Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of vertical Hall sensor for detecting three phases magnetic field

3상의 자계 검출을 위한 수직 Hall 센서의 제작

  • Lee, Ji-Yeon (School of Electrical Engineering and Computer Science, Yeungnam University) ;
  • Nam, Tae-Chul (School of Electrical Engineering and Computer Science, Yeungnam University)
  • 이지연 (영남대학교 전자정보공학부) ;
  • 남태철 (영남대학교 전자정보공학부)
  • Published : 2005.03.30
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Abstract

In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informations of miniaturized brushless motor. The sensor gives three position signals phase shifted by $120^{\circ}$, corresponding to the motor driving signals. The branch has one Hall output and one input each other. The central part acts as common driving input. Sensor has branch width of $150{\mu}m$ and distance from central electrode to Hall electrode of $100{\mu}m$. The sensitivity of sensor is 250 V/$A{\cdot}T$ at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with $120^{\circ}$ phase over a $360^{\circ}$ rotation. A packaged sensing part are $2{\times}2mm^{2}$ and has been successfully tested on a motor rotation at a speed up to 60,000 rpm.

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