser-nozzle based micropumps.

• 한국유체기계학회 논문집
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• 제9권2호
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• pp.19-24
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• 2006

Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.

• 한국가시화정보학회지
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• 제20권3호
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• pp.117-127
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• 2022

The present study has investigated the performance of hydrogen gas generators for inhalation purposes based on polyelectrolyte membrane water electrolysis (PEMWE). The system applied two watering methods. One is pumped water (pumping system) and the other is gravity-fed water without a pump (non-pumping system). The cell efficiencies were compared by measuring the cell voltage and temperature in the hydrogen gas generator, respectively. The results show that the cell voltage and temperature increase with the cell current. The cell temperature is lower in the pumping system than that in the non-pumping system at a given cell current. Even though the amount of hydrogen production is the same regardless of the pumping system, the cell efficiency of the hydrogen gas generator in the non-pumping system is better than that in the pumping system.

• 대한기계학회논문집B
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• 제30권4호
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• 설비공학논문집
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• 제19권9호
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• pp.654-661
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• 2007

This study has been conducted to investigate the pumping characteristics of diffuser-nozzle based thermopneumatic micropumps with different input voltages and frequencies. In this study, the displacements of the membrane have been obtained changing the input voltage and frequency in load-free state because it is very difficult to measure the displacement of the membrane in an actual load state. It has been found that the amplitude of the membrane displacement increases as the input voltage increases. The pressure head of the thermopneumatic micropump increases almost linearly over some range of the input voltage and decreases almost linearly as the frequency increases. Also, the results show that the thermopneumatic micropump can pump the fluid over a certain input voltage. This study can be utilized as basic data for design and evaluation of thermopneumatic micropumps.

• 설비공학논문집
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• 제23권1호
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• pp.23-31
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• 2011

An analysis has been conducted of the flow characteristics and pumping performance of a thermopneumatic micropump with electrically conducting fluid. In the present study, considered is a thermopneumatic micropump for electrically conducting fluids with electromagnetic resistance alternately exerted at the inlet and outlet by alternately applied magnetic fields. A model of Prescribed Deformation is used for the motion of the membrane. Here, the pumping performance of the micropump and flow characteristics of the electrically conducting fluid are investigated in the range of Hartmann number less than 30. The current numerical study shows that the net flow rate through the micropump is almost proportional to the strength of the applied magnetic field.