Characterization of the Crystallized ITO Thin Films Grown at a Low Temperature by Off-axis RF Magnetron Sputtering (Off-axis RF 마그네트론 스퍼터링법을 이용하여 저온에서 결정화된 ITO 박막의 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.24 no.2
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- pp.126-130
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- 2011