Design of Capacitive Displacement Sensor and Gap Measurement with High Precision Using Surface Acoustic Wave Device (표면 탄성파 장치를 응용한 용량 성 변위센서의 설계 및 초정밀 간극 측정)
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- Transactions of the Korean Society for Noise and Vibration Engineering
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- v.20 no.5
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- pp.437-443
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- 2010