Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.11b
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- Pages.229-231
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- 2000
Developments of Precision Control Technologies of Stage for Semiconductor Fabrication Devices
반도체 제조 장비용 Stage 정밀제어 기술개발
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Jeon, J.W.
(Mechatronics Research Group of KERI)
;
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Kang, D.H.
(Mechatronics Research Group of KERI)
;
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Kim, J.W.
(Facts & PQ Research Group of KERI)
;
- Jeon, J.H. (Facts & PQ Research Group of KERI) ;
- Jeon, Y.W. (Facts & PQ Research Group of KERI)
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전정우
(한국전기연구소 Mechatronics연구그룹)
;
-
강도현
(한국전기연구소 Mechatronics연구그룹)
;
-
김지원
(한국전기연구소 Facts & PQ 연구그룹)
;
- 전진흥 (한국전기연구소 Facts & PQ 연구그룹) ;
- 전영환 (한국전기연구소 Facts & PQ 연구그룹)
- Published : 2000.11.25
Abstract
Precision control technologies are required for Lithography devices. The Linear BLDC Motor is used for operations of the stage. The stage is installed in Lithography devices. The stage is basically controlled though three directions (x, y, z axes). This paper presents precision control technologies of the Linear BLDC Motor (only one axes) by using computer simulations. We will plan that real systems is made and tested.
Keywords