• Nuclear Engineering and Technology
• /
• 제52권10호
• /
• pp.2299-2305
• /
• 2020

Zr alloy specimens were coated with Cr-Al alloy to enhance their resistance to oxidation. The coated samples were oxidized at 1200 ℃ in a steam environment for 300 s and showed extremely low oxidation when compared to uncoated Zr alloy specimens. The microstructure and elemental distribution of the oxides formed on the surface of Cr-Al alloys have been investigated by transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). A very thin protective layer of Cr₂O₃ formed on the outer surface of the Cr-Al alloy, and a thin Al₂O₃ layer was also observed in the Cr-Al alloy matrix, near the surface. Our results suggest that these two oxide layers near the surface confers excellent oxidation resistance to the Cr-Al alloy. Even after exposure to a high temperature of 1200 ℃, inter-diffusion between the Cr-Al alloy and the Zr alloy occurred in very few regions near the interface. Analysis of the inter-diffusion layer by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (EDS) measurement confirmed its identity as Cr₂Zr.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 추계학술대회 논문집
• /
• pp.49-49
• /
• 2007

최근 반도체 소자의 고집적화와 나노 (nano) 크기의 회로 선폭으로 인해 기존에 사용되었던 텅스텐이나 알루미늄 금속배선보다, 낮은 전기저항과 높은 electro-migration resistance가 필요한 Cu 금속배선이 주목받게 되었다. 하지만, Cu CMP 공정 시 높은 압력으로 인하여 low-k 유전체막의 손상과 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 본 논문에서는, $KNO_3$ 전해액의 농도가 Cu 표면에 미치는 영향을 알아보기 위해 Tafel Curve와 CV (cyclic voltammograms)법을 사용하여 전기화학적 특징을 알아보았고 scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), X-ray Diffraction (XRD) 분석을 통해 금속표면을 비교 분석하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
• /
• pp.81-81
• /
• 2007

Chemical mechanical polishing (CMP) 공정은 deep 서브마이크론 집적회로의 다층배선구조률 실현하기 위해 inter-metal dielectric (IMD), inter-layer dielectric layers (ILD), pre-metal dielectric (PMD) 층과 같은 절연막 외에도 W, Al, Cu와 같은 금속층을 평탄화 하는데 효과적으로 사용되고 있으며, 다양한 소자 제작 및 새로운 물질 등에도 광범위하게 응용되고 있다. 하지만 Cu damascene 구조 제작으로 인한 CMP 응용 과정에서, 기계적으로 깨지기 쉬운 65 nm의 소자 이하의 구조에서 새로운 저유전상수인 low-k 물질의 도입으로 인해 낮은 하력의 기계적 연마가 필요하게 되었다. 본 논문에서는 전기화학적 기계적 연마 적용을 위해, I-V 특성 곡선을 이용하여 active, passive, transient, trans-passive 영역의 전기화학적 특성을 알아보았으며, Cu 막의 표면 형상을 알아보기 위해 scanning electron microscopy (SEM) 측정과 energy dispersive spectroscopy (EDS) 분석을 통해 금속 화학적 조성을 조사하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 추계학술대회 논문집
• /
• pp.221-223
• /
• 1999

In this work, samples were manufactured variously by changing conventional calcining and sintering conditions and we tried the utilization by making the heat treatment time, which is demanded to high-Tc phase formation, much shorter. We found out optimal heat treatment conditions with the analysis on formation process at superconducting phase in term of the change of calcining and sintering time and then, examined X-ray diffraction(XRD) patterns, scanning electron microscope(SEM) measurement and energy dispersive X-ray spectrometer(EDX) of the samples manufactured under heat treatment conditions which we suggest here. As a result, 2223 high-$T_c$, phase of (Bi,Pb)SrCaCuO superconductor starting with ($Bi_l$ xPbx,)$_2$$Sr_2$$Ca_2$$Cu_3$$O_y$, composition was formed from 1 hr sintering sample at temperature nearby melting point and also the completed sample with calcining and sintering time of 9 hr was formed high-$T_c$.low-$T_c$ phase appearing in sight above the critical temperature of liquid $N_2$.

• 한국정밀공학회지
• /
• 제28권12호
• /
• pp.1419-1424
• /
• 2011

Nanoimprint lithography is a next generation lithography technology, which enables to fabricate nano to micron-scale patterns through simple and low cost process. Nanoimprint lithography has been applied in various industry fields such as light emitting diodes, solar cells and display. Functional patterns, including anti-reflection moth-eye pattern, photonic crystal pattern, fabricated by nanoimprint lithography are used to improve overall efficiency of devices in that fields. For these reasons, in this study, sub-micron-scaled functional patterns were directly fabricated on Si and glass substrates by thermal imprinting process using ZnO nano-particles dispersion resin. Through the thermal imprinting process, arrays of sub-micron-scaled pillar and hole patterns were successfully fabricated on the Si and glass substrates. And then, the topography, components and optical property of the imprinted ZnO nano-particles/resin patterns are characterized by Scanning Electron Microscope, Energy-dispersive X-ray spectroscopy and UV-vis spectrometer, respectively.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2004년도 추계학술대회논문집
• /
• pp.327-332
• /
• 2004

Leak noise is a good source to identify the exact location of a leak point of underground water pipelines. Water leak generates broadband noise from a leak location and can be propagated to both directions of water pipes. This sound propagation due to leak in water pipelines is not a non-dispersive wave any more because of the surrounding pipes and soil. However, the necessity of long-range detection of this leak location makes to identify low-frequency acoustic waves rather than high frequency ones. Acoustic wave propagation coupled with surrounding boundaries including cast iron pipes is theoretically analyzed and the wave velocity was confirmed with experiment. The leak locations were identified both by the acoustic emission (AE) method and the cross-correlation method. In a short-range distance, both the AE method and cross-correlation method are effective to detect leak position. However, the detection for a long-range distance required a lower frequency range accelerometers only because higher frequency waves were attenuated very quickly with the increase of propagation paths. Two algorithms for the cross-correlation function were suggested, and a long-range detection has been achieved at real underground water pipelines longer than loom.

• Journal of Electrochemical Science and Technology
• /
• 제10권2호
• /
• pp.159-169
• /
• 2019

The activated carbon materials were prepared from waste biomass by ultrasonic assisted chemical activation method (UCA), ultrasonic assisted physical activation method (UPA) and Manganese nitrogen doped carbon (Mn/N-C). The XRD result shows the turbostatic (fully disordered) structure. The cyclic voltammetry test was done at 50 mV/s using 1M sodium sulfate and the values of specific capacitance were found to be 93, 100 and 115 F/g for UCA, UPA and Mn/N-C respectively. The power density values for the samples UCA, UPA and Mn/N-C were found to be 46.04, 87.97 and 131.42 W/kg respectively. The electrochemical impedance spectroscopy was done at low frequency between 1 to 10 kHz. The Nyquist plot gives the resistant characteristics of the materials due to diffusional resistance at the electrode-electrolyte interface. The Energy Dispersive X-Ray Spectroscopyanalysis (EDAX) analysis showed that the percentage doping of nitrogen and manganese were 3.53 wt% and 9.44 wt% respectively. It is observed from the experiment Mn/N-C doped carbon show good physical and electrochemical properties.

• Tribology and Lubricants
• /
• 제37권5호
• /
• pp.179-188
• /
• 2021

Reputed for their low friction coefficient and wear protection effect, diamond-like carbon (DLC) materials are considered amongst the most important lubricant coatings for tribological applications. In this framework, this investigation aims to elucidate the effect of a few operating parameters, such as applied stress and sliding amplitude on the friction lifetime of DLC coatings. Fretting wear tests are conducted using a 12.7 mm radius counterpart of 52100 steel balls slid against a substrate of the same material coated with a 2 ㎛ thickness DLC. Approximately, 5 to 57 N force is applied, generating a maximum Hertzian contact pressure of 430 to 662 MPa, corresponding to the applied force. The coefficient of friction (CoF) generates three regimes, first a running-in period regime, followed by a steady-state evolution regime, and finally a progressive increase of the CoF reaching the steel CoF value, as an indicator of reaching the substrate. To track the wear scenario, interrupted tests are performed with analysis combining scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX), 3D profilometer and micro-Raman spectroscopy. The results show two endurance values: one characterizing the coating failure (Nc₁), and the other (Nc₂) indicating the friction failure which is situated where the CoF reaches a threshold value of μ_th = 0.3 in the third regime. The Archard energy density factor is used to determine the two endurance values (Nc₁, Nc₂). Based on this approach, a master curve is established delimitating both the coating and the friction endurances.

• 대한금속재료학회지
• /
• 제46권2호
• /
• pp.105-110
• /
• 2008

Process of the hydroxyapatite (HA) formation on bioactive titanium metal prepared by NaOH treatment in a modified-simulated body fluid (mSBF) containing bovine serum albumin (BSA) was investigated by high resolution transmission electron microscope attached with energy dispersive X-ray spectrometer (EDX). The amorphous titanate, which was formed on titanium surface by NaOH treatment, combined with the calcium ions in the liquid to form an amorphous calcium titanite. With increasing of soaking time in the liquid, an amorphous calcium titanite combined with the phosphate ions to form an amorphous calcium phosphate with low Ca/P atomic ratio, and it grows as aggregates of plate (or needle)-like substance on titanium surface. The crystalline apatite layers, which are needle-shaped with the c axis parallel to the long axis, are formed in an amorphous calcium phosphate with further increase in soaking time. The formation of needle-shaped apatite layers can be explained by electrostatic effects and difference of concentration between calcium, phosphate, and albumin ions.

• 한국환경과학회지
• /
• 제29권12호
• /
• pp.1171-1184
• /
• 2020

The green synthesis of inorganic nanoparticles (NPs) using biomaterials has garnered considerable attention in recent years because of its eco-friendly, non-toxic, simple, and low-cost nature. In this study, we synthesized NPs of noble metals, such as Ag and Au using an aqueous extract of a marine seaweed, Ecklonia cava. The formation of AgNPs and AuNPs was confirmed by the presence of surface plasmon resonance peaks in UV-Vis absorption spectra at approximately 430 and 530 nm, respectively. Various properties of the NPs were evaluated using characterization techniques, such as dynamic light scattering, transmission electron microscopy, energy-dispersive X-ray spectroscopy, Fourier transform infrared spectroscopy, and X-ray diffraction analysis. Phytochemicals in the seaweed extract, such as phlorotannins, acted as both reducing and stabilizing agents for the growth of the NPs. The green-synthesized AgNPs and AuNPs were found to exhibit high catalytic activity for the decomposition of organic dyes, including azo dyes, methylene blue, rhodamine B, and methyl orange.