• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.11
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• pp.840-848
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• 2009

In the boiling heat transfer mechanism, CHF(critical heat flux) is the significantly important parameter of the system. So, many researchers have been struggling to enhance the CHF of the system in enormous methods. Recently, there were lots of researches about enormous CHF enhancement with the nanofluids. In that, the pool boiling CHF in nanofluids has the significantly increased value compared to that in pure water because of the deposition of the nanoparticle on the heater surface in the nanofluids. The aim of this study is the comparison of the effect of the nanoparticle deposited surface and the modified surface which has the similar morphology and made by MEMS fabrication. The nanoparticle deposited surface has the complex structures in nano-micro scale. Therefore, we fabricated the surfaces which has the similar wettability and coated with the micro size post and nano structure. The experiment is performed in 3 cases : the bare surface with 0.002% water-ZnO nanofluids, the nanoparticle deposited surface with pure water and the new fabricated surface with pure water. The contact angle, a representative parameter of the wettability, of the all 3 cases has the similar value about 0 and the SEM(scanning electron microscope) images of the surfaces show the complex nano-micro structure. From the pool boiling experiment of the each case, the nanoparticle deposited surface with pure water and the fabricated surface with pure water has the almost same CHF value. In other words, the CHF enhancement of the nanoparticle deposited surface is the surface effect. It also shows that the new fabricated surface follows the nanoparticle deposited surface well.

• Korean Chemical Engineering Research
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• v.44 no.1
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• pp.1-9
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• 2006

Biodevices composed of biomolecular layer by mimicking the natural functions of cells and the interaction mechanisms of the constituted biomolecules have been developed in various industrial fields such as medical diagnosis, drug screening, electronic device, bioprocess, and environmental pollution detection. To construct biodevices such as bioelectronic devices (biomolecular diode, bio-information storage device and bioelectroluminescence device), protein chip, DNA chip, and cell chip, biomolecules including DNA, protein, and cells have been used. Fusion technology consisting of immobilization technology of biomolecules, micro/nano-scale patterning, detection technology, and MEMs technology has been used to construct the biodevices. Recently, nanotechnology has been applied to construct nano-biodevices. In this paper, the current technology status of biodevice including its fabrication technology and applications is described and the future development direction is proposed.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2003-2005
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• 2002

바이오 마이크로 시스템 및 바이오 MEMS 분야, 특히 실리콘을 기질로 하는 바이오 센서 제작에서 반도체 공정 기술은 센서의 대량 생산과 초소형화를 위해서 반드시 필요한 기술이다. 그러나, 감지전극의 마이크로화에 따른 센서의 감도 및 안정성 저하 문제는 해결해야 할 과제이다. 최근, 다공질 실리콘이 갖는 대면적이 실리콘 기질과 생체 고분자 (예: 단백질, 핵산 등) 간의 결합력을 향상시킬 수 있음이 알려지면서, 바이오 센서 분야에서, 새로운 형태의 드랜스듀서 재료로서의 다공질 실리콘에 대한 논의가 활발히 전개되고 있으며 또한, ISFET (Ion-Selective Field-Effect Transistors) 와는 달리 다공질 실리콘 층은 저항이 크기 때문에 센서 제작 과정에서의 부가적인 절연막을 필요로 하지 않는다. 본 연구에서는, 백금을 증착한 다공질 실리콘 표면에 전도성 고분자로서 Polypyrrole (PPy) 필름과 생체 고분자 물질로서 Urease를 각각 전기화학적으로 흡착하였다. 다공질 실리콘 층의 형성을 위해 테플론 소재의 전기화학 전지에 불산 (49%), 에탄올 (95%), $H_2O$ 혼합 용액을 넣고 실리콘 웨이퍼에 일정시간 수 mA의 산화 전류를 흘려주었으며, 약 $200{\AA}$의 티타늄 박막과 $200{\AA}$의 백금 박막을 RF 스퍼터링하여 작업 전극을 제작하였고, 백금 박막 및 Ag를 기화 증착하여 제작한 Ag/AgCl 박막을 각각 상대 전극과 기준전극으로 하였다. 박막 전극의 표면 분석을 위해 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy) 등을 이용하였다. 제작된 요소 센서로부터 요소 농도 범위 0.01 mmol/L ${\sim}$ 100 mmol/L에서 약 0.2 mA/decade의 감도를 얻었다.

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.54-59
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• 2002

This paper describes a new process technique for batch process of SOI(Si-on-Insulator) structures with buried cavities for MEMS(Micro Electro Mechanical System) applications by SDB(Si-wafer Direct Bonding) technology and electrochemical etch-stop. A low-cost electrochemical etch-stop method is used to control accurately the thickness of SOI. The cavities were made on the upper handling wafer by Si anisotropic etching. Two wafers are bonded with an intermediate insulating oxide layer. After high-temperature annealing($1000^{\circ}C$, 60 min), the SDB SOI structure with buried cavities was thinned by electrochemical etch-stop. The surface of the fabricated SDB SOI structure have more roughness that of lapping and polishing by mechanical method. This SDB SOI structure with buried cavities will provide a powerful and versatile substrate for novel microsensors arid microactuators.

• Journal of Information Display
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• v.8 no.2
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• pp.10-14
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• 2007

A blazed $GxL^{TM}$ device is described as having high optical efficiency (> 70% for RGB lasers), and high contrast ratio (> 10,000:1), and that is highly reliable when used in a large-area laser projection system. It has a robust design and precise stress control technology to maintain a uniform shape (bow and tilt) of more than 6,000 ribbons, a $0.25-{\mu}m$ CMOS compatible fabrication processing and planarization techniques to reduce fluctuation of the ribbons, and a reliable Al-Cu reflective film that provided protection against a high-power laser. No degradation in characteristics of the GxL device is observed after operating a 5,000- lumen projector for 2,000 hours and conducting 2,000 temperature cycling tests at $-20^{\circ}C$ and $+80^{\circ}C$. At the 2005 World Exposition in Aichi, Japan the world's largest laser projection screen with a size of 2005 inches (10 m ${\times}$ 50 m) and 6 million pixels (1,080 ${\times}$ 5,760) was demonstrated.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2251-2253
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• 2000

MEMS기술을 이용하여 단층 실리콘 나이트라이드($Si_{3}N_4$) 다이아프램을 제조하고, 이 다이아프램상에 저항성 가열 진공증착법과 고주파 마그네트론 스퍼터링법을 이용하여 차례로 In막과 ZnO막을 증착하고, In의 도핑을 위해 열처리하여 $NH_3$ 가스 감지용 마이크로센서를 제작하였다. 감지막의 열처리온도에 따른 구조적 및 전기적 특성은 XRD, SEM, AFM, 4-point probe 및 Electrometer를 통하여 각각 조사하였다. 제작된 센서의 열처리온도와 인가전력에 따라 $NH_3$ 가스에 대한 감도, 선택성 및 시간응답 특성을 조사하였다. 감지막 두께 3000 ${\AA}$, 열처리온도 400$^{\circ}C$로 제조된 마이크로 센서가 히터 인가전력 366 mW에서 100 ppm의 $NH_3$ 가스농도에서 대하여 16 %, 350 ppm의 가스농도에서 대하여 23 %의 가장 우수한 감도를 나타내었다. 그러나 CO 가스 및 $NO_x$ 가스에 대한 감지특성은 관찰되지 않았다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.8
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• pp.37-44
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• 2004

This paper describes a new GaAs-based surface-micromachined microstrip line supported by dielectric post and air-gapped signal line with ground metal. This new type of dielectric-supported air-gapped microstripline(DAML) structure is developed using surface micromachining techniques to provide easy means of airbridge connection between the signal lines and to archive low losses at millimeter-wave frequency band with wide impedance range. Each DAMLs with the length of 5 mm are fabricated and the measured characteristics are compared with those of the conventional microstrip transmission line. These transmission lines are composed of 10 ${\mu}{\textrm}{m}$ height of signal line, post size of 10 ${\mu}{\textrm}{m}$ ${\times}$ 10 ${\mu}{\textrm}{m}$ and post height of 9 ${\mu}{\textrm}{m}$. By elevating the signal lines from the substrate using the micromachining technology, the substrate dielectric loss can be reduced Compared with of the conventional microstrip transmission line showing 7.5 dB/cm loss at 50 GHz, the loss can be reduced to 1.1 dB/cm loss at 50 GHz.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.206.1-206.1
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• 2012

The NASA Antarctica balloon experiment CREAM has successfully collected the data of energetic cosmic rays during six flights in past years. It recently observed the unexpected discrete hardening in energy spectra of comic rays. However high-statistics data of energetic cosmic rays are required for the further investigation of the unexpected hardening in comic-ray energy spectra. The International Space Station (ISS) is an ideal platform for the CREAM experiment to investigate the unexpected hardening and explore the fundamental issues like the acceleration mechanism and the origin of energetic cosmic rays because of the high duty cycle of the experiment in the ISS platform. We will present the design of the ISS-CREAM experiment, and the development and fabrication status of the detector components including the 4-layer silicon charge detector which will measure the charge constitution of cosmic rays with unprecedented accuracy.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.11
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• pp.748-754
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• 1999

Micromirrors supported by S-shape girders were fabricated and their angular deflections were measured using a laser-based system. A micromirror consists of a $50\mum\times50\mum$ aluminum plate, posts and an S-shape girder. Two electrodes were deposited on two corners of the substrate beneath the mirror plate. $50\times50$micromirror array were fabricated using the Al-MEMS process. The electrostatic force caused by the voltage difference between the mirror plate and one of the electrodes causes the mirror plate to tilt until the girder touches the substrate. Bial voltage of the mirror plate is between 25~35V and signal pulse voltage on both electrodes is $\pm5V$. A laser-based system capable of real-time two-dimensional angular deflection measurement of the micromirror was developed. The operation of the system is based on measuring the displacement of a HeNe laser beam reflecting off the micromirror. The resonant frequency of the micromirror is 50kHz when the girder touches the substrate and it is 25 when the micromirror goes back to flat position, since the moving mass is about twice of the former case. The measurement results also revealed that the micromirror slants to the other direction even after the girder touches the substrate.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.4
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• pp.302-307
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• 2007

In this paper, a flap valve micropump with an ionic polymer-metal composite (IPMC) actuator was designed, fabricated, and experimentally characterized. A multilayered IPMC based on Nafion/layered silicate and Nafion/silica nanocomposites was fabricated for the actuation section of the micropump. The IPMC diaphragm, a key element of the mircopump, was designed so that the IPMC actuator was supported by a flexible polydimethylsiloxane (PDMS) structure at its perimeter. This design feature enabled a significantly high displacement of the IPMC diaphragm. The overall size of the micropump is $20{\times}20{\times}5$ ${mm}^3$. Water flow rates of up to 760 ${\mu}l$/min and a maximum backpressure of 1.5 kPa were recorded. A significant advantage of the proposed micropump is its low driven voltage from only 1-3 V. In addition, a simple and effective design, and an ease of manufacturing are other advantages of the present micropump.