• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.783-784
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• 2009

• Proceedings of the KIEE Conference
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• 2000.11b
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• pp.274-276
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• 2000

Recently, the demands of the ultra-precision stage system, such as wafer stepper stages for photolithography, are increasing in the field of manufacturing and test equipment. Since the mechanical elements which convert rotational motion into translational introduce backlash and elasticity in the system, better performance of the drive could be achieved by the linear BLDC motor with appropriate servo control. The analytical design and the FEM analysis about linear BLDC motor is described in this paper. The performance of the servo-drive system will be evaluated through the comparison of results between the designed data and the measured data in the future.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.2
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• pp.18-24
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• 2006

This paper proposes a LuGre Model-Based Neural Network (MBNN) friction compensation algorithm for a linear motor stage. For matching the friction phenomena in both the motion-start region and the motion-reverse region, the LuGre dynamic model is employed into the proposed compensation algorithm. After training of the model-based neural network is completed, the estimated friction for compensation is obtained. From the obtained result we find that the new structure gains advantage over the non-friction compensation system on the performance of the compensator in both regions. The proposed compensator is evaluated and compared experimentally with an uncompensated system on a microcomputer controlled linear motor tracking system in the final section of the paper. The experimental results show the improvement on the maximum velocity error and the root mean square tracking error in the motion-start region ranges from 34% to 53% and from 53% to 75% respectively, and in the motion-reverse region from 48% to 65% and from 79% to 90% respectively.

• Proceedings of the KIEE Conference
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• 2000.11b
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• pp.229-231
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• 2000

Precision control technologies are required for Lithography devices. The Linear BLDC Motor is used for operations of the stage. The stage is installed in Lithography devices. The stage is basically controlled though three directions (x, y, z axes). This paper presents precision control technologies of the Linear BLDC Motor (only one axes) by using computer simulations. We will plan that real systems is made and tested.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.7
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• pp.675-682
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• 2009

Instead of direct driving like BLDC, the induction principle is adopted as a driving one for planar stage. The stage composed of four linear induction motors put in square type is activated by two-axial forces; low-frequency attractive force and thrust force of the linear induction motors. Here, the modified vector control whose new inputs are q-axis current and dc current biased to three phase current instead of d-axis current or flux current is applied extensively to overall motion of the stage. For the developed system, the precision step test and the constant velocity test are tried to guarantee its feasibility for TFT-LCD pattern inspection. However, to exclude a discontinuity due to phase shift and minimize a force ripple synchronized with the command frequency, the initial system is revised to the antagonistic structure over the full degree of freedom. Concretely describing, the porous air bearings guide an air-gapping of the stage up and down and a pair of liner induction motors instead of single motor are activated in the opposite direction each other. The performances of the above systems are compared from trapezoid tracking test and sinusoidal test.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.10
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• pp.115-121
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• 2008

This paper presents bisymmetric dual iron core lineal motor stage for heavy-duty high precision applications such as large area micro-grooving machines or high precision roll die machines. In this stage, two iron core linear motors are installed in laterally symmetric way to cancel out the attractive forces. Main focus was given to analyzing the effect of cogging force and moment for two different layouts, which are symmetric and half-pitch shifted ones. Experimental results showed that the symmetric layout is more adequate for high precision applications because of its clear moment cancellation effect. It was also verified that the effect of the residual cogging moment can be suppressed further by increasing the bearing stiffness. One problem of the symmetric layout is added cogging force which hinders smooth motion, but its effect was relatively small compared with that of moment cancellation.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.5
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• pp.716-723
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• 2002

Heat transfer in linear motor driven stages for surface mounting device applications was investigated. A simple one-dimensional thermal resistance model (TRM) was introduced. In order to reduce three-dimensional nature to one-dimensional, a few assumptions and simplifications were employed suitably. A good agreement with a finite element heat transfer analysis in temperature profile was obtained. For validation, the analysis was compared with the measurement with respect to motor driving power. Overall discrepancy was less than 7$^{\circ}C$. The influence of two high thermal resistance parts, insulation sheet and thermal contact between the coil assembly and the mounting plate, was examined through the analysis. Additionally, the thermal resistance analysis was applied to another stage including an internal cooling-air passage, and was found available for this system as well. After validation, the cooling effect was surveyed in terms of motor power, and cooling-air and -water flow rate.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.96-101
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• 2001

Heat transfer in linear motor driven stages for surface mounting device applications was investigated. A simple one-dimensional thermal resistance model was introduced. In order to reduce three-dimensional nature to one-dimensional, a few assumptions and simplifications were employed suitably. A good agreement with a finite element heat transfer analysis in temperature profile was obtained. For validation, the analysis was compared with the measurement with respect to motor driving power. Overall discrepancy was less than $7^{\circ}C$. The influence of two high thermal resistance parts, insulation sheet and thermal contact between the coil assembly and the mounting plate, was examined through the analysis. Additionally, the thermal resistance analysis was applied to another stage including an internal cooling-air passage, and was found available for this system as well. After validation, the cooling effect was surveyed in terms of motor power, and cooling-air flow rate.