• Macromolecular Research
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• 제14권6호
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• pp.624-629
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• 2006

The cellulose-based, Electroactive Paper (EAPap) has recently been reported as a smart material with the advantages of lightweight, dry condition, biodegradability, sustainability, large displacement output and low actuation voltage. However, it requires high humidity.. This paper introduces an EAPap made with a cellulose solution and lithium chloride (LiCl), which can be actuated in room humidity condition. The fabrication process, performance test and effect of LiCl content of the EAPap actuator are illustrated. The bending displacement of the EAPap actuators was evaluated with actuation voltage, frequency, humidity and LiCl content changes. At a LiCl/ cellulose content of 3:10, the displacement output was maximized at a room humidity condition. Even though the displacement output was less than that of a high humidity EAPap actuator, the mechanical power output was not reduced due to the increased resonance frequency, which is promising for developing EAPap actuators that are less sensitive to humidity.

• 제어로봇시스템학회논문지
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• 제10권11호
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• pp.971-975
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• 2004

This paper deals with the idea of Electroactive paper (EAPap) actuator and its application possibility. EAPap is a paper that produces large displacement under electrical excitation. EAPap is made with a cellulose paper by constructing thin electrodes on both sides of the paper. When electrical voltage is applied on the electrodes, the EAPap produces bending displacement. EAPap has merits in terms of lightweight, dryness, large displacement output, low actuation voltage and low power consumption. Since the power requirement is so small that it is suitable for microwave-driven smart actuators. This paper describes the working principle and performance of EAPap as an artificial muscle and its possibility far many applications.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.237-245
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• 2002

A new type of RF MEMS switch for low voltage actuation, high broadband application and high power capability is presented. Mechanical and electromagnetic simulations of this new RF MEMS switch type are shown and the fabrication process and measurement results are given. The switching element consists of a cantilever which is fixed by a suspension spring to the ground of the coplanar line. The closing voltage is 16V. The switches exhibit low insertion loss (<0.85dB@30GHz) with good isolation (>22dB@30GHz).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.865-868
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• 2001

We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12$\mu\textrm{m}$-thick polysilicon, and the sacrificial layer is LTO(Low Temperature Oxide) of 3$\mu\textrm{m}$thickness. The displacement of actuator is as large as 3$\mu\textrm{m}$when the length of actuation bar is 100$\mu\textrm{m}$in length at 5V input voltage. The proposed microactuators have advantages of easy assembly with other optical component by way of fiber alignment in the substrate plane, and its fabrication process features simplicity while retaining batch-fabrication economy.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2395-2397
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• 2005

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.

• 공업화학
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• 제17권6호
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• pp.586-590
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• 2006

전기활성 고분자로서 이온성고분자-금속복합체(Ionic Polymer metal Composites, IPMC)는 화학적 환원방법으로 비교적 쉽게 제조하여 낮은 구동전압에서도 큰 변위를 낼 수 있는 유연성을 지니는 스마트 소재(soft smart material) 중의 하나이다. 제조 시의 화학적 환원방법은 용액 내에서 반응시킴으로써 결과적으로 형성되는 다공성 고분자 막의 표면의 거칠기 때문에 구동체로서의 IPMC의 동작특성에 결함을 줄 수 있다. 따라서 본 연구에서는 IPMC의 표면의 거칠기에 대한 구동 특성을 비교하고 표면 조도를 향상시키는 방안으로 표면 이온빔 보조 증착법으로 표면을 개질하였다. 이러한 표면 개질 효과로 인해 IPMC 전극의 표면 저항을 낮추고 반응 속도를 증가시킬 수 있었고, 표면 조도, 모폴로지, 구동력 등을 측정하여 향상된 구동 현상을 나타내는 제조방법에 대한 연구를 하였다.

• Transactions on Electrical and Electronic Materials
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• 제17권3호
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• pp.129-133
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• 2016

Theoretical and graphical analysis of pull-in-voltage and figure of merit for a fixed-fixed capacitive Micro Electromechanical Systems (MEMS) switch is presented in this paper. MEMS switch consists of a thin electrode called bridge suspended over a central line and both ends of the bridge are fixed at the ground planes of a coplanar waveguide (CPW) structure. A thin layer of dielectric material is deposited between the bridge and centre conductor to avoid stiction and provide low impedance path between the electrodes. When an actuation voltage is applied between the electrodes, the metal bridge acquires pull in effect as it crosses one third of distance between them. In this study, we describe behavior of pull-in voltage and figure of merit (or capacitance ratio) of capacitive MEMS switch for five different dielectric materials. The effects of dielectric thicknesses are also considered to calculate the values of pull-in-voltage and capacitance ratio. This work shows that a reduced pull-in-voltage with increase in capacitance ratio can be achieved by using dielectric material of high dielectric constant above the central line of CPW.

• 한국소음진동공학회논문집
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• 제15권9호
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• pp.1077-1083
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• 2005

Electro-Active Paper (EAPap) is one of attractive electro-active polymer (EAP) materials for artificial muscles due to its many advantages such as light weight, biologically degradable, low cost, large displacement output, low actuation voltage and low power consumption. However, drawbacks of EAPap actuators include low force output and humidity dependence. To enhance the performance of EAPap, conductive polymer (PPy) and SWNT/conductive polymer (PANI) are coated on EAPap PPy as conductive polymer is coated on cellulose EAPap by means of electrochemical deposition. Two different dopants are used in PPy through conducting polymer processing. SWNTS are mixed with PANI in emeraldine base along with different dopants. The compound materials are coated on cellulose EAPap using spin coating system. The performance of PPy/EAPap and SWNT/PANI/EAPap are evaluated in terms of bending displacement, blocked force, and the effects of dopants, humidity, coaling time, voltage and frequency are investigated. Comparing with EAPap actuators, SWNT/PANI/EAPap actuators show $200\%$ improvement of bending displacement and $300\%$ increment of blocked force.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.356-359
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• 2005

Ionic-polymer-metal-composite(IPMC), one of new actuation materials of electroactive polymers plated with noble metallic electrodes is known for the fast bending upon electric field. The IPMC strip bends towards anode under electrical field. It has many merits of low driving voltage, quick responsiveness, high durability, possibility of miniaturizability. In this paper, we studied for developing the large deflection of IPMC according several fabricating parameters. We measured the large deflection by the different process of sandpaper and sandblasting in surface treatment, the initial compositing process and the surface electroding process, and the different counter ions in ion exchanging process. In fundamental, the displacement of IPMC strip depends on voltage magnitude and applied signal frequency and its maximum deformation is observed at a critical frequency, resonant frequency.

• Transactions on Electrical and Electronic Materials
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• 제14권3호
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• pp.116-120
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• 2013

This paper proposes a novel RF MEMS dc-contact switch with stiff membrane on a quartz substrate. The uniqueness of this work lies in the utilization of a seesaw mechanism to restore the movable part to its rest position. The switching action is done by using separate pull-down and pull-up electrodes, and hence operation of the switch does not rely on the elastic recovery force of the membrane. One of the main problems faced by electrostatically actuated MEMS switches is the high operational voltages, which results from bending of the membrane, due to internal stress gradient. This is resolved by using a stiff and thick membrane. This membrane consists of flexible meanders, for easy movement between the two states. The device operates with an actuation voltage of 6.43 V, an insertion loss of -0.047 dB and isolation of -51.82 dB at 2 GHz.