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http://dx.doi.org/10.5293/KFMA.2006.9.2.019

Numerical Analysis of the Flow Characteristics in the Nano Fountain-Pen Using Membrane Pumping  

Lee, J.H. (성균관대학교 대학원)
Lee, Y.K. (성균관대학교 대학원)
Lee, S.H. (성균관대학교 정보토신공학부)
Kim, Hun-Mo (성균관대학교 기계공학부)
Kim, Youn-J. (성균관대학교 기계공학부)
Publication Information
The KSFM Journal of Fluid Machinery / v.9, no.2, 2006 , pp. 19-24 More about this Journal
Abstract
Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction of patterns and surface variation in the micro process. In this study, nuo fountain-pen is composed with reservoir, micro channels, tip and scondary chamber. Instead of traditional method only using capillary force, liquid can be definitely and exactly injected with membrane pumping by the repulse force of tip. It is dfficult to perform experiments in the micro range so that we carried out a numerical analysis for internal flow, using a commercial code, FlUENT, The velocity, pressure and flow rate are obtained under laminar, unsteady, three-dimensional incompressible flow with no-slip condition, and results are graphically described.
Keywords
Nanolithography; Nano fountain-pen; Membrane pumping;
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