• Transactions on Electrical and Electronic Materials
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• 제6권1호
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• pp.29-32
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• 2005

Chemical mechanical polishing is an essential process in the production of copper-based chips. On this work, the stability of hydrogen peroxide ($H_{2}O_{2}$) as an oxidizer of copper CMP slurry has been investigated. $H_{2}O_{2}$ is known as the most common oxidizer in copper CMP slurry. But $H_{2}O_{2}$ is so unstable that its stabilization is needed using as an oxidizer. As adding KOH as a pH buffering agent, stability of $H_{2}O_{2}$ decreased. However, $H_{2}O_{2}$ stability in slurry went up with putting in small amount of BTA as a film forming agent. There was no difference of $H_{2}O_{2}$ stability between pH buffering agents KOH and TMAH at similar pH value. Addition of $H_{2}O_{2}$ in slurry in advance of bead milling led to better stability than adding after bead milling. Adding phosphoric acid resulted in the higher stability. Using alumina C as an abrasive was good at stabilizing for $H_{2}O_{2}$.

• 한국자동차공학회논문집
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• 제14권1호
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• pp.167-175
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• 2006

Directional stability is important performance in vehicle and tire design. The current methods to analyze this is generally based on linear concept. Using the existing concept, it cannot realistically explain the subjective assessment at all because it is hard to practically represent the nonlinear behaviour of a complex vehicle system in reality. In this paper, new method to analyze directional stability is introduced. At first, directional stability of vehicle is categorized into yaw, rear axle, and roll stability. In order to objectify these items, driver perceptual parameters based on subjective assessment are used. Using the perceptual parameters, it can successfully explain the transient maneuver of vehicle and extract objective parameters for directional stability. Finally, these objective parameters are successfully validated through two handling tests, lane change and severe lane change. The correlation results show that there exists a good correlation between subjective assessment and the proposed objective parameters.

• 한국연소학회지
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• 제22권1호
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• pp.46-52
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• 2017

High-frequency combustion instabilities may occur during the development of feasible engine combustors. These instabilities can result in irreparable damages to the wall of combustors or the degradation of engine performance. So, it is essential to identify injectors that have high stability characteristics during the early stages of development. The objective of present study was to assess the stability of coaxial injectors and an impinging injector with different recess lengths in order to develop stable injectors optimally. Stability margin was evaluated based on the distance from operating condition to the unstable regions. A simulating combustion test method was used to analyze the stability of injectors. A small-scale combustion chamber was designed to simulate the first tangential acoustic mode of the actual combustor. Gaseous oxygen and a mixture of methane and propane were used as simulant propellants to satisfy their flow similarity to the actual propellants of a combustor in a liquid rocket combustor. The results indicated that injectors having small recess lengths showed relatively large combustion stability margins. For the injectors of large recess lengths, instability regions with large and super-large amplitude oscillations were observed. Thus, injector with shorter recess lengths had a higher stability than that of longer one due to the different mixing processes.

• Journal of Mechanical Science and Technology
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• 제15권10호
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• pp.1356-1368
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• 2001

In this paper, the model reference adaptive control (MRAC) of a flexible structure is investigated. Any mechanically flexible structure is inherently distributed parameter in nature, so that its dynamics are described by a partial, rather than ordinary, differential equation. The MRAC problem is formulated as an initial value problem of coupled partial and ordinary differential equations in weak form. The well-posedness of the initial value problem is proved. The control law is derived by using the Lyapunov redesign method on an infinite dimensional filbert space. Uniform asymptotic stability of the closed loop system is established, and asymptotic tracking, i. e., convergence of the state-error to zero, is obtained. With an additional persistence of excitation condition for the reference model, parameter-error convergence to zero is also shown. Numerical simulations are provided.

• International Journal of Naval Architecture and Ocean Engineering
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• 제12권1호
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• pp.479-490
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• 2020

The hydrodynamic characteristic of transonic motion projectiles with different head diameters are investigated by numerical simulation. Compressibility effect in liquid-phase water are modeled using the Tait state equation. The result shows that with increasing of velocity the compression waves transfer to shock waves, which cause the significant increasing of pressure and decreasing the dimensions of supercavities. While the increasing of head diameter, the thickness, the vapor volume fraction and the drag coefficient of supercavities are all enhanced, which is conducive to the stability of transonic-speed projectiles. The cavity dynamics of the different head projectiles are compared, and the results shows when Mach number is in high region, the truncated cone head projectile is enveloped by a cavity which results in less drag and better stability.

• Advanced Composite Materials
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• 제16권4호
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• pp.315-334
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• 2007

In the present study, chopped henequen natural fibers without and with surface modification by electron beam (E-beam) treatment were incorporated into a polypropylene matrix. Prior to composite fabrication, a bundle of raw henequen fibers were treated at various E-beam intensities from 10 kGy to 500 kGy. The effect of E-beam intensity on the interfacial, mechanical and thermal properties of randomly oriented henequen/polypropylene composites with the fiber contents of 40 vol% was investigated focusing on the interfacial shear strength, flexural and tensile properties, dynamic mechanical properties, thermal stability, and fracture behavior. Each characteristic of the material strongly depended on the E-beam intensity irradiated, showing an increasing or decreasing effect. The present study demonstrates that henequen fiber surfaces can be modified successfully with an appropriate dosage of electron beam and use of a low E-beam intensity of 10 kGy results in the improvement of the interfacial properties, flexural properties, tensile properties, dynamic mechanical properties and thermal stability of henequen/polypropylene composites.

• 대한기계학회논문집A
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• 제27권12호
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• pp.2028-2038
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• 2003

High-speed feed drive systems have been widely used in the manufacturing and semiconductor industries. Specifications for high-speed systems require more advanced capabilities than conventional feed drive systems. It is necessary to devise special design concepts to achieve the level of performance for high-speed feed drive systems. In this paper, an integrated design method is proposed for high-speed feed drive systems in which the interactions between mechanical and electrical subsystems ought to be considered simultaneously during the design process. Based on the integrated design method, a nonlinear optimal design procedure of mechanical subsystems considering the Abbe and radius errors is accomplished through the design process of electrical subsystems satisfying the control stability and the saturation condition of actuators as well as the relative stability. Both mechanical and electrical parameters are considered as design variables. Simulations and numerical case studies show that the integrated design method of high-speed feed drive systems creates results satisfying the desired performances of mechatronic systems.

• 한국해양공학회지
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• 제25권5호
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• pp.1-8
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• 2011

This paper proposes a controller design for an omnidirectional mobile platform (OMP) with three wheels using backstepping control. A kinematic model and dynamic model of the system are presented. Based on the dynamic modeling, a backstepping controller is designed to stabilize the OMP when following a desired path. The controller is designed based on a backstepping control theory. It includes two steps: first, a virtual state and a stability function are introduced. Second, Lyapunov functions for the system are chosen and an equation for the virtual control that makes the system stabile is obtained. The system stability is guaranteed by the Lyapunov stability theory. The simulation and experimental results are presented to demonstrate the effectiveness of the proposed controller.

• Design & Manufacturing
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• 제14권4호
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• pp.58-64
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• 2020

Lately, the development of the semiconductor industry has led to the miniaturization of electronic devices. Therefore, semiconductor wafers of very thin thickness that can be used in Multi-Chip Packages are required. There is active research on the backgrinding process to reduce the thickness of the wafer. The backgrinding process polishes the backside of the wafer, reducing the thickness of the wafer to tens of ㎛. The equipment that performs the backgrinding process requires ultra-precision. Currently, there is no full auto backgrinding equipment in Korea. Therefore, in this study, ultra-precision backgrinding equipment was designed. In addition, finite element analysis was conducted to verify the equipment design validity. The deflection and structural stability of the backgrinding equipment were analyzed using finite element analysis.

• Archives of Metallurgy and Materials
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• 제66권3호
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• pp.759-763
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• 2021

The effects of the sintering holding time and cooling rate on the microstructure and mechanical properties of nanocrystalline Fe-Cr-C alloy were investigated. Nanocrystalline Fe-1.5Cr-1C (wt.%) alloy was fabricated by mechanical alloying and spark plasma sintering. Different process conditions were applied to fabricate the sintered samples. The phase fraction and grain size were measured using X-ray powder diffraction and confirmed by electron backscatter diffraction. The stability and volume fraction of the austenite phase, which could affect the mechanical properties of the Fe-based alloy, were calculated using an empirical equation. The sample names consist of a number and a letter, which correspond to the holding time and cooling method, respectively. For the 0A, 0W, 10A, and 10W samples, the volume fraction was measured at 5.56, 44.95, 6.15, and 61.44 vol.%. To evaluate the mechanical properties, the hardness of 0A, 0W, 10A, and 10W samples were measured as 44.6, 63.1, 42.5, and 53.8 HRC. These results show that there is a difference in carbon diffusion and solubility depending on the sintering holding time and cooling rate.