Stability of H2O2 as an Oxidizer for Cu CMP |
Lee, Do-Won
(School of Electrical and Electronics Engineering, Chung-Ang University)
Kim, Tae-Gun (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Nam-Hoon (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Sang-Yong (School of Electrical and Electronics Engineering, Chung-Ang University) Chang, Eui-Goo (School of Electrical and Electronics Engineering, Chung-Ang University) |
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