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Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems  

Kim Hyonse (School of Mechanical and Aerospace Engineering, Seoul National University)
In Chihyun (MEMS Division, DAEWOO Electronics Corp.)
Yoon Gilho (Department of Mechanical Engineering, Solid Mechanics, Nils Koppels Alle, DTU)
Kim Jongwon (School of Mechanical and Aerospace Engineering, Seoul National University)
Publication Information
Journal of Mechanical Science and Technology / v.19, no.8, 2005 , pp. 1544-1553 More about this Journal
Abstract
In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.
Keywords
Micro Cantilevers Array; PZT Film; Micro Fluidic System;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 5  (Related Records In Web of Science)
Times Cited By SCOPUS : 5
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