• Journal of Mechanical Science and Technology
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• v.20 no.10
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• pp.1646-1652
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• 2006

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.12
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• pp.1667-1672
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• 2003

In contrast to the high demand for MEMS devices, microflow analysis is not feasible even for single-phase flow with conventional Navier-Stokes equation because of non-continuum effect when characteristic dimension is comparable with local mean free path. DSMC is one of particle based DNS(Direct Numerical Simulation) methods that uses no continuum assumption. In this paper, gas flow in microchannel is studied using DSMC. Interfacial shear and flow characteristics are observed and compared with the results of gas flow that is in contact with liquid case and solid wall case. The simulation is limited to the case of equilibrium steady state and evaporation/condensation coefficient is assumed to be the same and unity. System temperature remains constant and the interfacial shear appears to be small compared to the result with solid wall. This is because particles evaporated and reflected from the liquid surface form high density layer near the interface with liquid flow.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.1
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• pp.39-45
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• 2003

As the size of a combustor decreases to a MEMS scale, heat loss increases and becomes a dominant effect on the performance of the devices. Existing models, however, are not adequate to predict the heat transfer and combustion processes in such small scales. In the present study, a semi-empirical model to calculate heat loss from a micro combustor is described. The model derives heat transfer coefficients that best fits the heat loss characteristics of a micro combustor that is represented by transient pressure record after combustion is completed. From conservation of energy equation applied to the burned gas inside the combustor, a relationship between pressure and heat transfer is reduced. Two models for heat transfer coefficients were tested; a constant and first order polynomial of temperature with its coefficients determined from fitting with measurements. The model was tested on a problem of cooling process of burnt gas in a micro combustor and comparison with measurements showed good agreements. The heat transfer coefficients were used for combustion calculation in a micro vessel. The results showed the dependence of flame speed on the scale of the chamber through enhanced heat loss.

• Smart Structures and Systems
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• v.18 no.4
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• pp.787-800
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• 2016

The aim of the paper is to analyze nonlinear transverse vibration of an embedded piezoelectric plate reinforced with single walled carbon nanotubes (SWCNTs). The system in rested in a Pasternak foundation. The micro-electro-mechanical model is employed to calculate mechanical and electrical properties of nanocomposite. Using nonlinear strain-displacement relations and considering charge equation for coupling between electrical and mechanical fields, the motion equations are derived based on energy method and Hamilton's principle. These equations can't be solved analytically due to their nonlinear terms. Hence, differential quadrature method (DQM) is employed to solve the governing differential equations for the case when all four ends are clamped supported and free electrical boundary condition. The influences of the elastic medium, volume fraction and orientation angle of the SWCNTs reinforcement and aspect ratio are shown on frequency of structure. The results indicate that with increasing volume fraction of SWCNTs, the frequency increases. This study might be useful for the design and smart control of nano/micro devices such as MEMS and NEMS.

• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1544-1553
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• 2005

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

• Advances in aircraft and spacecraft science
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• v.11 no.1
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• pp.55-81
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• 2024

This paper presents the exact solutions and closed forms for of nonlinear stability and vibration behaviors of straight and curved beams with nonlinear viscoelastic boundary conditions, for the first time. The mathematical formulations of the beam are expressed based on Euler-Bernoulli beam theory with the von Karman nonlinearity to include the mid-plane stretching. The classical boundary conditions are replaced by nonlinear viscoelastic boundary conditions on both sides, that are presented by three elements (i.e., linear spring, nonlinear spring, and nonlinear damper). The nonlinear integro-differential equation of buckling problem subjected to nonlinear nonhomogeneous boundary conditions is derived and exactly solved to compute nonlinear static response and critical buckling load. The vibration problem is converted to nonlinear eigenvalue problem and solved analytically to calculate the natural frequencies and to predict the corresponding mode shapes. Parametric studies are carried out to depict the effects of nonlinear boundary conditions and amplitude of initial curvature on nonlinear static response and vibration behaviors of curved beam. Numerical results show that the nonlinear boundary conditions have significant effects on the critical buckling load, nonlinear buckling response and natural frequencies of the curved beam. The proposed model can be exploited in analysis of macrosystem (airfoil, flappers and wings) and microsystem (MEMS, nanosensor and nanoactuators).

• Proceedings of the Korea Society of Information Technology Applications Conference
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• 2005.11a
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• pp.207-210
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• 2005

Ubiquitous computing is one of the key technology areas in the "Project on Development of Ubiquitous computing and network technology" promoted by the Ministry of Science and Technology as a frontier business of the $21^{st}$ century in Korea, which is based on the new concept merging physical space and computer-based cyber space. With recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low-power consumption wireless micro sensor nodes have been available. Using these smart sensor nodes, there are many activities to monitor real world, for example, habitat monitoring, earthquake monitoring and so on. In this paper, we introduce web-based real environment monitoring system incorporating wireless sensor nodes. It collects sensing data produced by some wireless sensor nodes and stores them into a database system to analyze. Our environment monitoring system is composed of a networked camera and environmental sensor nodes, which are called Mica2 and developed by University of California at Berkeley. We have modified and ported network protocols over TinyOS and developed a monitoring application program using the MTS310 and MTS420 sensors that are able to observe temperature, relative humidity, light and accelerator. The sensed data can be accessed user-friendly because our environment monitoring system supports web-based user interface. Moreover, in this system, we can setup threshold values so the system supports a function to inform some anomalous events to administrators. Especially, the system shows two useful pre-processed data as a kind of practical uses: a discomfort index and a septicity index. To make both index values, the system restores related data from the database system and calculates them according to each equation relatively. We can do enormous works using wireless sensor technologies, but just environment monitoring. In this paper, we show just one of the plentiful applications using sensor technologies.

• Journal of the Optical Society of Korea
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• v.20 no.6
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• pp.669-677
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• 2016

A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

• Advances in nano research
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• v.14 no.3
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• pp.211-224
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• 2023

This work presents a modified analytical model for the bending behavior of axially functionally graded (AFG) carbon nanotubes reinforced composite (CNTRC) nanobeams. New higher order shear deformation beam theory is exploited to satisfy parabolic variation of shear through thickness direction and zero shears at the bottom and top surfaces.A Modified continuum nonlocal strain gradient theoryis employed to include the microstructure and the geometrical nano-size length scales. The extended rule of the mixture and the molecular dynamics simulations are exploited to evaluate the equivalent mechanical properties of FG-CNTRC beams. Carbon nanotubes reinforcements are distributed axially through the beam length direction with a new power graded function with two parameters. The equilibrium equations are derived with associated nonclassical boundary conditions, and Navier's procedure are used to solve the obtained differential equation and get the response of nanobeam under uniform, linear, or sinusoidal mechanical loadings. Numerical results are carried out to investigate the impact of inhomogeneity parameters, geometrical parameters, loadings type, nonlocal and length scale parameters on deflections and stresses of the AFG CNTRC nanobeams. The proposed model can be used in the design and analysis of MEMS and NEMS systems fabricated from carbon nanotubes reinforced composite nanobeam.

• Steel and Composite Structures
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• v.49 no.4
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• pp.361-380
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• 2023

A size dependent bending behavior of piezoelectrical flexoelectric layered perforated functionally graded (FG) composite nanobeam rested on an elastic foundation is investigated analytically. The composite beam is composed of regularly cutout FG core and two piezoelectric face sheets. The material characteristics is graded through the core thickness by power law function. Regular squared cutout perforation pattern is considered and closed forms of the equivalent stiffness parameters are derived. The modified nonlocal strain gradient elasticity theory is employed to incorporate the microstructure as well as nonlocality effects into governing equations. The Winkler as well as the Pasternak elastic foundation models are employed to simulate the substrate medium. The Hamiltonian approach is adopted to derive the governing equilibrium equation including piezoelectric and flexoelectric effects. Analytical solution methodology is developed to derive closed forms for the size dependent electromechanical as well as mechanical bending profiles. The model is verified by comparing the obtained results with the available corresponding results in the literature. To demonstrate the applicability of the developed procedure, parametric studies are performed to explore influences of gradation index, elastic medium parameters, flexoelectric and piezoelectric parameters, geometrical and peroration parameters, and material parameters on the size dependent bending behavior of piezoelectrically layered PFG nanobeams. Results obtained revealed the significant effects both the flexoelectric and piezoelectric parameters on the bending behavior of the piezoelectric composite nanobeams. These parameters could be controlled to improve the size dependent electromechanical as well as mechanical behaviors. The obtained results and the developed procedure are helpful for design and manufacturing of MEMS and NEMS.