• Title/Summary/Keyword: Mask material

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Overlay And Side-lobe Suppression in AttPSM Lithography Process for An Metal Layer (AttPSM을 사용하는 Metal Layer 리토그라피공정의 Overlay와 Side-lobe현상 방지)

  • 이미영;이흥주
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.18-21
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    • 2002
  • As the mask design rules get smaller, the probability of the process failure becomes higher due to the narrow overlay margin between the contact and metal interconnect layers. To obtain the minimum process margin, a tabbing and cutting method is applied with the rule based optical proximity correction to the metal layer, so that the protection to bridge problems caused by the insufficient space margin between the metal layers can be accomplished. The side-lobe phenomenon from the attenuated phase shift mask with the tight design nile is analyzed through the aerial image simulation for test patterns with variation of the process parameters such as numerical aperture, transmission rate, and partial coherence. The corrected patterns are finally generated by the rules extracted from the side-lobe simulation.

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fabrication of the Microfluidic LOC System with Photodiode (광 다이오드를 가진 Microfluidic LOC 시스템 제작)

  • 김현기;신경식;김용국;이상렬;김태송;양은경;주병권
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.12
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    • pp.1097-1102
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    • 2003
  • In this paper, we used only PR as etching mask, while it used usually Cr/AU as etching mask, and in order to fabricate a photosensor has the increased sensitivity, we investigated on the sensitivity of general type and p-i-n type diode. we designed microchannel size width max 10um, min 5um depth max 10um, reservoir size max 100um, min 2mm. Fabrication of microfluidic devices in glass substrate by glass wet etching methods and glass to glass fusion bonding. The p-i-n diode has higher sensitivity than photodiode, Considering these results, we fabricated p-i-n diodes on the high resistive(4㏀$.$cm) wafer into rectangle and finger pattern and compared internal resistance of each pattern. The internal resistance of pin diode can be decreased by the application of finger pattern has parallel resistance structure from 571Ω to 393Ω.

A study of multiple-exposure nanosphere lithography for photonic quasi-crystals fabrication (광자 준결정 제작을 위한 다중 노광 나노구 리소그라피 연구)

  • Yeo, Jong-Bin;Lee, Hyun-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.62-62
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    • 2010
  • Photonic quasi-crystals(PQCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method using the self-assembled nanospheres as lens-mask patterns. The multiple-exposing source is collimated laser beam and rotation, tilting system. The arrays of the PQCs exhibited variable lattice structures and shape the control of ratating angle ($\theta$), tilting angle ($\gamma$) and the exposure conditions. The used nanosphere size is upto the $1\;{\mu}m$. Images of prepared 2D PQCs were observed by SEM. We believe that the MENSL method is a suitable useful tool to realize the PQCs arrays of large area.

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Prediction Methodology for Reliability of Semiconductor Packages

  • Kim, Jin-Young
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.09a
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    • pp.79-94
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    • 2002
  • Root cause -Thermal expansion coefficient mismatch -Tape warpage -Initial die crack (die roughness) Guideline for failure prevention -Optimized tape/Substrate design for minimizing the warpage -Fine surface of die backside Root cause -Thermal expansion coefficient mismatch - Repetitive bending of a signal trace during TC cycle - Solder mask damage Guideline for failure prevention - Increase of trace width - Don't make signal trace passing the die edge - Proper material selection with thick substrate core Root cause -Thermal expansion coefficient mismatch -Creep deformation of solder joint(shear/normal) -Material degradation Guideline for failure Prevention -Increase of solder ball size -Proper selection of the PCB/Substrate thickness -Optimal design of the ball array -Solder mask opening type : NSMD -In some case, LGA type is better

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Application of the Characteristics of Neo-Pop Art to the Convergence Design of the Art Mask -Based on the Works of Takashi Murakami- (네오 팝 아트의 특성을 적용한 아트 마스크 융합디자인 -무라카미 다카시의 작품을 중심으로-)

  • Park, Li-La
    • Journal of Convergence for Information Technology
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    • v.9 no.6
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    • pp.227-232
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    • 2019
  • This study suggests a new direction for designing art masks that receive attention as an area of creative expression for makeup by incorporating Neo-Pop art. After analyzing the characteristics of Neo-Pop from a theoretical perspective, the researcher produced four art masks based on each characteristic by utilizing the motif of the Japanese Pop artist Takashi Murakami. From this study, the researcher elicits that Neo-Pop has enough qualities to be utilized as a material for the art mask, new designs of the art mask may be suggested by applying the characteristics of Neo-Pop, and that the convergence of art and makeup highlights the possibility of convergence among the many other fields. Thus, it is expected that the art mask will be studied further through converging with a range of fields, and this study will be used as fundamental data for the development of the art mask design.

Particle Filtration Efficiency Testing of Sterilization Wrap Masks

  • Chau, Destiny F.;O'Shaughnessy, Patrick;Schmitz, Michael L.
    • Journal of Preventive Medicine and Public Health
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    • v.54 no.1
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    • pp.31-36
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    • 2021
  • Objectives: Non-traditional materials are used for mask construction to address personal protective equipment shortages during the coronavirus disease 2019 (COVID-19) pandemic. Reusable masks made from surgical sterilization wrap represent such an innovative approach with social media frequently referring to them as "N95 alternatives." This material was tested for particle filtration efficiency and breathability to clarify what role they might have in infection prevention and control. Methods: A heavyweight, double layer sterilization wrap was tested when new and after 2, 4, 6, and 10 autoclave sterilizing cycles and compared with an approved N95 respirator and a surgical mask via testing procedures using a sodium chloride aerosol for N95 efficiency testing similar to 42 CFR 84.181. Pressure testing to indicate breathability was also conducted. Results: The particle filtration efficiency for the sterilization wrap ranged between 58% to 66%, with similar performance when new and after sterilizing cycles. The N95 respirator and surgical mask performed at 95% and 68% respectively. Pressure drops for the sterilization wrap, N95 and surgical mask were 10.4 mmH2O, 5.9 mmH2O, and 5.1 mmH2O, respectively, well below the National Institute for Occupational Safety and Health limits of 35 mmH2O during initial inhalation and 25 mmH2O during initial exhalation. Conclusions: The sterilization wrap's particle filtration efficiency is much lower than a N95 respirator, but falls within the range of a surgical mask, with acceptable breathability. Performance testing of non-traditional mask materials is crucial to determine potential protection efficacy and for correcting misinterpretation propagated through popular media.

Cosmeceutical Properties of Extracts of Torreya nucifera and Alpinia henryi and Formulation Characteristics of Mask Pack Containing Extracts of These (비자 및 초두구 추출물의 코스메슈티칼 특성 및 이를 포함한 마스크팩 제형특성)

  • Soh, Soon-Young;Chun, Yong-Jin
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.8
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    • pp.36-43
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    • 2020
  • The extracts of antioxidants, torreya nucifera and alphinia henryi, were tested for properties as a fragrance material and applied to a mask pack formulation to study the fragrance properties. The DPPH antioxidant test of hot water and ethanol extract confirmed that the ethanol extract had superior antioxidant efficacy compared to the hot water extract. It was confirmed that the optimal mixing ratio as a raw material for the mask pack of torreya nucifera and alphinia henryi was 3:7 as a result of the DPPH antioxidant test. As a result of the cytotoxicity test, the cell viability was good as it showed 103.30% at 0.5 ug/mL, 104.25% at 1 ug/mL, 102.56% at 5 ug/mL, and 99.17% at 10 ug/mL compared to the untreated group. As a result of the patch test on the mask pack formulation, the skin irritation index of 0.02 was judged as a non-irritation product in the skin irritation primary stimulation human application test. In the evaluation of skin moisturizing, it showed a significant increase rate of 19.178% compared to before the sample adaptation. Evaluation of the change over time in the sheet mask pack formulation confirmed the formulation stability without viscosity and pH change for 12 weeks at low temperature(4℃), room temperature(25℃), and high temperature(45℃).