• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• The Journal of the Korea institute of electronic communication sciences
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• v.16 no.2
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• pp.363-370
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• 2021

The perimeter intrusion detection system is very important in physical security. In this study, a micro smart device (module) using MEMS sensor was developed in IoT environment for external intrusion detection. The outer intrusion detection system applying the smart device developed in this study is installed in various installation environments, such as barbed wire of various materials and shapes, the city center, the beach, and the mountain, so that it can detect external intrusion and its location as well as false alarms. As a smart sensor that can minimize the false alarm rate and economical construction cost, it is expected that it can be used for the safe operation of major facilities and prevention of disasters and crimes.

• Journal of Sensor Science and Technology
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• v.32 no.4
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• pp.207-212
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• 2023

H₂S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H₂S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H₂S sensor with a high response and fast response time, consisting of a sensing material (SnO₂), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H₂S sensor with a micro-heater (circular type) has excellent H₂S detection performance at low H₂S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H₂S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

• 전자공학회논문지 IE
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• v.49 no.1
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• pp.12-17
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• 2012

Fast development of ubiquitous technology prompted the broadening of the related application area. Application of ubiquitous techniques and system into the construction sites may give us many benefits. There are always a lot of hazard situations in construction sites, and the falling is known to have the high accident rate. To prevent the falling, there has been a lot of efforts including safety education and use of safety gears. In this study, we designed, fabricated and tested a system that can monitor the worker's safety and location informations in real time by using the wireless technology of TOA and RSSI. We used ATmegal28 that is popular in the industrial equipments as MCU and NanoPan 5357 module from Nanotron and CC2500 chipset from TI for radio circuits. We also used 3-axis accelerometer and pressure MEMS sensors to obtain the environmental information, and therefore to aquire the informations of the worker's movement and altitude. We used Labview software from National Instrument to monitor and control the system. We developed the system to send the warning alarms to the server operator and the workers when the workers in the danger zone did not wear the safety hook.

• Journal of Sensor Science and Technology
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• v.12 no.2
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• pp.72-78
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• 2003

To observe the effect of excitation coil pitch on the micro fluxgate magnetic sensor, two sensors are fabricated using multi layer board process and the pitch distance of excitation coil are $260\;{\mu}m$ and $520\;{\mu}m$, respectively. The fluxgate sensor consists of five PCB stack layers including one layer of magnetic core and four layers of excitation and pick-up coils. The center layer as magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ${\sim}100,000$ and has a rectangular-ring shape to minimize the magnetic flux leakage. Four outer layers as excitation and pick-up coils have a planar solenoid structure and are made of copper foil. In case of the fluxgate sensor having the excitation coil pitch of $260\;{\mu}m$, excellent linear response over the range of $-100\;{\mu}T$ to $+100\;{\mu}T$ is obtained with sensitivity of 780 V/T at excitation sine wave of $3V_{p_p}$ and 360 kHz. The chip size of the fabricated sensing element is $7.3\;{\times}\;5.7\;mm^2$. The very low power consumption of ${\sim}8\;mW$ is measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.23 no.1
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• pp.26-33
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• 2011

In this study, a high-sensitive smart wireless sensor based on an Imote2 sensor platform is developed for structural health monitoring of harbor structures. To achieve the objective, the following approaches are implemented. Firstly, the smart wireless sensor based on the high-performance Imote2 sensor platform is designed to measure acceleration with high sensitivity from structures. Secondly, embedded software is designed for autonomous structural health monitoring. Finally, the performance of the smart wireless sensor is estimated from experimental tests on a lab-scaled caisson structure.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.1
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• pp.54-61
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• 2012

In this paper, the pose estimation method for the satellite GTB (Ground Test Bed) using vision/MEMS IMU (Inertial Measurement Unit) integrated system is presented. The GTB for verifying a satellite system on the ground is similar to the mobile robot having thrusters and a reaction wheel as actuators and floating on the floor by compressed air. The EKF (Extended Kalman Filter) is also used for fusion of MEMS IMU and vision system that consists of a single camera and infrared LEDs that is ceiling landmarks. The fusion filter generally utilizes the position of feature points from the image as measurement. However, this method can cause position error due to the bias of MEMS IMU when the camera image is not obtained if the bias is not properly estimated through the filter. Therefore, it is proposed that the fusion method which uses the position of feature points and the velocity of the camera determined from optical flow of feature points. It is verified by experiments that the performance of the proposed method is robust to the bias of IMU compared to the method that uses only the position of feature points.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.6
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• pp.851-858
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• 2012

In this paper, we design a seismic data acquisition system(SDAS) and implement it. This system is essential for development of a noble local earthquake disaster preventing system in population center. In the system, we choose a proper MEMS-type triaxial accelerometer as a sensor, and FPGA and ARM processor are used for implementing the system. In the SDAS, each module is realized by Verilog HDL and C Language. We carry out the ModelSim simulation to verify the performances of important modules. The simulation results show that the FPGA-based data acquisition module can guarantee an accurate time-synchronization for the measured data from each axis sensor. Moreover, the FPGA-ARM based embedded technology in system hardware design can reduce the system cost by the integration of data logger, communication sever, and facility control system. To evaluate the data acquisition performance of the SDAS, we perform experiments for real seismic signals with the exciter. Performances comparison between the acquired data of the SDAS and the reference sensor shows that the data acquisition performance of the SDAS is valid.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.5
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• pp.532-538
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• 2004

MEMS technology applying to the sensors and micro-electro devices is complete system. These microsystems are made by variable processes. Especially, the mentallization process has very important functions to transfer the power operating the sensor and signal induced from sensor part. But in the structures of MEMS the local stress concentration and deformation are often yielded by an irregular geometrical shape and different constraint. Therefore, this paper studies the effect of supporting type and thickness ratio about thin film of the substrate on the residual stress variation when the thermal loads is applied to the multi-layer thin film fabricated by metallization process. Specimens were made from several materials such as Al, Au and Cu. Then, uniform thermal load was applied, repeatedly. The residual stress was measured by FE Analysis and nano-indentation method using AFM. Generally, the specimen made of Al induced the larger residual stress than that of made of other materials. Specimen made of Cu and Au having the low thermal expansion coefficient induces the minimum residual stress. Similarly, the lowest indentation length was measured by nano-indentation method in the Si/Au/Cu specimen. Particularly, clusters are created in the specimen made of Cu by thermal load and the indentation length became increasingly large by cluster formation.

• Proceedings of the KSRS Conference
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• 2009.03a
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• pp.305-308
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• 2009

최근 카메라와 같은 센서가 장착된 UAV(Unmanned Aerial Vehicle, 무인항공기)를 이용하는 분야는 방재, 농업, 군사 분야 등 매우 다양해지고 있다. 그러나 고품질의 영상데이터를 취득하기 위해서는 가벼우면서도 우수한 성능을 지닌 고가의 MEMS 센서 그리고 센서가 안정적으로 데이터를 획득할 수 있도록 안정적인 비행이 가능한 대형 UAV플랫폼으로 구성된 시스템이 필요하기 때문에 시스템 구축비용이 클 수밖에 없다. 본 연구에서는 저비용으로 영상 데이터를 취득할 수 있는 UAV시스템을 구축하여 취득된 영상데이터의 처리를 통해 얻어지는 영상의 품질을 살펴보고 그 효용성을 시험해보았다. 이를 위해서 고가인 UAV를 대신해 비교적 가격이 저렴한 R/C헬기(Remote Control, 원격조종 헬기)를 플랫폼으로 선정하고, 영상데이터를 수집하는 카메라센서를 탑재하였다. 그리고 탑재된 센서가 안정적으로 데이터를 취득할 수 있도록, 센서와 플랫폼 사이에 Gimbal을 장착하였다. 이렇게 구축된 시스템을 이용하여 시험비행을 해보았으며, 그 결과 플랫폼에 탑재된 센서로부터 비교적 안정적이고 양질의 이미지를 획득할 수 있었다. 본 연구에서 구축한 R/C 헬리콥터 시스템을 통하여 저비용/고효율의 영상데이터를 취득할 수 있음을 확인하였다. 구축된 시스템은 근접한 거리에서 대상물의 영상을 취득하기 때문에 고품질의 3차원 모델데이터 생성에 매우 도움이 될 것으로 생각한다.