제어로봇시스템학회:학술대회논문집
- 1990.10b
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- Pages.1312-1315
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- 1990
Nanometer positioning control using nonlinear dynamics of rolling guide
- Futami, Shigeru (Yoshida Nano-Mechanism Project, ERATO, JRDC) ;
- Furutani, Akihiro (Yoshida Nano-Mechanism Project, ERATO, JRDC)
- Published : 1990.10.01
Abstract
Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.
Keywords