• Proceedings of the Safety Management and Science Conference
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• 2009.11a
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• pp.187-201
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• 2009

Semiconductor industry is based on equipment industry and timing industry. In particular, semiconductor process is very complex and as semiconductor-chip width tails and is becoming equipment gradually more as a high technology. Equipment operation is primarily engaged in semiconductor manufacturing (engineers and operator) of being conducted by, equipment errors have also been raised. Equipment operational data related to the error of korea occupational safety and health agency were based on data and production engineers involved in the operator's questionnaire was drawn through the error factor. Equipment operating in the error factor of 9 big item and 36 detail item detailed argument based on the errors down, and 9 big item the equipment during operation of the correlation error factor was conducted. Each of the significance level was correlated with the tabulation and analysis. Using the maximum correlation coefficient, the correlation between the error factors to derive the relationship between factors were analyzed. Facility operating with the analysis of error factors (big and detail item) derive a relationship between the model saw. The end of the operation of the facility in operation on the part of the two factors appeared as prevention. Safety aspects and ergonomics aspects of the approach should be guided to the conclusion.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.4 no.3
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• pp.58-66
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• 1995

It is very important to test motion accuracy and performance of NC machine tools as they affect that of all other machines machined by them in industry. In this paper, in has become possible to detect errors of linear displacement of radial direction for circular motion test using newly assembled magnetic type of linear scales so called Magnescale ball bar system, and to calculate time interval getting error motion data and revolution angle of circular motion in machining center using tick pulses come out from computer. And a set of error data gotten from test is expressed to a plot by computer treatment and to numerics of error motion by statistical treatment and results of test are compared with those of Renishaw ball bar system.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.698-700
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• 2003

LGP (Light-Guide Panel) of TFT-LCD Backligh/Frontlight is one of the major components which affect on the product quality of LCD. Since the brightness distribution of LGP is sensitive to the process error in manufacturing, the optical characteristics such as reflection and absorption of LGP pattern should be modeled including the process error. LGP is developed by using the fast and reliable design technology, which uses the concept of the inverse-design, makes the model on the characteristics of uncertainty in the manufacturing process, and designs the dispersion pattern analytically without try-and-error by using an artificial intelligence. The PEA(Process-Error-Adaptive) design gives the best solution in handling the process error. The offset of target in feedback system makes such the best pattern design possible that the brightness distribution is nearly same (more than 90%) with target in regardless of the miscellaneous errors in mass production. The present design method has been also applied to frontlight and multi-side-lamp(eg., four-side-four-lamp) backlight.

• Proceedings of the IEEK Conference
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• 2002.06e
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• pp.211-214
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• 2002

Under a continuous manufacturing process, two dimension inspection system causes problems as blurring effect and low resolution and requires position calibration between frames. One dimension inspection system is, therefore, being researched as a substitution. In this paper, we implement mechanism of switching memory and processing data for reasonable one dimension inspection system. Redundant weft image and noise was suggested to be reduced by new method using modified morphological process and masked erosion process. From resulting image, line data and possible error information were obtained and constructed as a structure. Finally, error detecting algorithm was performed with this data structure. Processing time of error detecting was 0.625ms per line in applied system and experiment showed 94.7% of error detecting ability. This method is 20% faster in speed and 2.7% higher in error detecting ability comparing with the present method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.4
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• pp.13-19
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• 2004

This paper deals with the analysis of geometric error and the optimization of process parameters in surface grinding. Taguchi method which is one of the design of experiments has been introduced in achieving the aims. The process parameters were the grain size, the wheel speed, the depth of cut and the table speed. The effect of the process parameters on the geometric error was examined and an optimal set of the parameters was selected to minimize the geometric error within the controllable range of the used grinding machine. The reliability of the results was evaluated by the ANOVA.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.16 no.2
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• pp.88-93
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• 2017

Due to the requirement of the development of the precision manufacturing industry, the accuracy of machine tools has become a key issue in this field. A critical factor that affects the accuracy of machine tools is the feed system, which is generally driven by a ball screw. Basically, to improve the performance of the feed drive system, which will be thermally extended lengthwise by continuous usage, a thermal error compensation system that is highly dependent on the feedback temperature or positioning data is employed in the machine tool system. Due to the overdependence on measuring technology, the cost of the compensation system and low productivity level are inevitable problems in the machine tool industry. This paper presents a novel feed drive thermal error compensation system method that could compensate for thermal error without positioning or temperature feedback. Regarding this thermal error compensation system, the heat generation of components, principal of compensation, thermal model, mathematic model, and calculation method are discussed. As a result, the test data confirm the correctness of the developed feed drive thermal error compensation system very well.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.1
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• pp.7-14
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• 2004

Machining error is defined the normal distance between designed surface and actual tool path with tool deflection. This is inevitably caused by the tool deflection, tool wear, thermal effect and machine tool errors and so on. Among these factors, tool deflection is usually known as the most significant factor of machining error. Tool deflection problem is analyzed using Instantaneous horizontal cutting forces. The high quality and precision of machining products are required in finishing. In order to achieve these purposes, it is necessary work that decrease the machining error. This paper presents a study on the machining error caused by the tool deflection in ball end milling of 2 dimensional surface. Tool deflection model and simple machining error prediction model are described. This model is checked the validity with machining experiments of 2 dimensional surface. These results may be used to decrease machining error and tool path decision.

• Journal of KSNVE
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• v.8 no.5
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• pp.841-848
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• 1998

In the gear manufacturing, tooth modification is usually applied for the prevention of tooth impact during the loading. In contrary, tooth profile error causes amplifying the whine noise which is cumbersome to reduce in the automobile gear box. So optimum quantity of the modifications must be obtained for the good performance in the vibrational sense. In this paper, a formulation to define the tooth curve by considering the profile manufacturing error and loading deformation of the gear tooth is suggested and the transmission error and loading deformation of the gear tooth is suggested and the transmission error with modified tooth in the gear system is evaluated. A pair of gear set is mathematically modelled. The equivalent excitation in the gear vibratonal model is formulated. For the experimental evaluaton on the derived transmission error function, a simple geared system is set up in which the gears are designed to give pre-designed tooth profile modification and manufactured by CNC Wire Cutting Machine. Under slow speed operaton, the transmission error of the gear pair is measured by using two rotational laser vibrometers, compared with the calculated one of which the result shows good agreement.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.7
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• pp.15-24
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• 2021

In this paper, to analyze the types of surface morphology error according to factors that cause machining error, the experiments were conducted in the ultra-precision diamond machine using a diamond tool. The factors causing machining error were classified into the pressure variation of compressed air, external shock, tool errors, machining conditions (rotational speed and feed rate), tool wear, and vibration. The pressure variation of compressed air causes a form accuracy error with waviness. An external shock causes a ring-shaped surface defect. The installed diamond tool for machining often has height error, feed-direction position error, and radius size error. The types of form accuracy error according to the tool's errors were analyzed by CAD simulation. The surface roughness is dependent on the tool radius, rotational speed, and feed rate. It was confirmed that the surface roughness was significantly affected by tool wear and vibration, and the surface roughness of Rz 0.0105 ㎛ was achieved.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.2
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• pp.121-128
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• 2011

As high precision industries such as semiconductor, TFT-LCD manufacturing and MEMS continue to grow, the demand for higher DOF precision stages has been increasing. In general, the stages should accommodate a prescribed range of payloads in order to position various precision manufacturing/inspection instruments. Therefore a nonlinear controller using sliding motion is developed, which bears mass perturbation and makes the upper plate of the stage move in 6 DOF. For the application of the nonlinear control, an observer is also developed based on expected noise covariance. To eliminate the steady state error of step response, integral terms are inserted into the state-space model. The linear term of the controller is designed using optimization scheme in which parameters can be weighted according to their physical significance, whereas the nonlinear term of the controller is designed using trial and error method. A comprehensive simulation study proves that the designed controller is robust against mass perturbation and completely eliminates steady state errors.