• 한국기계가공학회지
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• 제5권1호
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1001-1006
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• 2003

This paper presents the pedestrian navigation algorithm and the error compensation filter. The pedestrian navigation system (PNS) consists of the MEMS inertial sensors, the fluxgate, and the small-size GPS receiver. PNS calculates the navigational information using the signal patterns of the accelerometers. And the navigational information is completed by integration of the patterns, the fluxgate, and the GPS information. In general, PNS can provide the better solution than the low-cost inertial navigation system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.72-75
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• 2004

In this paper, a finger-click recognition method is proposed to improve the recognition performance for finger-clicking of a wearable input device, called $SCURRY^{TM}$. The proposed method is composed of three parts including feature extraction part, valid click discrimination part, and cross-talk avoidance part. Two types of MEMS inertial sensors are embedded into the wearable input device to measure the angular velocity of a hand (hand movement) and the acceleration rates at the ends of fingers (finger-click motion). The experiment applied to the $SCURRY^{TM}$ device shows the improved stability and performance.

• 센서학회지
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• 제14권1호
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• pp.47-51
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• 2005

An active ${\mu}$-mixer is important in Bio-MEMS and ${\mu}$-TAS. The mixing state depends on some kinds of factors including the intensity of ultrasonic radiation. We have visualized the mixing state of the mixing chamber with radiation time and presented the influence of the driving voltage in this research. It will be possible to compare the performances of the ultrasonic radiation parts used in the active ${\mu}$-mixer using this method.

• 센서학회지
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• 제14권1호
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• pp.16-21
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• 2005

This paper presents the development of the optical switch using magnetic behavior of magnetic fluids, which is expected to be used broadly in high-speed information communication. The magnetic fluids for switching an incident light, have the magnetic characteristics of magnetic materials and fluidity of liquids, simultaneously. The relations are derived between the intensity of magnetic field and the angle of optical fiber which is bent by a behavior of magnetic fluid when the magnetic field is applied. When optical switch is implemented by the movement of liquid using magnetic fluid, the existing problem of durability for optical switch will be improved. Thus, this study shows the feasibility of the application for the optical switches using magnetic fluids.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.217-217
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths, $10\;{\mu}m$ width, and $0.4\;{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the 60 ~ 100 ${\mu}m$ long cantilevers, the fundamental frequency appeared at 373.4 ~ 908.1 kHz. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제13권4호
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• pp.264-269
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• 2004

This paper describes on an advanced technology of 3C-SiC/Si(100) wafer direct bonding using PECVD oxide to intermediate layer for SiCOI(SiC-on-Insulator) structure because it has an attractive characteristics such as a lower thermal stress, deposition temperature, more quick deposition rate and higher bonding strength than common used poly-Si and thermal oxide. The PECVD oxide was characterized by ATR-FTIR. The bonding strength with variation of HF pre treatment condition was measured by tensile strength measurement system. After etch-back using TMAH solution, roughness of 3CSiC surface crystallinity and bonded interface was measured and analyzed by AFM, XRD, and SEM respectively.

• 센서학회지
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• 제22권3호
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• pp.175-180
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• 2013

This paper describes the characteristics of cubic silicon carbide (3C-SiC) films grown on a carbonized Si(100) substrate, using hexamethyldisilane (HMDS, $Si_2(CH_3)_6$) as a safe organosilane single precursor in a nonflammable $H_2$/Ar ($H_2$ in Ar) mixture carrier gas by atmospheric pressure chemical vapor deposition (APCVD) at $1280^{\circ}C$. The growth process was performed under various conditions to determine the optimized growth and carbonization condition. Under the optimized condition, grown film has a single crystalline 3C-SiC with well crystallinity, small voids, low residual stress, low carrier concentration, and low RMS. Therefore, the 3C-SiC film on the carbonized Si (100) substrate is suitable to power device and MEMS fields.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1463-1468
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• 2007

This paper presents the possibility of the electric energy harvesting using piezoelectric actuator which is operated by geared motor. The geared motor consisting of oval shape cam and speed controller was operated in the range of 40${\sim}$172rpm. The PZT actuator of $36L{\times}13W{\times}0.6H$ was used for energy harvesting and the results of the theoretical model were verified by comparing it with the measured response of a experimental setup. Experimental study for obtaining the optimal operating conditions, such as displacement variation of the PZT actuator and motor speed variation, was achieved. A power of 0.02mW at the geared motor speed of 172rpm and the PZT actuator maximum displacement of $500{\mu}m$ was measured. In this study, it was confirmed that the wind power can be used for MEMS based sensor operating and windmill health monitoring one.