1 |
Tomita, Y., Sato, F., Ito, K. and Koyanagawa, Y., 'Decoupling Method of Ultraprecision Stage Using Parallel Linkage Mechanism,' Int. J. JSPE, Vol. 26, No. 1, pp. 47-53, 1992
|
2 |
Fukada, S., 'Present and Future Technology of Ultraprecision Positioning,' Fuji Techno System, pp. 658-663, 2000
|
3 |
Fukada, S. and Shibuya, T., 'Ultra-precise Positioning with Nanometric Resolution Over A One-Millimeter Stroke Using Flexure Guide And Electromagnetic Linear Motor,' Proc. of 3rd euspen Int. Conf., Vol. 1, pp. 171-174, 2002
|
4 |
Smith, S. T. and Chetwynd, D. G., 'Foundation of Ultraprecision Mechanism Design,' Gordon and Breach Science Publishers, 1994
|
5 |
Slocum, A. H., 'Precision Machine Design,' SME, 1992
|
6 |
Smith, S. T. and Seugling, R. M., 'Sensor and Actuator Consideration for Precision, Small Machines,' Precision Engineering, Vol. 30, No. 3, pp. 245-264, 2006
DOI
ScienceOn
|
7 |
Tomita, Y., Koyanagawa, Y. and Satoh, F., 'A Surface Motor-driven Precise Positioning System,' Precision Engineering, Vol. 16, No. 3, pp. 184-191, 1994
DOI
ScienceOn
|