• 한국정밀공학회지
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• 제23권1호
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 26-27 Oct. 1990
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• 한국정밀공학회지
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.596-599
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• 2004

The media transport systems, such as printers, copiers, facsimile, ATMs, cameras, etc., have been widely used and being developed rapidly. In the development of those systems, the media feeding mechanism is an important key technology for the design and development of the media transport systems. In this paper, a multi-degree of freedom sheet model with dynamic contact conditions is presented to understand the mechanism of sticking and jamming. A sheet is modelled as a cantilever beam and the feeding velocity is assumed to be constant. The relation between the feeding velocity and the coefficient of friction for guaranteeing stable feeding is presented. Simulations are performed for a horizontal linear guide and a oblique linear guide, calculating the contact force and contact states of mass points.

• 한국생산제조학회지
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• 제22권6호
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• pp.996-1002
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• 2013

This study addresses the development of a full duplex robotic system for transferring flat-panel display glass. We propose to accomplish this using a bidirectional linear transfer mechanism in place of the conventional rotary transfer mechanism. The developed full duplex robot comprises a driving part that carries the glass panel laterally, vertical part that can be moved up and down by means of a ball screw and linear motion guide arrangement, and hand part that slides by the cylinder of the driving part along the guide rail with a V-guide bearing attached to the bottom of the support. In addition, an alignment part prevents the hand part from derailing and holds the hand part while the driving part moves horizontally. The full duplex robot lifts and drives a glass panel directly while transferring it to the buffer and does not require rotational motion. Therefore, both transferring and stacking are realized with a single device. This device can be used in existing industrial facilities as an alternative to existing industrial robots in current as well as future process lines. The proposed full duplex robot is expected to save considerable amounts of time and space, and increase product throughput.

• Structural Engineering and Mechanics
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• 제25권1호
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• pp.1-20
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• 2007

Dynamic behaviors of the contact surface between ball and raceway in a guideway mechanism vary with the applied loads and hence affect the mechanical responses of machine tools. The study aims to investigate the nonlinear characteristics of dynamic behaviors at the rolling contact interface in linear guideway mechanisms. Firstly, analytical method was introduced to understand the contact behaviors based on Hertz contact theory in a point-to-point way. Then, the finite element approach with a three-dimensional surface-to-surface contact model and appropriate contact stiffness was developed to study the dynamic characteristics of such linear guideways. Finally, experiments with modal test were conducted to verify the significance of both the analytical and the numerical results. Results told that the finite element approach may provide significant predictions. The study results also concluded that the current nonlinear models based on Hertz's contact theory may accurately describe the contact characteristic of a linear guideway mechanism. In the modal analysis, it was told that the natural frequencies vary a little with different loading conditions; however, the mode shapes are changed obviously with the magnitude of applied loads. Therefore, the stiffness of contact interface needs to be properly adjusted during simulation which may affect the dynamic characteristics of the machine tools.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(5)
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• pp.119-122
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• 2001

This paper deals with new type of active magnetic bearing (AMB) for the linear motors. We adopted optical sensing mechanism for the gap sensing. Using the laser and the PSD (Position Sensitive Device), the absolute rotor position is obtained independent of the profile of the guide rail. With this measurement, the rotor can be controller to follow the straight beam of the laser. Another advantage of optical sensing mechanism might be the elimination of the possible interference between the proximity sensor and the electro-magnet. By adopting the push-full actuating mechanism, the bearing stiffness is increased near the equilibrium position. For the simplicity, distributed control system is constructed. Eight independent PID control algorithm is used with the full order observer. Several simulation md test results are presented.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.794-798
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• 2002

This paper deals with a moving coil type linear motor for fast access of the miniature ODD. This slim-line motor is composed of the mover supported by guide mechanism, the coil wound into it, and the yoke attached to the permanent magnet for stator. The driving force is generated by the PM of the stator and the current in the coils of the mover. Magnetic circuit analysis and Finite Element Method are applied to estimate the thrust force at air gap. In order to compare the force characteristics between two methods, various experiment results are applied to verify on a prototype. Also the flexible modes of the motor are predicted through the FEM and the structural components are modified to locate this on high frequency region.