• Title/Summary/Keyword: M-ICP

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Characteristics of Memory Windows of MFMIS Gate Structures (MFMIS 게이트 구조에서의 메모리 윈도우 특성)

  • Park, Jun-Woong;Kim, Ik-Soo;Shim, Sun-Il;Youm, Min-Soo;Kim, Yong-Tae;Sung, Man-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.319-322
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    • 2003
  • To match the charge induced by the insulators $CeO_2$ with the remanent polarization of ferro electric SBT thin films, areas of Pt/SBT/Pt (MFM) and those of $Pt/CeO_2/Si$ (MIS) capacitors were ind ependently designed. The area $S_M$ of MIS capacitors to the area $S_F$ of MFM capacitors were varied from 1 to 10, 15, and 20. Top electrode Pt and SBT layers were etched with for various area ratios of $S_M\;/\;S_F$. Bottom electrode Pt and $CeO_2$ layers were respectively deposited by do and rf sputtering in-situ process. SBT thin film were prepared by the metal orgnic decomposition (MOD) technique. $Pt(100nm)/SBT(350nm)/Pt(300nm)/CeO_2(40nm)/p-Si$ (MFMIS) gate structures have been fabricated with the various $S_M\;/\;S_F$ ratios using inductively coupled plasma reactive ion etching (ICP-RIE). The leakage current density of MFMIS gate structures were improved to $6.32{\times}10^{-7}\;A/cm^2$ at the applied gate voltage of 10 V. It is shown that in the memory window increase with the area ratio $S_M\;/\;S_F$ of the MFMIS structures and a larger memory window of 3 V can be obtained for a voltage sweep of ${\pm}9\;V$ for MFMIS structures with an area ratio $S_M\;/\;S_F\;=\;6$ than that of 0.9 V of MFS at the same applied voltage. The maximum memory windows of MFMIS structures were 2.28 V, 3.35 V, and 3.7 V with the are a ratios 1, 2, and 6 at the applied gate voltage of 11 V, respectively. It is concluded that ferroelectric gate capacitors of MFMIS are good candidates for nondestructive readout-nonvolatile memories.

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A STUDY ON THE ELASTIC DEFORMATION AND STRESS DISTRIBUTION OF THE MANDIBLE WITH OSSEOINTEGRATED IMPLANT PROSTHESES USING THREE DIMENSIONAL FINITE ELEMENT ANALYSIS METHOD (골유착성 임플랜트 보철물 장착시 하악골의 탄성변형 및 응력분포에 관한 삼차원 유한요소법적 연구)

  • Kim, Yong-Ho;Kim, Yung-Soo;Kim, Chang-Whe
    • The Journal of Korean Academy of Prosthodontics
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    • v.36 no.2
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    • pp.203-244
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    • 1998
  • The human mandible is always under the condition of loading by the various forces extorted by the attached muscles. The loading is an important condition of the stomatognathic system. This condition is composed of the direction and amount of forces of the masticatory muscles, which are controlled by the neuromuscular system, and always influenced by the movement of both opening and closing. Mandible is a strong foundation for the teeth or various prostheses, nevetheless it is a elastic body which accompanies deformation by the external forces on it. The elastic properties of the mandible is influenced by the various procedures such as conventional restorative treatments, osseointegrated implant treatments, reconstructive surgical procedures and so forth. Among the treatments the osseointegrated implant has no periodontal ligaments, which exist around the natural teeth to allow physiologic mobility in the alveolar socket. And so around the osseointegrated implant, there is almost no damping effect during the transmission of occlusal stress and displacements. If the osseointegrated implants are connected by the superstructure for the stabilization and effective distribution of occlusal stresses, the elastic properties of mandible is restricted according to the extent of 'splinting' by the superstructure and implants. To investigate the change of elastic behaviour of the mandible which has osseointegrated implant prosthesis of various numbers of implant installment and span of superstructre, a three dimensional finite element model was developed and analyzed with conditions mentioned above. The conclusions are as follows : 1. The displacements are primarily developed at the area of muscle attachment and distributed all around the mandible according to the various properties of bone. 2. The segmentation in the superstructure has few influence on the distribution of stress and displacement. 3. In the load case of ICP, the concentration of tensional stress was observed at the anterior portion of the ramus($9.22E+6N/m^2$) and at the lingual portion of the symphysis menti($8.36E+6N/m^2$). 4. In the load case of INC, the concentration of tensional stress was observed at the anterior portion of the ramus($9.90E+6N/m^2$) and the concentration of tensional stress was observed at the lingual portion of the symphysis menti($2.38E+6N/m^2$)). 5. In the load case of UTCP, the relatively high concentration of tensional stress($3.66E+7N/m^2$) was observed at the internal surface of the condylar neck.

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대면적 Transformer coupled Plasma Source에서 파워결합에 관한 실험적 연구

  • 김희준;손명근;황용석
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.166-166
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    • 1998
  • 반도체 공정에서 기존보다 큰 30cm 웨이퍼훌 이용하기 위해서 기존의 ECR, Helicon, ICP, 등 공정용 고 밀도 플라즈마 원들의 대면적화에 대한 연구가 세계적으로 진행되고 있다 현 상황에서는 평판형 안테 나룰 이용한 TCP가 대면적용 폴라즈마 원의 가장 유력한 후보로 여겨지고 있다 TCP롤 대면적화 하는 데 있어서 중요한 문제점으로는 대면적에서의 큰 안테나 인되턴스로 인한 임피던스 정합과 대면적에서 의 유전울질의 기계적 강도이다. 앓은 유전물질올 사용힐 수 있도록 대면적 TCP 플라즈마 원올 실계 저l작하였고 이차원 가열이론올 이용한 TCPRP code 률 이용하여 안테나의 반경옳 결정하였디 안테나의 인덕턴스 값올 줄이기 위해서는 주m수는 13.56MHz 보다 낮은 4-5MHz 부근에서 작동하는 RF 파워룰 선택하였다 이 파워 서플라이는 보통 사용되는 50n 흩력 입묘$\mid$던스훌 갖는 형태가 Of니라 LC 공진현상 올 이용하여 부하에 파워률 전달하는 형태이다 .. TCP 장치에 사용할 수 있도록 파워 서플라이 흩력 단에 안테나와 직혈로 가변 콘덴서를 달아서 임11I던스 정합올 힐 수 있게 하였다 안테나에 직훌로 달Of줌으 로써 안테니의 인덕턴스훌 훌여주는 효과훌 얻올 수 있다 안테나에 흐르는 전류룰 측정하기 위해서 사 각형 루프로 전류 픽업 코일을 만들었고 진공상태에서 RF 파워률 인가하고 안테나의 전류와 전압을 측정하여 픽업 코일걸과훌 조정하였다. 발생기체로는 헬륨올 사용하였고 1-100mTorr 의 압력범위에서 실험을 하였다 플라즈마롤 빌샘시키고 파워를 증가 시킴에 따라 E-H mode transition 현상이 관찰되었고 그 때의 임계 전류 값을 측정하였다. 압력이 낮올수록 모드 변화가 일어나는 전류의 값이 작았다 임계 전류는 압력에 대해서 선형적인 특성을 보였다 이는 압력이 낮을수록 유도걸힘이 더 잘 된다는 것을 의미한다 1 1 mTorr에서는 H-mode에서 안테나의 전류가 파워훌 증가시킴에 따라 계속 증가하였으니, 압력이 올라 갈수록 조금씩 증가하는 정도가 줄어들고. 100mTorr에서는 포화된 값을 나타냈다 H-mode로 넘어간 후 에는 파워가 증가황에 따라 안테나의 임피던스 값이 모든 압력영역에서 줄어드는 경황을 보였고, 이는 플라즈마의 인덕턴스에 의해서 안테나의 인덕턴스 기 감소되기 때문이다, 파워가 증가할수록 안테U오} 플라즈마 루프사이의 상호걸합이 증가하는 걸로 해석힐 수 있다 안테나의 인되턴스 변화보다는 저항.성 분의 변화가 컸다 하지만 전체 임피던스로 볼 때 저항성분이 상대적으로 작기 때문에 인덕턴스의 감소 가 더 큰 영향을 미치는 걸로 볼 수 있다. 하지만 플라즈마로의 파워 전달에는 저항성분만이 영향올 미 치므로 저항성분의 큰 변화는 파워가 많이 전달될올 의미한다 피워전달 효율을 계산해 본 결과 수 r mTorr 부근이 80-90% 정도의 높은 효율올 보였고 5mTorr 일 때가 가장 좋았다.

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Study of Selective Etching of GaAs over AlGaAs and InGaP Semiconductors in High Density Planar Inductively Coupled BCl3/SF6 Plasmas (고밀도 평판형 유도결합 BCl3/SF6 플라즈마를 이용한 GaAs/AlGaAs와 InGaP 반도체의 선택적 식각에 관한 연구)

  • Yoo Seungryul;Ryu Hyunwoo;Lim Wantae;Lee Jewon;Cho Guan Sik;Jeon Minhyon;Song Hanjung;Lee BongJu;Ko Jong Soo;Go Jeung Sang;Pearton S. J.
    • Korean Journal of Materials Research
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    • v.15 no.3
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    • pp.161-165
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    • 2005
  • We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

FILLER LEACHING FROM NANOFILLER-CONTAINED COMPOSITE RESIN IN VARIOUS MEDIA (수종의 저장 용액에서 나노필러를 함유한 복합레진의 필러의 용출량에 관한 연구)

  • Yang, Kyu-Ho;Heo, Su-Kyung;Choi, Nam-Ki;Kim, Seon-Mi
    • Journal of the korean academy of Pediatric Dentistry
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    • v.36 no.1
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    • pp.62-70
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    • 2009
  • The objective of this study was to measure the leaching of filler (Si, Ba) from nanofiller-contained composites (Palfique Estelite $sigma^{{R}}$ (Tokuyama Dental Corp., Tokyo, Japan), $Z-350^{{R}}$ (3M ESPE, USA), Ceram X duo $E3^{{R}}$, $D3^{{R}}$ (Dentsply, Konstanz, Germany)) under different conditions. The samples used for the study of leachable components were made by insertion of the material into a circular mold, 10 mm in diameter and 3.0 mm high. Each specimen was placed in a disposable polystyrene vial containing 5 mL of distilled water, artificial saliva or 0.1N NaOH and kept in an oven at $37^{\circ}C$. ; water and artificial saliva - 150 days, 0.1N NaOH - 15days. Inductively coupled plasma atomic emission spectroscopy (ICP-AES) was used to determine the amount of Si and Ba in the test solutions. 1. Filler leaching was significantly great in 0.1N NaOH among all samples(p<.0.001). 2. When samples were stored in the distilled water, Estelite showed the lowest amount of Si leaching. When samples were stored in the artificial saliva, Z-350 showed the lowest amount of Si leaching. 3. There were significant differences in filler leaching between 3 storage medias and composite resins(p<.0.001). 4. Si and Ba leaching occurred in greater proportion when samples were stored in the artificial saliva than distilled water. 5. There were significant interactions in monthly filler leaching between leaching in artificial saliva and in distilled water, as well as the interaction between storage medium and filler(p<.0001). These results indicate that a continuous filler leaching of nanofiller-contained composite resins was in storing aqueous solutions under over time.

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Quantitative Elemental Analysis in Soils by using Laser Induced Breakdown Spectroscopy(LIBS) (레이저유도붕괴분광법을 활용한 토양의 정량분석)

  • Zhang, Yong-Seon;Lee, Gye-Jun;Lee, Jeong-Tae;Hwang, Seon-Woong;Jin, Yong-Ik;Park, Chan-Won;Moon, Yong-Hee
    • Korean Journal of Soil Science and Fertilizer
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    • v.42 no.5
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    • pp.399-407
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    • 2009
  • Laser induced breakdown spectroscopy(LIBS) is an simple analysis method for directly quantifying many kinds of soil micro-elements on site using a small size of laser without pre-treatment at any property of materials(solid, liquid and gas). The purpose of this study were to find an optimum condition of the LIBS measurement including wavelengths for quantifying soil elements, to relate spectral properties to the concentration of soil elements using LIBS as a simultaneous un-breakdown quantitative analysis technology, which can be applied for the safety assessment of agricultural products and precision agriculture, and to compare the results with a standardized chemical analysis method. Soil samples classified as fine-silty, mixed, thermic Typic Hapludalf(Memphis series) from grassland and uplands in Tennessee, USA were collected, crushed, and prepared for further analysis or LIBS measurement. The samples were measured using LIBS ranged from 200 to 600 nm(0.03 nm interval) with a Nd:YAG laser at 532 nm, with a beam energy of 25 mJ per pulse, a pulse width of 5 ns, and a repetition rate of 10 Hz. The optimum wavelength(${\lambda}nm$) of LIBS for estimating soil and plant elements were 308.2 nm for Al, 428.3 nm for Ca, 247.8 nm for T-C, 438.3 nm for Fe, 766.5 nm for K, 85.2 nm for Mg, 330.2 nm for Na, 213.6 nm for P, 180.7 nm for S, 288.2 nm for Si, and 351.9 nm for Ti, respectively. Coefficients of determination($r^2$) of calibration curve using standard reference soil samples for each element from LIBS measurement were ranged from 0.863 to 0.977. In comparison with ICP-AES(Inductively coupled plasma atomic emission spectroscopy) measurement, measurement error in terms of relative standard error were calculated. Silicon dioxide(SiO2) concentration estimated from two methods showed good agreement with -3.5% of relative standard error. The relative standard errors for the other elements were high. It implies that the prediction accuracy is low which might be caused by matrix effect such as particle size and constituent of soils. It is necessary to enhance the measurement and prediction accuracy of LIBS by improving pretreatment process, standard reference soil samples, and measurement method for a reliable quantification method.

Study of the Characteristics of Roasted Coffee Bean in Seoul (서울시 유통 원두커피의 품질 특성)

  • Cho, In-soon;Hong, Mi-sun;Lee, Eun-seon;Kim, Si-jung;Lee, Yong-cheol;Kim, Sung-dan;Jo, Han-bin;Kim, Jung-hun;Jung, Kweon
    • Journal of Food Hygiene and Safety
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    • v.30 no.3
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    • pp.236-241
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    • 2015
  • This study was performed to survey and evaluate the contents of pH, total acidity, caffeine, harmful metals (Pb, Cd) and total polyphenol in coffee extraction. In total, coffee bean. Total fifty coffee samples were analysed. A 5 g portion of roasted ground coffee samples were extracted in coffee-maker with 100 mL of distilled water and the extraction were used in all experiments. The pH range was 4.72~5.25 (mean value = 4.99). According to increase of the roasting temperature, the pH were shown a tendency to increase. The contents of total acidity was 0.72~2.25% (mean value = 1.59%). According to increase of the roasting temperature, the contents of total acidity were shown a tendency to decrease. The contents of harmful metals (Pb, Cd) in coffee extractions were determined by ICP. The average contents of Pb and Cd were 0.0112 and 0.0011 mg/kg, respectively. The contents of caffeine in coffee extractions were determined by HPLC, the range of detection was 0.51~20.28 mg/mL (mean value = 12.29 mg/mL). According to increase of the roasting temperature, the contents of caffeine were shown a tendency to increase. The contents of total polyphenol in coffee extractions were determined by spectrophotometer, the range of detection was 18.88~43.90 mg/mL (mean value = 31.94 mg/mL). According to increase of the roasting temperature, the contents of total polypenol were shown a tendency to decrease.

Preliminary study on colloidal partitioning and speciation of trace metals in acid mine drainage

  • Kwon, Jang-Soon;Lee, Jeong-Ho;Yun, Seong-Taek;Jung, Hun-Bok;Chang, Min-Kyoung;Lee, Pyeong-Ku
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2004.04a
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    • pp.100-101
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    • 2004
  • Many researches in Korea have been performed to understand the pollution of stream waters by acid mine drainage. However, few studies have been conducted regarding the effect of particulate and colloidal fractions on the transport of trace metals. To estimate harmful effects of trace metals, it is important to evaluate the particulate and colloidal metals as well as dissolved metals, because particulate and colloidal fractions of trace metals play an important role in transport of trace metals and may adversely affect habitats and organisms in riverine system. Colloids are solids with effective diameters in size range from 0.001 $\mu$m to 1 $\mu$m. According to Jone et al. (1974), metals in surface water, like Al, Fe, and Mn, require filtration with pore-size membranes smaller than 0.45 $\mu$m to define dissolved concentrations. The main objective of this study is to understand the effects of particulate, colloidal, and truly dissolved fractions on the transport and fate of trace metals in acid mine drainage. This study was conducted for the Onjeong creek in the Uljin mine area. Sampling was carried out in 13 sites, spatially covering the area from mine dumps to the downstream Onjeong reservoir. To examine the metal partitioning between particulate, colloidal, and truly dissolved fraction, we used successive filtration techniques consisting of conventional method (using 0.45 $\mu$m membranes) and tangential-flow ultrafiltration (using 0.001 $\mu$mm membranes). Ultrafiltration may seperate much smaller particles from aqueous phase (Josephson, 1984; Hernandez and Stallard, 1988). The analysis of metals were performed by inductively coupled plasma - atomic emission spectrometer (ICP-AES: model Perkin Elmer OPTIMA3000XL). Anions such as SO$_4$, Cl and NO$_3$ were measured with ion chromatograph (IC: model Dionex 120). Sample analysis is still in progress. The preliminary data show that the studied creek is severely polluted by Al, Fe, Mn, Pb and Zn. Toward upstream sites with relatively lower pH, less than 50% of Al and Fe occur in the sorbed form on particles or colloids, whereas more than 80% of Al and Fe occur in the sorbed form in downstream sites or tributaries with relatively higher pH. Less than 30% of Zn is present in particle or colloidal forms in the whole range of creek. Truly dissolved fraction of trace metals is negatively correlated with pH. The Kd values for Al, Fe and Zn consistently increase with increasing pH and decrease with increasing particle concentration.

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In vitro Anticancer Effect of Salt on HepG2 Human Hepatocellular Carcinoma Cells (소금의 HepG2 인체 간암세포에서의 in vitro 항암 효과)

  • Kim, Hee-Young;Ju, Jaehyun;Lee, Kyung Hee;Park, Kun-Young
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.45 no.1
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    • pp.137-142
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    • 2016
  • We investigated the anti-proliferative effects of solar salt and purified salt (PS) on HepG2 human hepatocellular cancer cells as well as their effects on mRNA and protein expression of apoptosis- and cell cycle-related genes, including Bcl-2, Bax, p53, and p21. Each salt sample suppressed cancer cell proliferation when treated at a concentration of 0.5% or 1%. Especially solar salt from T salt field (SS-T) and solar salt from Y salt field (SS-Y) significantly suppressed proliferation of cancer cells in comparison with PS. Treatment of HepG2 cells with salt samples at a concentration of 1% suppressed expression of Bcl-2 and promoted expression of Bax, p53, and p21 at the mRNA and protein levels in comparison with the control group. Inductively coupled plasma optical emission spectrometry (ICP-OES) showed that SS-T and SS-Y had higher concentrations of Ca, Mg, S, and K than PS, and SS-T contained higher concentrations of these minerals than SS-Y. It seems that Na and mineral contents in solar salt may contribute to regulation of the genes. Taken together, salt, especially mineral rich solar salt, inhibits cancer cell growth by regulating apoptosis and cell cycle-related genes.

CHEMICAL DEGRADATION OF LIGHT CURED COMPOSITE RESINS IN NAOH SOLUTION (NaOH 용액내에서의 광중합형 복합레진의 화학적 분해)

  • Kim, Jung-Ran;Jeong, Byung-Cho;Yang, Kyu-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.29 no.3
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    • pp.469-477
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    • 2002
  • One of the major deficiencies of composite restorative resins is their insufficient resistance to wear. Of the multitude of factors that have been associated with wear, subsurface degradation within the restoration is considered to be one. The aim of this study was to evaluate the resistance to degradation of four commercial composite resins in an alkaline solution. The brands studied were Z100(3M), Clearfil AP-X(Kuraray), Tetric Ceram(Vivadent), Aelit flo(Bisco). Resistance to degradation was evaluated on the basis of the following parameters: (a) mass loss(%) - determined from pre-and post-exposure specimen weights: (b) Si loss(ppm) - obtained from ICP-AE analysis of solution exposed to specimens; and (c) degradation depth(${\mu}m$) - measured microscopically (SEM) from polished circular sections of exposed specimens. The results were as follows: 1. The sequence of the mass loss was in ascending order by AE, EL, TC, Z100. There was statistically significant difference of mass loss between AE, CL group and TC, Z100 group(p<0.05). 2. The sequence of the degree of degradation layer depth was in ascending order by AE, CL, TC, Z100. But there was no statistically significant difference of degree of degradation layer depth between AE and CL(p<0.05). 3. For the Si concentration, Z100 was the highest of all. 4. The correlation coefficient between mass loss and degradation depth was relatively high(r=0.71 p<0.05).

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