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http://dx.doi.org/10.4313/TEEM.2013.14.3.116

A Novel Stiff Membrane Seesaw Type RF Microelectromechanical System DC Contact Switch on Quartz Substrate  

Khaira, Navjot K. (Department of Electronics & Communication Engineering, Lovely Professional University)
Singh, Tejinder (Department of Electronics & Communication Engineering, Lovely Professional University)
Sengar, Jitendra S. (Department of Electronics & Communication Engineering, Lovely Professional University)
Publication Information
Transactions on Electrical and Electronic Materials / v.14, no.3, 2013 , pp. 116-120 More about this Journal
Abstract
This paper proposes a novel RF MEMS dc-contact switch with stiff membrane on a quartz substrate. The uniqueness of this work lies in the utilization of a seesaw mechanism to restore the movable part to its rest position. The switching action is done by using separate pull-down and pull-up electrodes, and hence operation of the switch does not rely on the elastic recovery force of the membrane. One of the main problems faced by electrostatically actuated MEMS switches is the high operational voltages, which results from bending of the membrane, due to internal stress gradient. This is resolved by using a stiff and thick membrane. This membrane consists of flexible meanders, for easy movement between the two states. The device operates with an actuation voltage of 6.43 V, an insertion loss of -0.047 dB and isolation of -51.82 dB at 2 GHz.
Keywords
RF MEMS; DC-Contact switch; Seesaw; Quartz substrate; Low-voltage MEMS switch;
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