• 제목/요약/키워드: Mechanical sensitivity

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민감도 분석을 이용한 반도체 검사 장비의 X, Y 스테이지 구조의 경량화 연구 (A Study on the Weight Reduction of X,Y stage of Semiconductor Inspection Equipment using Sensitivity Analysis)

  • 고만수;권순기;김참내
    • 디지털융복합연구
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    • 제17권7호
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    • pp.125-130
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    • 2019
  • 민감도 해석은 어떤 설계 변수의 변화가 전체 시스템에 미치는 영향을 확인하기 위한 방법으로, 계산된 민감도는 구조개선 시 중요한 지표가 된다. 본 연구에서는 유한요소해석을 이용하여 설계 변수에 대한 민감도 도출 및 분석 방법과, 민감도 결과를 활용한 구조개선 방법을 제안하였다. 구조 개선이 필요한 실제 반도체 검사 장비를 이용하여 경량화를 위한 설계 변수를 선정하고 설계 변수에 대한 민감도를 유한요소법과 유한차분법을 활용하여 계산하였으며, 장비가 요구하는 과도응답(Transient Response)은 유지하면서도 무게 감소가 가능한 개선 방안을 제시하였다. 유한요소해석과 유한차분법을 이용한 민감도 분석 결과를 이용한다면 구조물의 설계 개선 시 원하는 응력 또는 변위는 만족하면서도 구조적으로 향상된 설계를 할 수 있고, 이는 반도체 검사 장비뿐만 아니라 다양한 분야에서 활용이 가능하다.

Sensitivity analysis based on complex variables in FEM for linear structures

  • Azqandi, Mojtaba Sheikhi;Hassanzadeh, Mahdi;Arjmand, Mohammad
    • Advances in Computational Design
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    • 제4권1호
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    • pp.15-32
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    • 2019
  • One of the efficient and useful tools to achieve the optimal design of structures is employing the sensitivity analysis in the finite element model. In the numerical optimization process, often the semi-analytical method is used for estimation of derivatives of the objective function with respect to design variables. Numerical methods for calculation of sensitivities are susceptible to the step size in design parameters perturbation and this is one of the great disadvantages of these methods. This article uses complex variables method to calculate the sensitivity analysis and combine it with discrete sensitivity analysis. Finally, it provides a new method to obtain the sensitivity analysis for linear structures. The use of complex variables method for sensitivity analysis has several advantages compared to other numerical methods. Implementing the finite element to calculate first derivatives of sensitivity using this method has no complexity and only requires the change in finite element meshing in the imaginary axis. This means that the real value of coordinates does not change. Second, this method has the lower dependency on the step size. In this research, the process of sensitivity analysis calculation using a finite element model based on complex variables is explained for linear problems, and some examples that have known analytical solution are solved. Results obtained by using the presented method in comparison with exact solution and also finite difference method indicate the excellent efficiency of the proposed method, and it can predict the sustainable and accurate results with the several different step sizes, despite low dependence on step size.

Sensitivity of Hot Film Flow Meter in Four Stroke Gasoline Engine

  • Lee, Gangyoung;Lee, Cha--Myung;Park, Simsoo;Youngjin Cho
    • Journal of Mechanical Science and Technology
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    • 제18권2호
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    • pp.286-293
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    • 2004
  • The air fuel ratios of current gasoline engines are almost controlled by several air flow meters. When CVVT (Continuous Variable Valve Timing) is applied to a gasoline engine for higher engine performance, the MAP (Manifold Absolute Pressure) sensor is difficult to follow the instantaneous air fuel ratio due to the valve timing effect. Therefore, a HFM (Hot Film Flow Meter) is widely used for measuring intake air flow in this case. However, the HFMs are incapable of indicating to reverse flow, the oscillation of intake air flow has an negative effect on the precision of the HFM. Consequently, the various duct configurations in front of the air flow sensor affect the precision of HFM sensitivity. This paper mainly focused on the analysis of the reverse flow, flow fluctuation in throttle upstream and the geometry of intake system which influence the HFM measurement.

Structural dynamic optimization with probability constraints of frequency and mode

  • Chen, Jian-Jun;Che, Jian-Wen;Sun, Huai-An;Ma, Hong-Bo;Cui, Ming-Tao
    • Structural Engineering and Mechanics
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    • 제13권5호
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    • pp.479-490
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    • 2002
  • The structural dynamic optimization problem based on probability is studied. Considering the randomness of structural physical parameters and the given constraint values, we develop a dynamic optimization mathematical model of engineering structures with the probability constraints of frequency, forbidden frequency domain and the vibration mode. The sensitivity of structural dynamic characteristics based on probability is derived. Two examples illustrate that the optimization model and the method applied are rational and efficient.

A Study on the Frequency Response Characteristics of High Response Flow Control Servo Valve

  • Seo Jong Soo;Shin You Sik;Chun Young Heung;Jeong Hyo Min;Chung Han Shik
    • International Journal of Air-Conditioning and Refrigeration
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    • 제12권3호
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    • pp.131-140
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    • 2004
  • The purpose of this research is to derive the principal design parameters governing the dynamic characteristics of the high response flow control servo valve. For this purpose, a numerical modeling of the servo valve system and a parameter sensitivity analysis to a frequency response characteristics were performed. As a result of these analysis, a basis for improvement of a dynamic characteristics of servo valve was arranged.

Sensitivity Analysis of Anti-resonance Frequency for Vibration Test Control of a Fixture

  • Jeong, Weui-Bong;Yoo, Wan-Suk;Kim, Jun-Yeop
    • Journal of Mechanical Science and Technology
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    • 제17권11호
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    • pp.1732-1738
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    • 2003
  • The test specimen in environmental vibration test is connected to the fixture through several attachment points. The forces generated by the shaker must be transmitted equally to all attachment points. The forces transmitted to attachment points, however, are different because of the flexural vibration of the fixture. The variations of the transmitted force cause the under-test, especially at anti-resonance frequencies, in vibration test control. Anti-resonance frequencies at the attachment points of the fixture must be same in order to avoid the under-test in vibration test control. The structural modification of the fixture is needed so that anti-resonance frequencies at attachment points have the same value. In this paper, the method to calculate the anti-resonance frequencies and those sensitivities is presented. This sensitivity analysis is applied to the structural modification of the fixture excited at multi-points by the shaker. The antiresonance frequencies at the attachment points of the fixture can have the same value after structural modification, and the under-test in the vibration test control can be removed. Several computer simulations show that the proposed method can remove the under-tests, which are not removed in conventional vibration test control.

Round robin analysis to investigate sensitivity of analysis results to finite element elastic-plastic analysis variables for nuclear safety class 1 components under severe seismic load

  • Kim, Jun-Young;Lee, Jong Min;Park, Jun Geun;Kim, Jong-Sung;Cho, Min Ki;Ahn, Sang Won;Koo, Gyeong-Hoi;Lee, Bong Hee;Huh, Nam-Su;Kim, Yun-Jae;Kim, Jong-In;Nam, Il-Kwun
    • Nuclear Engineering and Technology
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    • 제54권1호
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    • pp.343-356
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    • 2022
  • As a part of round robin analysis to develop a finite element elastic-plastic seismic analysis procedure for nuclear safety class 1 components, a series of parametric analyses was carried out on the simulated pressurizer surge line system model to investigate sensitivity of the analysis results to finite element analysis variables. The analysis on the surge line system model considered dynamic effect due to the seismic load corresponding to PGA 0.6 g and elastic-plastic material behavior based on the Chaboche combined hardening model. From the parametric analysis results, it was found that strains such as accumulated equivalent plastic strain and equivalent plastic strain are more sensitive to the analysis variables than von Mises effect stress. The parametric analysis results also identified that finite element density and ovalization option in the elbow elements have more significant effect on the analysis results than the other variables.

On a sensitivity of optimal solutions in fuzzy mathematical linear programming problem

  • Munakata, Tsunehiro;Nishiyama, Tadayuki
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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    • pp.307-312
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    • 1994
  • The authors have been devoted to researches on fuzzy theories and their applications, especially control theory and application problems, for recent years. In this paper, the authors present results on a comparison of optimal solutions between ones of an ordinary-typed mathematical linear programming problem(O.M.I.P. problem) and ones of a Zimmerman-typed fuzzy mathematical linear programming problem (F.M.L.P. problem), and comment about the sensitivity (differences and fuzziness on between O.M.L.P. problem and F.M.L.P. problem) on optimal solutions of these mathematical linear programming problems.

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다물체 시스템의 민감도 해석 (DESIGN SENSITIVITY ANALYSIS FOR MULTIBODY SYSTEMS)

  • Lee, Jong-Nyun;Park, Soo-Hong
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.378-382
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    • 1996
  • This paper presents a 'mixed' method for performing the sensitivity analysis for multibody dynamics. The mixed method uses both the analytical derivation and the numerical evaluation, in which premitive derivations rely on the analytical process and their associated individual terms are evaluated by the numerical precess. Therefore, this method can eliminate difficulty in dervation of the direct differentiation. Furthermore, by using the joint coordinate formulation for the equations of motion, compulational efficiencyand numerical accuracy are achieved.

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A new approach to the optimal control problem including trajectory sensitivity

  • Ishihara, Tadashi;Miyauchi, Takashi;Inooka, Hikaru
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 26-27 Oct. 1990
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    • pp.1049-1054
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    • 1990
  • We formulate optimal quadratic regulator problems with trajectory sensitivity terms as a optimization problem for a fixed controller structure. Using well-known techniques for parametric LQ problems, we give an algorithm to obtain suboptimal feedback gains by iterative solutions of two Lyapunov equations. A numerical example is given to illustrate the effectiveness of the proposed algorithm.

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