• Title/Summary/Keyword: Mask Stress

Search Result 59, Processing Time 0.053 seconds

A Fully Integrated Thin-Film Inductor and Its Application to a DC-DC Converter

  • Park, Il-Yong;Kim, Sang-Gi;Koo, Jin-Gun;Roh, Tae-Moon;Lee, Dae-Woo;Yang, Yil-Suk;Kim, Jung-Dae
    • ETRI Journal
    • /
    • v.25 no.4
    • /
    • pp.270-273
    • /
    • 2003
  • This paper presents a simple process to integrate thin-film inductors with a bottom NiFe magnetic core. NiFe thin films with a thickness of 2 to 3${\mu}m$ were deposited by sputtering. A polyimide buffer layer and shadow mask were used to relax the stress of the NiFe films. The fabricated double spiral thin-film inductor showed an inductance of 0.49${\mu}H$ and a Q factor of 4.8 at 8 MHz. The DC-DC converter with the monolithically integrated thin-film inductor showed comparable performances to those with sandwiched magnetic layers. We simplified the integration process by eliminating the planarization process for the top magnetic core. The efficiency of the DC-DC converter with the monolithic thin-film inductor was 72% when the input voltage and output voltage were 3.5 V and 6 V, respectively, at an operating frequency of 8 MHz.

  • PDF

Development of three-dimensional thermal oxidation process simulator and analysis the characteristics of multi-dimensional oxide growth (1 Giga급 집적회로 구현을 위한 3차원 산화 공정 시뮬레이터 개발 및 산화층 성장 특성 분석에 관한 연구)

  • 이준하;황호정
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.32A no.8
    • /
    • pp.107-118
    • /
    • 1995
  • Three-dimensional simulator for thermal oxidation process is developed. The simulator is consisted by two individual module, one is analytic-model module and the other is numerical-model module. The analytic-model which uses simple complementary-error function guarantees fast calculation in prediction of multi-dimensional oxidation process. The numerical-model which is based on boundary element method (BEM), has a good accuracy and suitable for various process conditions. The results of this study show that oxide growth is retarded at the corner of hole structure and enhanced at the corner of island structure. These effects are reson of different distribution of oxidant diffusion and mask stress. The utility of models and simulator developed in this study is demonstrated by using it to predict not only traditional shape of LOCOS but also process effects in small geometry.

  • PDF

3.5 inch QCIF AMOLED Panel with Ultra Low Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate

  • Kim, Yong-Hae;Chung, Choong-Heui;Moon, Jae-Hyun;Park, Dong-Jin;Lee, Su-Jae;Kim, Gi-Heon;Song, Yoon-Ho
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2007.08a
    • /
    • pp.717-720
    • /
    • 2007
  • We fabricated the 3.5 inch QCIF AMOLED panel with ultra low temperature polycrystalline silicon TFT on the plastic substrate. To reduce the leakage current, we used the triple layered gate metal structure. To reduce the stress from inorganic dielectric layer, we applied the organic interlayer dielectric and the photoactive insulating layer. By using the interlayer dielectric as a capacitor, the mask steps are reduced up to five.

  • PDF

Improvement of pavement foundation response with multi-layers of geocell reinforcement: Cyclic plate load test

  • Khalaj, Omid;Tafreshi, Seyed Naser Moghaddas;Mask, Bohuslav;Dawson, Andrew R.
    • Geomechanics and Engineering
    • /
    • v.9 no.3
    • /
    • pp.373-395
    • /
    • 2015
  • Comprehensive results from cyclic plate loading at a diameter of 300 mm supported by layers of geocell are presented. The plate load tests were performed in a test pit measuring $2000{\times}2000mm$ in plane and 700 mm in depth. To simulate half and full traffic loadings, fifteen loading and unloading cycles were applied to the loading plate with amplitudes of 400 and 800 kPa. The optimum embedded depth of the first layer of geocell beneath the loading plate and the optimum vertical spacing of geocell layers, based on plate settlement, are both approximately 0.2 times loading plate diameter. The results show that installation of the geocell layers in the foundation bed, increase the resilient behavior in addition to reduction of accumulated plastic and total settlement of pavement system. Efficiency of geocell reinforcement was decreased by increasing the number of the geocell layers for all applied stress levels and number of cycles of applied loading. The results of the testing reveal the ability of the multiple layers of geocell reinforcement to 'shakedown' to a fully resilient behavior after a period of plastic settlement except when there is little or no reinforcement and the applied cyclic pressure are large. When shakedown response is observed, then both the accumulated plastic settlement prior to a steady-state response being obtained and the resilient settlements thereafter are reduced. The use of four layers of geocell respectively decreases the total and residual plastic settlements about 53% and 63% and increases the resilient settlement 145% compared with the unreinforced case. The inclusion of the geocell layers also reduces the vertical stress transferred down through the pavement by distributing the load over a wider area. For example, at the end of the load cycle of the applied pressure of 800 kPa, the transferred pressure at the depth of 510 mm is reduced about 21.4%, 43.9%, 56.1% for the reinforced bases with one, two, and three layers of geocell, respectively, compared to the stress in the unreinforced bed.

Monitoring the failure mechanisms of a reinforced concrete beam strengthened by textile reinforced cement using acoustic emission and digital image correlation

  • Aggelis, Dimitrios G.;Verbruggen, Svetlana;Tsangouri, Eleni;Tysmans, Tine;Van Hemelrijck, Danny
    • Smart Structures and Systems
    • /
    • v.17 no.1
    • /
    • pp.91-105
    • /
    • 2016
  • One of the most commonly used techniques to strengthen steel reinforced concrete structures is the application of externally bonded patches in the form of carbon fiber reinforced polymers (CFRP) or recently, textile reinforced cements (TRC). These external patches undertake the tensile stress of bending constraining concrete cracking. Development of full-field inspection methodologies for fracture monitoring are important since the reinforcing layers are not transparent, hindering visual observation of the material condition underneath. In the present study acoustic emission (AE) and digital image correlation (DIC) are applied during four-point bending tests of large beams to follow the damage accumulation. AE helps to determine the onset of fracture as well as the different damage mechanisms through the registered shifts in AE rate, location of active sources and change in waveform parameters. The effect of wave propagation distance, which in large components and in-situ can well mask the original information as emitted by the fracture incidents is also discussed. Simultaneously, crucial information is supplied by DIC concerning the moments of stress release of the patches due to debonding, benchmarking the trends monitored by AE. From the point of view of mechanics, conclusions on the reinforcing contribution of the different repair methodologies are also drawn.

Analysis of Nursing Intensity Related to Nursing Activities in Operating Room using the Relative Value Scale For Nursing Cost (간호수가 산정을 위한 상대가치를 이용한 수술실 간호행위 간호강도 분석)

  • Ha, Ru Mee;Kwon, Kyoung Ja;Woo, Jin Ha;Kim, Jung A
    • Journal of Korean Clinical Nursing Research
    • /
    • v.20 no.2
    • /
    • pp.162-176
    • /
    • 2014
  • Purpose: The purpose of this study was to perform an operating room nursing activities analysis and estimate nursing intensity of each nursing activity based on the Relative Value Scale (RVS). Methods: The methodology for this study of RVS was based on the work of Hsiao et al. The first stage was to identify nursing activities and the second to measure intensity of nursing activities including technical skill, mental effort, and stress. Results: Calculation of the RVS for 99 nursing practices showed a score range from 300.00 to 1337.78. CS operation assistant, OS operation assistant, and obtaining certification had high nursing intensity. Surgical hand washing, putting on surgical gowns, surgical gloves and surgical caps and mask had low nursing intensity. Conclusion: The activities of operating room are not compensated separately but reimbursement is usually included in physician fees. In the future, an estimation of nursing cost should show the nursing contribution rate to total operation revenue.

A Design of High-Speed Level-Shifter using Reduced Swing and Low-Vt High-Voltage Devices (Reduced Swing 방식과 Low-Vt 고전압 소자를 이용한 고속 레벨시프터 설계)

  • Seo, Hae-Jun;Kim, Young-Woon;Ryu, Gi-Ju;Ahn, Jong-Bok;Cho, Tae-Won
    • Proceedings of the IEEK Conference
    • /
    • 2008.06a
    • /
    • pp.525-526
    • /
    • 2008
  • This paper proposes a new high-speed level shifter using a special high voltage device with low threshold voltage. Also, novel low voltage swing method is proposed. The high voltage device is a standard LDMOS(Laterally Diffused MOS) device in a $0.18{\mu}m$ CMOS process without adding extra mask or process step to realize it. A level shifter uses 5V LDMOSs as voltage clamps to protect 1.8V NMOS switches from high voltage stress the gate oxide. Also, level-up transition from 1.8V to 5V takes only 1.5ns in time. These circuits do not consume static DC power, therefore they are very suitable for low-power and high-speed interfaces in the deep sub-quarter-micron CMOS technologies.

  • PDF

Manufacturing SiNx Extreme Ultraviolet Pellicle with HF Wet Etching Process (HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx)

  • Kim, Ji Eun;Kim, Jung Hwan;Hong, Seongchul;Cho, HanKu;Ahn, Jinho
    • Journal of the Semiconductor & Display Technology
    • /
    • v.14 no.3
    • /
    • pp.7-11
    • /
    • 2015
  • In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

Smart Vehicle Parking Management System using Image Processing

  • Waqas, Maria;Iftikhar, Umar;Safwan, Muhammad;Abidin, Zain Ul;Saud, Ahmed
    • International Journal of Computer Science & Network Security
    • /
    • v.21 no.8
    • /
    • pp.161-166
    • /
    • 2021
  • The term parking management system usually refers to the custom built hardware intensive systems installed in building and malls. However, there are many places where such expensive solutions cannot be installed due to various reasons, like cost and urgent/temporary setup requirements. This project focuses on developing a parking management system based on image processing to detect vacant parking slot in an area where automated systems are not installed. Camera images of the parking area are subjected to image processing algorithm which marks virtual slots in the area and extracts occupancy information to guide the incoming drivers about availability and position of vacant spaces. The application consists of two interfaces: one for the guidance of the incoming drivers and the other one for the administrator. The later interface also informs the administrator if a car is not parked properly in the virtual slot. This parking system would reduce the stress and time wastage associated with car parking and would make the management of such areas less costly.

Three-dimensional finite element analysis on the effects of maxillary protraction with an individual titanium plate at multiple directions and locations

  • Fan Wang;Qiao Chang;Shuran Liang;Yuxing Bai
    • The korean journal of orthodontics
    • /
    • v.54 no.2
    • /
    • pp.108-116
    • /
    • 2024
  • Objective: A three-dimensional-printed individual titanium plate was applied for maxillary protraction to eliminate side effects and obtain the maximum skeletal effect. This study aimed to explore the stress distribution characteristics of sutures during maxillary protraction using individual titanium plates in various directions and locations. Methods: A protraction force of 500 g per side was applied at forward and downward angles between 0° and 60° with respect to the Frankfort horizontal plane, after which the titanium plate was moved 2 and 4 mm upward and downward, respectively. Changes in sutures with multiple protraction directions and various miniplate heights were quantified to analyze their impact on the maxillofacial bone. Results: Protraction angle of 0-30° with respect to the Frankfort horizontal plane exhibited a tendency for counterclockwise rotation in the maxilla. At a 40° protraction angle, translational motion was observed in the maxilla, whereas protraction angles of 50-60° tended to induce clockwise rotation in the maxilla. Enhanced protraction efficiency at the lower edge of the pyriform aperture was associated with increased height of individual titanium plates. Conclusions: Various protraction directions are suitable for patients with different types of vertical bone surfaces. Furthermore, when the titanium plate was positioned lower, the protraction force exhibited an increase.