A Study on Flow Characteristics of Fountain-pen Nano-Lithography with Active Membrane Pumping
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Lee Jin-Hyoung
(성균관대 대학원 기계공학부)
Lee Young-Kwan (성균관대 대학원 기계공학부) Lee Sung-Kun (성균관대 대학원 기계공학부) Lee Suk-Han (성균관대 정보통신공학부) Kim Youn-Jea (성균관대 기계공학부) Kim Hun-Mo (성균관대 기계공학부) |
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