• 항공우주시스템공학회지
• /
• 제16권5호
• /
• pp.17-25
• /
• 2022

액체로켓엔진의 중요한 특성인 연소 안정성, 연소효율 및 넓은 범위의 추력 조절 등에서 장점이 많은 핀틀 분사기를 설계 및 제작하여 초임계 조건에서 연소시험을 수행하였다. 핀틀 분사기는 추력 제어 및 제작성을 고려하여 직사각형의 1열 형상의 오리피스를 갖는 핀틀 분사기로 제작하였다. 핀틀 분사기의 연소성능 및 상용 분사기로써의 가능성을 검증하기 위해 TMR(Total Momentum Ratio)과 BF(Blockage Factor)를 변화하여 연소 특성을 분석하였다. 연소시험 결과 열유속은 TMR 증가에 따라 증가하는 경향이 나타났으며, 특성속도 효율은 TMR보다 BF에 영향을 받는 것으로 확인되었다. 따라서 TMR 변화에 둔감한 효율 특성을 갖는 1열 핀틀 분사기는 낮은 연료 차압 조건에서 높은 효율을 달성할 수 있다면, 가변 핀틀 분사기 설계 유연성이 높아질 수 있다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 하계학술대회 논문집
• /
• pp.74-74
• /
• 2009

Titanium nitride has been used as hardmask for semiconductor process, capacitor of MIM type and diffusion barrier of DRAM, due to it's low resistivity, thermodynamic stability and diffusion coefficient. Characteristics of the TiN film are high intensity and chemical stability. The TiN film also has compatibility with high-k material. This study is an experimental test for better condition of TiN film etching process. The etch rate of TiN film was investigated about etching in $BCl_3/Ar/O_2$ plasma using the inductively coupled plasma (ICP) etching system. The base condition were 4 sccm $BCl_3$ /16 sccm Ar mixed gas and 500 W the RF power, -50 V the DC bias voltage, 10 mTorr the chamber pressure and $40\;^{\circ}C$ the substrate temperature. We added $O_2$ gas to give affect etch rate because $O_2$ reacts with photoresist easily. We had changed $O_2$ gas flow rate from 2 sccm to 8 sccm, the RF power from 500 W to 800 W, the DC bias voltage from -50 V to -200 V, the chamber pressure from 5 mTorr to 20 mTorr and the substrate temperature from $20\;^{\circ}C$ to $80\;^{\circ}C$.

• 한국자동차공학회논문집
• /
• 제15권2호
• /
• pp.8-14
• /
• 2007

Compression ignition of homogeneous charges in IC engines indicates possibilities of achieving the high efficiency of DI diesel engines with low level of NOx and particulate emissions. The objectives of this study are to further understand the characteristics of the HCCI(Homogeneous charge compression ignition) combustion and to find ways of extending the rich HCCI operation limit in an engine-like environment. DME fuel is supplied either in the form of premixture with air or directly injected in the combustion chamber of a rapid compression and expansion machine under the conditions of various equivalence ratio and injection timing. The cylinder pressure is measured and the rate of heat release is computed from the measured pressure for the analysis of the combustion characteristics. The experimental data show that the RCEM can operate without knock on mixtures of higher equivalence ratio, when DME is directly injected in the combustion chamber than introduced as a fraction of a perfect or nearly perfect premixture. Very early fuel injection timings usually employed in HCCI operation are seen to have only insignificant effects in control of ignition timing.

• 한국항공우주학회지
• /
• 제37권1호
• /
• pp.62-68
• /
• 2009

하이브리드 로켓 연소에서 발생하는 산화제 난류 유동과 연료의 기화로 인한 분출유동 사이의 상호 간섭은 매우 복잡하고 특별한 유동 간섭을 일으킨다. 이를 연구하기 위하여 연소반응을 제외하고, 산화제의 난류 유동과 연료 벽면에서의 분출 유동을 모사한 채널 유동에 대한 LES 해석을 수행하였다. 고체추진 로켓의 연소 과정에서 관찰되는 현상과 매우 흡사하게 벽면 근처에서 특정주파수로 진동하는 유동 현상이 존재한다는 것을 확인하였고, 산화제와 분출 유동의 간섭에 기인한 유동의 진동현상은 벽면 근처의 매우 얇은 영역에서만 존재하였다. 큰 길이 스케일의 유동현상을 보여주는 압력 섭동장으로부터 채널 내 주유동이 특정 주파수 특성을 갖고 하류로 진행해 가는데, 이는 산화제 유동이 분출유동과 상호작용을 하면서 발생된 전단유동의 특성을 나타낸 것이다. 그러나 하이브리드 로켓 연소실 유동의 진동 특성은 고체 추진 로켓에서 관찰되는 유동 특성과는 달리, 진동의 강도가 벽면에서 온도 구배를 변화시켜 열전달의 향상을 발생시키기에는 충분하지 못한 것으로 보인다. 그러나 벽면 근처에서 특정 주파수 특성을 갖는 유동현상이 존재한다는 사실은 비슷한 크기의 주파수를 갖는 음향 가진과 같은 외부교란이 작용한다면 공진으로 발전할 수 있는 가능성을 의미한다.

• 한국진공학회지
• /
• 제6권1호
• /
• pp.20-27
• /
• 1997

0.25$\mu\textrm{m}$이하의 최소선폭을 같는 초고집적회로에 사용할 수 있는 구리박막의 형성기술 을 조사하였다. 본 실험에서는 측면박막 형성에 적합한 화학적 증착을 시도하였으며 (hfac)Cu(VTMS)(hexafluoroacetylacetonate vinyltrimethylisilane copper(I))로 명명된 금속 유기 화합물을 원료로 사용하였다. 구리박막의 형성은 TiN와 $SiO_2$모재 위에 이루어 졌으며, 형성 중에 모재의 온도와 증착용기 내 압력의 함수로서 집적회로 공정상 주요 변수인 박막 의 비저항, 박막의 증착선택도를 측정하였다. 구리박막은 모재온도 $180^{\circ}C$와 증착용기의 압력 0.6Torr의 조건에서 가장 좋은 전기적 성질을 보여 주었다. 이 조건에서 형성된 구리박막은 다결정 구조를 나타내었으며 구리박막의 증착속도는 120nm/min, 비저항은 0.25$mu \Omega$.cm, 평균거칠기는 15.5nm로서 0.25$\mu\textrm{m}$이하 선폭의 집적회로에서 요구되는 전기적, 재료적 사양에 근접한 구리박막을 얻었다. 또한 140-$250^{\circ}C$의 모재 온도 범위에서 TiN모재와 $SiO_2$모재 사 이에 뚜렸한 증착선택성이 관측되었다.

• 한국분무공학회지
• /
• 제22권4호
• /
• pp.210-217
• /
• 2017

A gasoline direct injection engine has an intake air temperature can be lowered by the fuel vaporization in the combustion chamber increase the volume efficiency is high compression ratio. Therefore, study for injection rate and characteristics which influence mixture formation in combustion chamber is important. Movement of the injector needle has a direct effect on the injection of the fuel, such as formation of cavitation, the fuel injection rate, etc. Therefore, recent studies on the dynamic characteristics of the injector considering the movement of the needle have been reported, but it takes a lot of time and cost to experimentally confirm the movement of the needle inside the injector. In this study, AMESim, a commercial 1-D code, and Star-CCM+, a 3-D CFD code, were used to predict the dynamic performance of the injector with needle motion. In order to predict the movement of the needle under the high pressure, the result of the surface pressure distribution according to the movement of the needle was derived by using the morphing technique of flow analysis. In addition, we predicted the injection rate of the injector considering the movement of the needle in conjunction with the 1-D code. The injection rate of the injector was measured by the BOSCH's method and the results were similar to those of the simulation results. This method can predict the injection rate and injection characteristics and this result is expected to be used to predict the performance of gasoline direct injection engines with low cost and time in the future.

• 한국세라믹학회지
• /
• 제48권3호
• /
• pp.236-240
• /
• 2011

In order to deposit a homogeneous and uniform ${\beta}$-SiC films by chemical vapor deposition, we demonstrated the phase stability of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure, temperature and gas composition as variables. The ${\beta}$-SiC predominant region over other solid phases like carbon and silicon was changed gradually and consistently with temperature and pressure. Practically these maps provide necessary conditions for homogeneous ${\beta}$-SiC deposition of single phase. With the thermodynamic analyses, the CVD apparatus for uniform coating was modeled and simulated with computational fluid dynamics to obtain temperature and flow distribution in the CVD chamber. It gave an inspiration for the uniform temperature distribution and low local flow velocity over the deposition chamber. These calculation and model simulation could provide milestones for improving the thickness uniformity and phase homogeneity.

• 한국산업융합학회 논문집
• /
• 제25권3호
• /
• pp.443-449
• /
• 2022

In this study, in order to improve the disadvantages of the environmental error of the infusion set that performs infusion therapy in the existing clinical practice and to maximize the user's convenience by miniaturizing the existing infusion pump system, the structure of the muscle pump of the human vein was imitated. As a double check valve method, a method for preventing the backflow of fluid and discharging a constant fluid in one direction by external pressure was proposed. The proposed bio-mimic muscle pump uses a check valve that controls the flow of fluid in one direction and a silicone tube with elasticity, and a chamber is constructed. A peristaltic pump for applying intermittent pressure to the tube chamber was constructed using a multi-cam structure roller. In order to verify the performance of the proposed pump, optimization was performed while changing the number of multi-cam rollers and adjusting the speed of the roller driving motor, and the reproducibility of the instantaneous discharge amount and the continuous discharge amount of the pump was compared and tested. The performance of the muscle pump proposed in this study was verified through experiments that it can inject up to 1L of fluid within 12 hours, and that it is possible to inject the fluid with an accuracy of ±0.1ml. Real-time monitoring of the fluid injection volume through the bio-mimic muscle pump proposed in this study not only increases the convenience of the administrator, but also provides a precise fluid administration environment to more patients at a low cost, and additionally applies bubble detection and occlusion detection technology If so, it is believed that a safer medical environment can be provided to patients.

• 한국진공학회지
• /
• 제15권3호
• /
• pp.314-324
• /
• 2006

KSTAR ICRF 안테나의 진공특성을 실험적으로 조사하였다. 제작된 안테나를 총 유효배기속도 1015 l/s의 진공펌프가 장착된 시험용 진공용기에 설치하였으며, 고주파 시험하기 전에 시간에 따른 압력 변화, 총기체 부하, 도달 진공도 등을 측정하였다. 낮은 출력의 고주파를 반복적으로 인가함으로서 세정 효과를 확인하였다. 안테나에 고주파를 인가하여 시험하는 동안 진공도 변화를 측정하였으며, 압력 상승에 의해 방전이 유발되는 한계 압력을 조사하였다. 본 안테나의 경우 고주파 인가 중에 진공용기의 압력이 $10^{-4}$ mbar 이상이 되면 방전이 일어났다. 장펄스 시험에서 안테나의 온도와 시험용 진공용기의 압력을 측정하여 안테나를 냉각하지 않은 상태에서 운전이 가능한 전압을 조사하였으며, 냉각했을 때의 결과와 비교하였다.

• Geomechanics and Engineering
• /
• 제34권6호
• /
• pp.637-648
• /
• 2023

When an earth pressure balance (EPB) shield machine bores a tunnel in gravelly sand stratum, the excavated natural soil is normally transformed using foam and water to reduce cutter wear and the risk of direct muck squeezing out of the screw conveyor (i.e., muck spewing). Understanding the undrained shear behavior of conditioned soils under pressure is a potential perspective for optimizing the earth pressure balance shield tunnelling strategies. Owing to the unconventional properties of conditioned soil, a pressurized vane shear apparatus was utilized to investigate the undrained shear behavior of foam-conditioned gravelly sands under normal pressure. The results showed that the shear stress-displacement curves exhibited strain-softening behavior only when the initial void ratio (e₀) of the foam-conditioned sand was less than the maximum void ratio (e_max) of the unconditioned sand. The peak and residual strength increased with an increase in normal pressure and a decrease in foam injection ratio. A unique relation between the void ratio and the shear strength in the residual stage was observed in the e-ln(τ) space. When e₀ was greater than e_max, the fluid-like specimens had quite low strengths. Besides, the stick-slip behavior, characterized by the variation coefficient of measured shear stress in the residual stage, was more evident under lower pressure but it appeared to be independent of the foam injection. A comparison between the results of pressurized vane shear tests and those of slump tests indicated that the slump test has its limitations to characterize the chamber muck fluidity and build the optimal conditioning parameters.