• 제목/요약/키워드: Magnetic Field Detecting Sensor

검색결과 31건 처리시간 0.034초

3상의 자계 검출을 위한 수직 Hall 센서의 제작 (Fabrication of vertical Hall sensor for detecting three phases magnetic field)

  • 이지연;남태철
    • 센서학회지
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    • 제14권2호
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    • pp.85-90
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    • 2005
  • In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informations of miniaturized brushless motor. The sensor gives three position signals phase shifted by $120^{\circ}$, corresponding to the motor driving signals. The branch has one Hall output and one input each other. The central part acts as common driving input. Sensor has branch width of $150{\mu}m$ and distance from central electrode to Hall electrode of $100{\mu}m$. The sensitivity of sensor is 250 V/$A{\cdot}T$ at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with $120^{\circ}$ phase over a $360^{\circ}$ rotation. A packaged sensing part are $2{\times}2mm^{2}$ and has been successfully tested on a motor rotation at a speed up to 60,000 rpm.

지자기 센서를 이용한 차량감지 관한 연구 (A Research on the Vehicle Detecting Using Earth Magnetic Field Sensor)

  • 강문호;정대연
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 B
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    • pp.1239-1241
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    • 2001
  • This research addresses a new vehicle detecting scheme which uses MR(Megneto Resistive) sensor. A vehicle detector which includes two MR sensors for detecting car presence and speed, sensor voltage amplifiers, signal processor, microprocessor, RF data transceiver and a simple car moving simulator is constructed. From experimental results with the vehicle detector the proposed vehicle detecting scheme was verified.

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MI센서를 이용한 3차원상 자석 위치 추정 기술 (Magnet Location Estimation Technology in 3D Using MI Sensors)

  • 조주혁;김화영
    • 센서학회지
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    • 제32권4호
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    • pp.232-237
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    • 2023
  • This paper presents a system for estimating the position of a magnet using a magnetic sensor. An algorithm is presented to analyze the waveform and output voltage values of the magnetic field generated at each position when the magnet moves and to estimate the position of the magnet based on the analyzed data. Here, the magnet is sufficiently small to be inserted into a blood vessel and has a micro-magnetic field of hundreds of nanoteslas owing to the small size and shape of the guide wire. In this study, a highly sensitive magneto-impedance (MI) sensor was used to detect these micro-magnetic fields. Nine MI sensors were arranged in a 3×3 configuration to detect a magnetic field that changes according to the position of the magnet through the MI sensor, and the voltage value output was polynomially regressed to specify a position value for each voltage value. The accuracy was confirmed by comparing the actual position value with the estimated position value by expanding it from a 1D straight line to a 3D space. Additionally, we could estimate the position of the magnet within a 3% error.

TMAH에 의한 이방성 식각을 이용한 3차원 자기센서의 제작 (Fabrication of 3-dimensional magnetic sensor by anisotropic etching in TMAH)

  • 정우철;남태철
    • 센서학회지
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    • 제8권4호
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    • pp.308-313
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    • 1999
  • 본 논문에서는 TMAH를 이용한 비등방성 에칭기술을 이용하여 3차원의 자장의 값을 측정하기 위한 경사각 구조의 3차원 자기센서를 제작하였다. 제작된 3차원 자기센서는 비등방성 식각에 의하여 [100] 결정방향의 Si 표면에 [111] 결정방향의 경사면을 구성하여 이 경사면에 경사각 Hall 소자를 제작하였으며, 기존의 3차원 자기센서에 비하여 개선된 감도 특성을 나타내었다. 제작된 소자의 적감도는 547V/AT 이었으며 자기센서 출력의 PSD 성분의 측정에 의해 계산 되어진 최소측정 자장은 0.07G 이었다.

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원격작업의 효율성 향상을 위한 단일 홀센서 비접촉식 전자 조이스틱 (Non-contact Electronic Joystick with a Hall Sensor for Effective Tele-operation)

  • 김홍철;강대훈;이장명
    • 제어로봇시스템학회논문지
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    • 제12권4호
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    • pp.358-363
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    • 2006
  • This paper demonstrates a new non-contact electronic joystick using single hall sensor which detects a horizontal vector of the magnetic field. Furthermore, in this paper, it is mathematically modeled that nonlinear characteristics between the output of hall sensor and the movement of joystick bar. The dynamic horizontal vector of magnetic flux is detected by the hall sensor while a permanent magnet is rotated with the joystick bar, which has two dimension detecting area. Using the nonlinear adjustment equations, the output signals of hall sensor have been linearized to give higher accuracy in the two dimension movement. Finally, through the real experiments, it is showed that the single hall sensor structure mechanism is superior to the dual sensor structure in sensing the two-dimensional motion without offset.

CoZrNb 막을 이용한 MI센서 제작 및 특성 (Fabrication and Properties of MI Sensor using CoZrNb films)

  • 허진;김영학;신광호;사공건
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.132-135
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    • 2002
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

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A New Type of MR Sensor-Based Vehicle Detector with High Performance and Reliability

  • Kang, Moon-Ho
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.1689-1693
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    • 2004
  • This paper proposes a vehicle detector with a magnetoresistive (MR) sensor. The detector consists of a MR sensor and mechanical and electronic apparatuses. Composed of six magnetically variable resistors, the MR sensor senses disturbance of the earth's magnetic field caused by a moving vehicle over itself and then produces an output indicative of the moving vehicle. Experiments have been carried out with three stages. At the first stage, the outputs of the sensor have been analyzed to show the validity of the detector's circuit and the detecting method. At the second stage, the detector has been tested on a local highway in Korea. Through the field tests, the outputs of the detector in response to various kinds of moving vehicles have been collected and analyzed. At the final stage, to verify the performance of the detector, traffic volumes on the highway have been measured with the detector and compared with the exact traffic volumes in a highly congested traffic.

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CoZrNb막의 주파수에 따른 임피던스의 변화 (Impedance of CoZrNb Film as a Function of Frequency)

  • 허진;김영학;신광호;박경일;사공건
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.778-781
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    • 2002
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field$(H_k)$ as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C}$ respectively for 2 hours. Anisotropy field$(H_k)$ of film is measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb film is decreased due to the skin effect with increasing a thickness of the CoZrNb film, and hence its driving frequency is lowered. And, it was examined on the permeability and impedance to fabricate the MI sensor which acts at a low frequency by thickening a CoZrNb film relatively.

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Planar Hall Sensor Used for Microbead Detection and Biochip Application

  • Thanh, N.T.;Kim, D.Y.;Kim, C.G.
    • Journal of Magnetics
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    • 제12권1호
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    • pp.40-44
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    • 2007
  • The Planar Hall effect in a spin valve structure has been applied as a biosensor being capable of detecting $Dynabeads^{(R)}$ M-280. The sensor performance was tested under the application of a DC magnetic field where the output signals were obtained from a nanovoltmeter. The sensor with the pattern size of $50{\times}100{\mu}m^2$ has produced high sensitivity; especially, the real-time profiles by using that sensor revealed significant performance at external applied magnetic field of around 7.0 Oe with the resolution of 0.04 beads per $\mu m^2$. Finally, a successful array including 24 patterns with the single sensor size of $3{\times}3{\mu}m^2$ has shown the uniform and stable signals for single magnetic bead detection. The comparison of this sensor signal with the others has proved feasibility for biosensor application. This, connecting with the advantages of more stable and high signal to noise of PHR sensor's behaviors, can be used to detect the biomolecules and provide a vehicle for detection and study of other molecular interaction.

CoZrNb막의 두께에 따른 투자율의 변화 (Permeability of CoZrNb film with thickness)

  • 허진;김영학;신광호;사공건
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.443-446
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    • 2001
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field(H$\sub$k/) as a function of a thickness of sputtered amorphous CoZrNb thin film with high saturation magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, thin film was subjected to post annealing with a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ for 2 hour. Anisotropy field(H$\sub$k/)of thin film is measured by using MH loop tracer. Its magnetic permeability of thin film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb thin film is decreased due to the skin effect with increasing a thickness of CoZrNb thin film, and hence its driving frequency is lowered.

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