1 |
J. M. Cabral and A. S. Holmes, Electrotechnical Conference, 2006. MELECON 2006. IEEE Mediterranean (Europe) (Dept. of Ind. Electron., Minho Univ. Malaga, Europe 2006 May 16-19) p. 288 [DOI: http://dx.doi.org/10.1109/MELCON.2006.1653095].
DOI
|
2 |
T. Veijola, Equivalent Circuit Models for Micromechanical Inertial Sensors, Ph.D. disertation (Helsinki University of Technology, Espoo, Finland, 1999) p. 16.
|
3 |
L. A. Rocha, E. Cretu and R. F. Wolffenbuttel, Tech. Proc. Of the 2004 NSTI Nanotech. Conference and Trade Show (USA) (Nano Science and Tech. Inst. Boston, MA, USA 2004 Vol. 2) p. 203.
|
4 |
W. M. V. Spenger, R. Puers and I. D. Wolf, J. Adhesion Sci. Technol. 17, 563 (2003) [DOI: http://dx.doi.org/10.1163/15685610360554410].
DOI
ScienceOn
|
5 |
J. B. Muldavin and G. M. Rebeiz, Microwave Theory and Techniques, IEEE Trans. on. 48, 1053 (2000) [DOI: http://dx.doi.org/10.1109/22.904744].
DOI
ScienceOn
|
6 |
Z. J. Yao, S. Chen, S. Eshelman, D. Denniston and C. L. Goldsmith, Microelectromech. Systems, IEEE J. 8, 129 (1999) [DOI:http://dx.doi.org/10.1109/84.767108].
DOI
ScienceOn
|
7 |
S. P. Pacheco, L. P. B. Katehi and C. T. Nguyen, Microwave Symposium Digest. 2000 IEEE MTT-S International (USA) (Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA 2000 Jun 11-16) p. 165 [DOI: http://dx.doi.org/10.1109/MWSYM.2000.860921].
DOI
|
8 |
M. Ruan, J. Shen and C. B. Wheeler, Micro Electro Mechanical Systems, 2001. MEMS 2011. The 14th IEEE International Conference on (USA) (Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA 2001 Jan 21-25) p. 224 [DOI: http://dx.doi.org/10.1109/MEMSYS.2001.906519].
DOI
|
9 |
H. C. Lee, J. H. Park, J. Y. Park, H. J. Nam and J. U. Bu, Journal of Micromechanics and Microengineering. 15, 2098 (2005) [DOI:http://dx.doi.org/10.1088/0960-1317/15/11/015].
DOI
ScienceOn
|
10 |
M. Daneshmand, S. Fauladi, R. R. Mansour, M. Lisi and T. Stajcer, Microwave Symposium Digest, 2009. MTT-S International (USA) (Microwave to Millimeter-wave Lab., Univ. of Alberta, Edmonton, AB, Canada 2009 Jun 07-12) p. 1217 [DOI: http://dx.doi.org/10.1109/MWSYM.2009.5165922].
DOI
|
11 |
G. M. Rebeiz, RF MEMS Theory, Design and Technology (John Wiley & Sons, USA, 2003) p. 58.
|
12 |
K. Maninder, K. J. Rangra, D. Rangra and S. Singh, International Journal of Recent Trends in Engineering. 2, 95 (2009).
|
13 |
N. K. Khaira, J. S. Sengar, 2nd International Conference on Biomedical Engineering & Assistive Technologies (India) (Dr. B. R. Ambedkar National Inst. of Tech. Jalandhar, PB, India, 2012 Dec 06-07) p. 706.
|
14 |
J. Kim, S. Kwon, H. Jeong, Y. Hong, S. Lee, I. Song, B. Ju, Sensors and Actuators A: Physical. 153, 114 (2009) [DOI: http://dx.doi.org/10.1016/j.sna.2009.04.002].
DOI
ScienceOn
|