• 한국정보과학회논문지:시스템및이론
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• 제34권2호
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• pp.49-56
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• 2007

MEMS 기반 저장장치는 높은 대역폭과 저전력성, 고집적도, 저가 등의 특성으로 인해 모바일 기기에서 대용량 서버 시스템에 이르는 다양한 환경에서 사용가능한 차세대 저장장치이다. MEMS 기반 저장장치는 원판이 회전하는 하드디스크와 달리 매체가 사각형 구조로 되어 있으며 하나의 매체에 동시에 읽고 쓸 수 있는 수천 개의 헤드가 존재한다. 본 논문에서는 이와 같은 MEMS 기반 저장장치의 물리적 특성에 적합한 새로운 입출력 요청 스케줄링 기법을 제안한다. 새롭게 제안한 알고리즘은 사각형 평면상에서의 헤드의 탐색 시간뿐 아니라 수천 개의 헤드에 의한 병렬적인 입출력을 고려한다. 또한, 기아 현상(starvation)을 극복하기 위해 알고리즘에 노화 요소(aging factor)를 반영한다. 트레이스 기반 모의 실험을 통해 본 논문이 제안한 스케줄링 알고리즘이 기존의 대표적인 알고리즘인 SPTF(Shortest Positioning Time First) 알고리즘에 비해 평균 응답 시간과 응답 시간의 편차 측면에서 각각 39.2%와 62.4%가 향상됨을 보였다.

• 한국공작기계학회논문집
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• 제15권3호
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• pp.82-90
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

• 한국정밀공학회지
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• 제23권9호
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• 한국정밀공학회지
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• 제22권11호
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• JSTS:Journal of Semiconductor Technology and Science
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• 제1권1호
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• 정보저장시스템학회논문집
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• 제8권1호
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• pp.6-10
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• 2012

The tribological behavior of microsystems needs to be clearly understood in order to improve the reliability of precision components. For example, friction and wear phenomena pose serious problems in MEMS applications. As a first step to investigate the tribological behavior of such systems, an appropriate testing system must be acquired. In this work, a micro-wear tester based MEMS platform was designed. The main concern was to achieve a desirable range of horizontal displacement for the specimen holder and also to apply a normal force in the tens of ${\mu}N$ range. The structural analysis of the micro-wear tester showed that the proposed design satisfied these requirements while maintaining the structural integrity.

• 인재니움
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• 제8권2호
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• pp.51-57
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• 2001

• 한국정보과학회:학술대회논문집
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• 한국정보과학회 2005년도 가을 학술발표논문집 Vol.32 No.2 (1)
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• pp.880-882
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• 2005

MEMS 저장 장치는 기존의 디스크 저장 장치와는 다른 물리적 특성을 가지고 있는 차세대 저장 장치이다. 때문에 MEMS 저장 장치의 물리적 특성을 고려하는 디스크 스케줄링과는 다른 관리 기법이 필요하다. 본 연구에서는 MEMS 저장장치의 물리적 특성을 고려한 트랙 기반 스케줄링 방법에 대하여 제안하였다. 트랙 기반 스케줄링 기법은 스케줄링에서의 문제 상태 공간과 스케줄링을 위한 연산 횟수를 줄이고 상대적으로 정착시간에 많은 크기를 갖는 물리적 특성을 고려하여 정착시간의 추가 횟수를 줄임으로서 요청에 대한 빠른 서비스를 가능하게 해주고 요청에 대한 대기 시간을 고려함으로서 동시에 기아상태를 방지한다.

• 센서학회지
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• 제30권2호
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• pp.71-75
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• 2021

Recently, transition-metal-based hydroxide materials have attracted significant attention in various electrochemical applications owing to their low cost, high stability, and versatility in composition and morphology. Among these applications, transition-metal-based hydroxides have exhibited significant potential in supercapacitors owing to their multiple redox states that can considerably enhance the supercapacitance performance. In this study, nanostructured Ni-Mn double hydroxide is directly grown on a conductive substrate using an electrodeposition method. Ni-Mn double hydroxide exhibits excellent electrochemical charge-storage properties in a 1 M KOH electrolyte, such as a specific capacitance of 1364 Fg-1 at a current density of 1 mAcm-2 and a capacitance retention of 94% over 3000 charge-discharge cycles at a current density of 10 mAcm-2. The present work demonstrates a scalable, time-saving, and cost-effective approach for the preparation of Ni-Mn double hydroxide with potential application in high-charge-storage kinetics, which can also be extended for other transition-metal-based double hydroxides.