• Title/Summary/Keyword: MS pad

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Development of Microstructure Pad and Its Performances in STI CMP (미세 표면 구조물을 갖는 패드의 제작 및 STI CMP 특성 연구)

  • Jeong, Suk-Hoon;Jung, Jae-Woo;Park, Ki-Hyun;Seo, Heon-Deok;Park, Jae-Hong;Park, Boum-Young;Joo, Suk-Bae;Choi, Jae-Young;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.3
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    • pp.203-207
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    • 2008
  • Chemical mechanical polishing (CMP) allows the planarization of wafers with two or more materials. There are many elements such as slurry, polishing pad, process parameters and conditioning in CMP process. Especially, polishing pad is considered as one of the most important consumables because this affects its performances such as WIWNU(within wafer non-uniformity) and MRR(material removal rate). In polishing pad, grooves and pores on its surface affect distribution of slurry, flow and profile of MRR on wafer. A subject of this investigation is to apply CMP for planarization of shallow trench isolation structure using microstructure(MS) pad. MS pad is designed to have uniform structure on its surface and manufactured by micro-molding technology. And then STI CMP performances such as pattern selectivity, erosion and comer rounding are evaluated.

Structure elucidation of a newly isolated saponin from Clerodendrum serratum (L) Moon

  • Bhujbal, Santosh S.;K.Nanda, Rabindra;S.Deoda, Ramesh;Kumar, Dinesh;Kewatkar, Shailesh M.;S.More, Laxmikant;J.Patil, Manohar
    • Advances in Traditional Medicine
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    • v.10 no.4
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    • pp.319-321
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    • 2010
  • Plant saponins are widely distributed amongst plants and have a wide range of biological properties. Icosahydropicenic acid, $C_{51}H_{80}O_{19}$ ((4S,6bS)-8a-((4,5-dihydroxy-6-methyl-3-((3R)-3,4,5-trihydroxy-6-methyl-tetrahydro-2H-pyran-2-yloxy)-tetrahydro-2H-pyran-2-yloxy)carbonyl)-2-hydroxy-4, 6a, 6b, 11, 14b-pentamethyl-11-(2-methylprop-1-enyl)-3-(3,4,5-trihydroxy-6-(hydroxymethyl) - tetrahydro-2Hpyran-2-yloxy)-1, 2, 3, 4, 4a, 5, 6, 6a, 6b, 7, 8, 8a, 9, 10, 11, 12, 12a, 14, 14a, 14b-icosahydropicene-4-carboxylic acid), a new saponin was first time isolated from the roots of Clerodendrum Serratum (L) Moon (Verbenaceae). The structure elucidation of the compound was carried out by $^1H$ NMR and DART-MS studies.

A study on the application of MEMS CMP with Micro-structure pad (마이크로 구조를 가진 패드를 이용한 MEMS CMP 적용에 관한 연구)

  • Park Sung-Min;Jeong Suk-Hoon;Jeong Moon-Ki;Park Boum-Young;Jeong Hea-Do
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.481-482
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    • 2006
  • Chemical-mechanical polishing, the dominant technology for LSI planarization, is trending to play an important function in micro-electro mechanical systems (MEMS). However, MEMS CMP process has a couple of different characteristics in comparison to LSI device CMP since the feature size of MEMS is bigger than that of LSI devices. Preliminary CMP tests are performed to understand material removal rate (MRR) with blanket wafer under a couple of polishing pressure and velocity. Based on the blanket CMP data, this paper focuses on the consumable approach to enhance MEMS CMP by the adjustment of slurry and pad. As a mechanical tool, newly developed microstructured (MS) pad is applied to compare with conventional pad (IC 1400-k Nitta-Haas), which is fabricated by micro melding method of polyurethane. To understand the CMP characteristics in real time, in-situ friction force monitoring system was used. Finally, the topography change of poly-si MEMS structures is compared according to the pattern density, size and shape as polishing time goes on.

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Analysis of Heterocyclic Amines in Mainstream Cigarette Smoke using by LC-MS/MS (LC-MS/MS를 이용한 담배 연기 중 Heterocyclic Amines의 분석)

  • Kim, Ick-Joong;Jang, Gi-Chul;Ji, Sang-Un;Min, Hye-Jeong;Kim, Hyo-Keun;Hwang, Geon-Jung
    • Journal of the Korean Society of Tobacco Science
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    • v.30 no.1
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    • pp.33-38
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    • 2008
  • This study was carried out to determine the analytical methods for heterocyclic amines(HAs) of the tobacco smoke by LC/MS/MS. HAs have been found in pyrolysate of protein and cooked food including protein, were known the Sugimura compound. HAs content of the smoke were known to exist very low ppb level. Especially, some of HAs are mutagenic and carcinogenic compounds. In according to IARC, the toxicity of N-heterocyclic amines classified IARC class 2A or 2B group. Precursors of these compounds are glutamic acid, protein and free amino acids including tryptophan, therefore, the precursors have been proved in cooked food continuously. This study was investigate multiple analysis methods for HAs and HAs contents of some commercial products. In this study, we used the linear type smoking machine for HAs analysis. At the ISO conditions, mainstream smoke was collected on cambridge filter pad, and then cambridge filter pad was extracted by 0.1% acetic acid. The extracted solution were passed cation exchange SPE cartridge to remove matrix, samples were analyzed using LC/MS/MS on MRM mode. From the result that optimized this methods, the correlation coefficient(R) of the individual compounds were good linearity over 0.999, recovery rate over 96% and the limit of detection were good values between 0.06 to 0.37 ng/mL, In addition, HAs content of some commercial products were in range of 0.02 to 43.8 ng/cig.

Studies on Optimization of PHEMTs (PHEMT 소자 최적화에 대한 연구)

  • 한효종;이문교;설우석;이복형;이한신;임병옥;김삼동;이진구
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.747-750
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    • 2003
  • We have studied PHEMTs optimization by means of fabrication of PHEMTs. All PHEMTs have been fixed with a gate length of 0.1 ${\mu}{\textrm}{m}$, a gate head size of 0.75${\mu}{\textrm}{m}$, and two gate fingers. We have measured the characteristics of PHEMTs with variation of source-drain spacing, pad size, and gate width. As a result, we have found the enhanced characteristics of $I_{dss}$, $S_{21}$, $h_{21}$, $f_{T}$, $f_{max}$, and $G_{ms}$ with increasing gate width. Also, $g_{m}$ has improved with decreasing source-drain spacing, and $S_{21}$ has improved with deceasing pad size.e.e.e.e.

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Analysis of the Structure and Stability of Erythropoietin by pH and Temperature Changes using Various LC/MS

  • Chang, Seong-Hun;Kim, Hyun-Jung;Kim, Chan-Wha
    • Bulletin of the Korean Chemical Society
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    • v.34 no.9
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    • pp.2663-2670
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    • 2013
  • The purpose of stability testing is to provide evidence about how the quality of a drug varies with time under the influence of a variety of environmental factors. In this study, erythropoietin (EPO) was analyzed under different pH (pH 3 and pH 9) and temperature ($25^{\circ}C$ and $40^{\circ}C$) conditions according to current Good Manufacturing Practice (cGMP) and International Conference on Harmonisation (ICH) guidelines. The molecular weight difference between intact EPO and deglycosylated EPO was determined by SDS-PAGE, and aggregated forms of EPO under thermal stress and high-pH conditions were investigated by size exclusion chromatography. High pH and high temperature induced increases in dimer and high molecular weight aggregate forms of EPO. UPLC-ESI-TOF-MS was applied to analyze the changed modification sites on EPO. Further, normal-phase high-performance liquid chromatography was performed to identify proposed glycan structures and high pH anion exchange chromatography was carried out to investigate any change in carbohydrate composition. The results demonstrated that there were no changes in modification sites or the glycan structure under severe conditions; however, the number of dimers and aggregates increased at $40^{\circ}C$ and pH 9, respectively.

Effect of Different Cooling System on Performance and Hair Cortisol on Sows under Heat Stress (고온기 분만사 내 냉방 시설의 종류가 모돈의 번식성적 및 스트레스 지표에 미치는 영향)

  • Oh, Seung-Min;Choi, Yo-Han;Kim, Dong-Woo;Ha, Sang-Hun;Kim, Jo-Eun;Jung, Hyun-Jung;Kim, Jin-Soo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.3
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    • pp.160-168
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    • 2021
  • This study was undertaken to determine the effect of different cooling systems on the performance and hair cortisol of sows under heat stress. During a 21-day experiment, a total of 40 multiparous sows (Landrace×Yorkshire; 242.84±2.89 kg) were allotted to 4 treatments, each with 10 replicates (1 sow per pen). The experimental treatments were CP (Cooling pad), AC (Air conditioner), SC (Snout cooling), and MS (Mist spray). We observed an increase in the average daily feed intake during lactation (p<0.05) in the CP and AC treatment groups. AC treatment had the highest (p<0.05) and SC treatment had the lowest (p<0.05) piglet weight at weaning. During lactation, sows administered SC and MS treatments had higher (p<0.05) hair cortisol accumulation, as compared with the AC and CP treatments. Hair cortisol accumulation in piglets during lactation was highest with MS treatment (p<0.05), and lowest after CP treatment (p<0.05). MS treatment had the highest (p<0.05), and AC treatment had the lowest (p<0.05) respiratory rate and rectal temperature during lactation. In conclusion, our results indicate that a cooling pad and air conditioning cooling system increases the productivity of a sow, as compared to snout cooling and mist spray cooling systems.

Alternative Sample Preparation Techniques in Gas Chromatographic-Mass Spectrometric Analysis of Urinary Androgenic Steroids

  • Cho, Young-Dae;Choi, Man-Ho
    • Bulletin of the Korean Chemical Society
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    • v.27 no.9
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    • pp.1315-1322
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    • 2006
  • The following study describes the gas chromatography-mass spectrometry (GC-MS) based screening and confirmation analysis of urinary androgenic steroids. Four commercially available solid-phase extraction (SPE) cartridges, Serdolit PAD-1, Sep-pak $C_{18}$, amino-propyl, and Oasis HLB, and three different extractive organic solvents, diethyl ether, methyl tert-butyl ether (MTBE), and n-pentane, were tested for sample preparation. Overall, Oasis HLB combined with MTBE extraction provided the highest recoveries in 39 of 46 total androgenic steroids examined and it showed a good extraction yield (>82.1%) for polar steroids, such as metabolites of fluoxymesterone, oxandrolone, and stanozolol, which gave a poor recovery in both n-pentane (9.2-64.3%) and diethyl ether (22.2-73.6%) extractions. All SPE sorbents tested showed potential, because they were efficient in extraction for most or selective steroids. When applied to positive urine samples based on the results obtained, the present method allowed selective and sensitive analysis for detection of urinary androgenic steroids. The experiments showed that the high-resolution MS method is clearly more efficient than the low-resolution MS technique for the detection of many urinary steroids. However, comprehensive sample clean-up procedures also might be needed especially in confirmation analysis to increase detectability.

Effects of various cooling methods and drinking water temperatures on reproductive performance and behavior in heat stressed sows

  • Habeeb, Tajudeen;Joseph, Moturi;Abdolreza, Hosseindoust;SangHun, Ha;Jun Young, Mun;YoHan, Choi;SooJin, Sa;JinSoo, Kim
    • Journal of Animal Science and Technology
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    • v.64 no.4
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    • pp.782-791
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    • 2022
  • The purpose of this study is to evaluate the effects of multiple cooling systems and different drinking water temperatures (DWT) on the performance of sows and their hair cortisol levels during heat stress. In this study, the effect of four different cooling systems: air conditioner (AC), cooling pad (CP), snout cooling (SC), and mist spray (MS), and two DWT, namely low water temperature (LWT) and high water temperature (HWT) on 48 multiparous sows (Landrace × Yorkshire; 242.84 ± 2.89 kg) was tested. The experiment is based on the use of eight replicas during a 21-days test. Different behaviors were recorded under different cooling treatments in sows. As a result, behaviors such as drinking, standing, and position change were found to be lower in sows under the AC and CP treatments than in those under the SC and MS treatments. Lying behavior increased under the AC and CP systems as compared with that under the SC and MS, systems. The average daily feed intake (ADFI) in sows and weight at weaning in piglets was higher under the AC, CP, and LWT treatments than under the SC, MS and HWT treatments. Sows subjected to SC and MS treatment showed higher hair cortisol levels, rectal temperature, and respiratory rate during lactation than those under AC and CP treatments. Hair cortisol levels, rectal temperature, and respiratory rate were also higher under the HWT than under the LWT treatment. As per the results of this study, the LWT has no significant effect on any of the behavioral factors. Taken together, the use of AC and CP cooling treatment is highly recommended to improve the behavior and to reduce the stress levels in lactating sows.

A Relay-assisted Secure Handover Mechanism for High-speed Trains

  • Zhao, Yue;Tian, Bo;Chen, Zhouguo;Yang, Jin;Li, Saifei
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.13 no.2
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    • pp.582-596
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    • 2019
  • Considering that the existing Long Term Evolution is not suitable for the fast and frequent handovers of high-speed trains, this paper proposes a relay-assisted handover mechanism to solve the problems of long handover authentication time and vulnerable to security attacks. It can achieve mutual authentication for train-ground wireless communication, and data transmission is consistent with one-time pad at the same time. The security analysis, efficiency analysis and simulation results show that the proposed mechanism not only realizes the forward security and resists many common attacks, but also effectively reduces the computational overhead of train antenna during the secure handover process. When the running speed of a train is lower than 500km/h, the handover delay is generally lower than 50ms and the handover outage probability is less than 1.8%. When the running speed of a train is 350km/h, the throughput is higher than 16.4mbps in the process of handover. Therefore, the secure handover mechanism can improve the handover performance of high-speed trains.