Characterization of the Crystallized ITO Thin Films Grown at a Low Temperature by Off-axis RF Magnetron Sputtering |
Choi, Hyung-Jin
(School of Nano Science and Technology, Chungnam National University)
Jung, Hyun-June (School of Nano Science and Technology, Chungnam National University) Hur, Sung-Gi (School of Nano Science and Technology, Chungnam National University) Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University) |
1 | S. Li, X. Qiao, J. Chen, Mater.Chem. Phys.. 98, 144 (2006). DOI |
2 | W. Song, J.KIEEME 17, 1277 (2004). |
3 | J. T. Hwang, J. M. Son, I. N. Kang and Y. S. Bu, Polym. Sci. Technol. 14(5), 554 (2003). |
4 | Kunisuke Maki, Nobuo Komiya, Asako Szuki, Thin Solid Films 455, 224 (2003). |
5 | T. Kondo, Y. Sawada, K. Akiyama, H. Funakubo, Thin Solid Films 516, 5864 (2008). DOI |
6 | S. Venkat, Nak-Jin Seong, and Soon-Gil Yoon, Scripta Materialia 61, 867 (2009). DOI |
7 | K. Zhang, F. Zhu, C.H.A Huan, A.T.S. Wee, J. Appl. Phys.. 86, 974 (1999). DOI |
8 | S. H. Shin, H. H. Kim, K. J. Park, J. KIEMEE 10 (7), 700 (1997). |
9 | Yalan Hu, Xungang Diao, Cong Wang, Vacuum. 75, 183 (2004). DOI |
10 | Y. H. Jung, E. S. Lee, B. Munir, R. A. Wibowo, K. H. Kim, J. Kor. Inst. Surf. Eng. 38, 150 (2005). |