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http://dx.doi.org/10.5369/JSST.2005.14.2.085

Fabrication of vertical Hall sensor for detecting three phases magnetic field  

Lee, Ji-Yeon (School of Electrical Engineering and Computer Science, Yeungnam University)
Nam, Tae-Chul (School of Electrical Engineering and Computer Science, Yeungnam University)
Publication Information
Journal of Sensor Science and Technology / v.14, no.2, 2005 , pp. 85-90 More about this Journal
Abstract
In this study, we have fabricated a three branches vertical Hall sensor for detecting three phases rotation informations of miniaturized brushless motor. The sensor gives three position signals phase shifted by $120^{\circ}$, corresponding to the motor driving signals. The branch has one Hall output and one input each other. The central part acts as common driving input. Sensor has branch width of $150{\mu}m$ and distance from central electrode to Hall electrode of $100{\mu}m$. The sensitivity of sensor is 250 V/$A{\cdot}T$ at magnetic field of 0.1 T. It has also showed three sine waves of Hall voltages with $120^{\circ}$ phase over a $360^{\circ}$ rotation. A packaged sensing part are $2{\times}2mm^{2}$ and has been successfully tested on a motor rotation at a speed up to 60,000 rpm.
Keywords
vertical Hall sensor; motor control; angular position; brushless motor;
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