• International Journal of Aeronautical and Space Sciences
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• v.11 no.3
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• pp.234-239
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• 2010

The utilization of micro-electro-mechanical system (MEMS) gyros and accelerometers in low-level inertial measurement unit (IMU) influences cost effectiveness in a positive way under the condition that device error characteristics are fully calibrated. The conventional calibration process utilizes a rate table; however, this paper proposes a new method for achieving reference calibration data from the natural motion of pendulum to which the IMU undergoing calibration is attached. This concept was validated with experimental data. The pendulum angle measurements correlate extremely well with the solutions acquired from the pendulum equation of motion. The calibration data were computed using the regression method. The whole process was validated by comparing the measurement from the 6 sensor components with the measurements reconstructed using the identified calibration data.

• 한국전산유체공학회:학술대회논문집
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• 2005.04a
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• pp.65-69
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• 2005

Curretly, the development of MEMS(Micro Electronic Mechanical System) technology awakes many research's interest for the aerodynamics. This work presents the development of a compact synthetic jet actuator for flow separation control at the flat plate. The formation and evolution of fluidic actuators based on synthetic jet technology are investigated using Reynolds-Averaged Navier-Stokes equations. Also, 2-Dimensional, unsteady, incompressible Navier-Stokes equation solver with single partitioning method for Multi-Block grid to analyze and a modeled boundary condition in developed fo. the synthetic jet actuator. Both laminar and turbulent jets are investigated. Results show very good agreement with experimental measurements. A jet flow develops, even though no net mass flow is introduced. Pair of counter-rotating vortices are observed near the jet exit as are observed in the experiments.

• Journal of Mechanical Science and Technology
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• v.19 no.5
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• pp.1065-1071
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• 2005

In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method (FEM). We evelop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multi­stacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA, mean stresses and stress gradients of single and multi layers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney's equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

• Structural Engineering and Mechanics
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• v.56 no.3
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• pp.461-472
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• 2015

In this paper, the nonlinear static response of curled cantilever beam actuators subjected to the one-sided electrostatic field is focused on. By assuming the deflection function of electrostatically actuated beam, analytical approximate solutions are established via using Galerkin method to solve the equilibrium equation. The Pull-In voltages which determine the stability of the curled beam actuators are also obtained. These approximate solutions show excellent agreements with numerical solutions obtained by the shooting method and the experimental data for a wide range of beam length. Expressions of these analytical approximate solutions are brief and could easily be used to derive the effects of various physical parameters on MEMS structures.

• Steel and Composite Structures
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• v.32 no.5
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• pp.643-655
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• 2019

Perforation and cutouts of structures are compulsory in some modern applications such as in heat exchangers, nuclear power plants, filtration and microeletromicanical system (MEMS). This perforation complicates dynamic analyses of these structures. Thus, this work tends to introduce semi-analytical model capable of investigating the dynamic performance of perforated beam structure under free and forced conditions, for the first time. Closed forms for the equivalent geometrical and material characteristics of the regular square perforated beam regular square, are presented. The governing dynamical equation of motion is derived based on Euler-Bernoulli kinematic displacement. Closed forms for resonant frequencies, corresponding Eigen-mode functions and forced vibration time responses are derived. The proposed analytical procedure is proved and compared with both analytical and numerical analyses and good agreement is noticed. Parametric studies are conducted to illustrate effects of filling ratio and the number of holes on the free vibration characteristic, and forced vibration response of perforated beams. The obtained results are supportive in mechanical design of large devices and small systems (MEMS) based on perforated structure.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.05a
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• pp.355-358
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• 2003

Recently, micro forming process technology have been developed since the size of machine parts become the crucial factor for minimizing of products in general electronic products. Most small machine parts consist of gear and rotation axis and the wear by mechanical contact is known as the primary factor for life reduction of high precision machine part. Lots of studies for mechanical wear and friction have been reported and many researches of MEMS technology have been studied recently. But just few studies for wear of micro or milli sized machine part have teen implemented. In this research, the wear equation is suggested according to the contact shape of axial part in micro or milli sized machine part. And wear analysis model which can predict the magnitude of wear through this suggested equation with numerical analysis program.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.221-231
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• 2004

A kinetic theory analysis is made of low-speed gas flows in a microfluidic system consisted of three microchannels in series. The Boitzmann equation simplified by a collision model is solved by means of a finite difference approximation with the discrete ordinate method. For the evaluation of the present method results are compared with those from the DSMC method and an analytical solution of the Navier-Stokes equations with slip boundary conditions. Calculations are made for flows at various Knudsen numbers and pressure ratios across the channel. The results compared well with those from the DSMC method. It is shown that the analytical solution of the Navier-Stokes equations with slip boundary conditions which is suited fur fully developed flows can give relatively good results. In predicting the geometrically complex flows up to a Knudsen number of about 0.06. It is also shown that the present method can be used to analyze extremely low-speed flow fields for which the DSMC method is Impractical.

• Bulletin of the Korean Chemical Society
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• v.35 no.3
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• pp.908-912
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• 2014

Microgratings whose diffracted field at a fixed angle generate IR spectra of $SF_6$ or $NH_3$ were fabricated by MEMS techniques for the purpose of IR correlation spectroscopy. Each micrograting was composed of 1441 reflecting lines in the area of $19.2{\times}19.2mm^2$. The depth profile of the line elements was determined with a gradient searching method that was described in our previous publication (J. Mod. Opt. 2013, 60, 324-330), and was discretized into 16 levels between 0 and $6.90{\mu}m$. The diffraction field from a given depth profile was calculated with Fraunhofer equation. The fabricated microgratings showed errors in the depth and the width within acceptable ranges. As the result, the diffracted IR spectrum of each micrograting matched well with its target reference spectrum within spectral resolution of our optical setup.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1315-1320
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• 2003

The thermal expansion coefficient, which causes the micro failure at the interfacial state of thin films is necessary to consider for proper designing MEMS. The effect of temperature on the coefficient of thermal expansion(CTE) of $SiO_2$ and $Si_3N_4$ film was investigated. Thermal strain induced by mismatch of CTE between substrate and thin film continuously measured with resolution-improved electronic speckle pattern interferometry(ESPI). The thermal stress induced by mismatch of CTE derivate through thermal strain. The thermal expansion coefficients of thin film were calculated with the general equation of CTE and thermal stress in thin films, and it confirmed that CTE of $SiO_2$changed from $0.25{\times}10^{-6}/^{\circ}C$ to $1.4{\times}10^{-6}/^{\circ}C$ with temperature increasing from 50 to $600^{\circ}C$

• Structural Engineering and Mechanics
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• v.52 no.5
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• pp.937-956
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• 2014

The MEMS structures usually are made from silicon; consideration of the viscoelastic effect in microbeams duo to the phenomena of silicon creep is necessary. Application of the fractional model of microbeams made from viscoelastic materials is studied in this paper. Quasi-static and dynamical responses of an electrically actuated viscoelastic microbeam are investigated. For this purpose, a nonlinear finite element formulation of viscoelastic beams in combination with the fractional derivative constitutive equations is elucidated. The four-parameter fractional derivative model is used to describe the constitutive equations. The electric force acting on the microbeam is introduced and numerical methods for solving the nonlinear algebraic equation of quasi-static response and nonlinear equation of motion of dynamical response are described. The deflected configurations of a microbeam for different purely DC voltages and the tip displacement of the microbeam under a combined DC and AC voltages are presented. The validity of the present analysis is confirmed by comparing the results with those of the corresponding cases available in the literature.