• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• Transactions of Materials Processing
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• v.24 no.3
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• pp.155-160
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• 2015

One of the most important aspects in multi-stage shape drawing is the proper design of the intermediate dies especially to provide adequate metal distribution. In the current study, a method for designing the intermediate dies has been developed to manufacture hollow linear motion guide rails by multi-stage shape drawing. The design method is based on the modified virtual die method. The effectiveness of the proposed design method was verified by FE-simulations and experiments using Mn55Cr carbon steel. From the results of the FE-simulations and the experiments, the proposed design method led to a drawn product with a sound shape. The dimensional tolerances of the product were within the allowable specified tolerances.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.1
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• pp.10-14
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• 2013

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decision. Though ball-screw driven linear stages equipped linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decision if they have not equipped the accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a magnetic sensor as a home switch of ball-screw driven linear stage by using capacitance probe.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.798-800
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• 2001

Precision control technologies are required for photolithography. The linear BLDC motor is used for the stage operations. The stage that is installed in a photolithography device is basically controlled in three directions(x, y, z axes). This paper presents precision control technologies of the linear BLDC motor in one direction by computer simulations. A position control system with linear BLDC motor is now being tested.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.4
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• pp.463-467
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• 2014

High precision machining technology has become one of the most important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though ball-screw driven linear stages equipped with linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a photo micro sensor as a home switch of a ball-screw driven linear stage by using a capacitance probe.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.845-851
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• 2013

In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.

• Journal of information and communication convergence engineering
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• v.10 no.2
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• pp.175-180
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• 2012

This paper presents a blind watermark detection scheme for an additive watermark embedding model. The proposed estimation-correlation-based watermark detector first estimates the embedded watermark by exploiting non-Gaussian of the real-world audio signal and the mutual independence between the host-signal and the embedded watermark and then a correlation-based detector is used to determine the presence or the absence of the watermark. For watermark estimation, blind source separation (BSS) based on independent component analysis (ICA) is used. Low watermark-to-signal ratio (WSR) is one of the limitations of blind detection with the additive embedding model. The proposed detector uses two-stage processing to improve the WSR at the blind detector; the first stage removes the audio spectrum from the watermarked audio signal using linear predictive (LP) filtering and the second stage uses the resulting residue from the LP filtering stage to estimate the embedded watermark using BSS based on ICA. Simulation results show that the proposed detector performs significantly better than existing estimation-correlationbased detection schemes.

• Journal of applied mathematics & informatics
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• v.28 no.5_6
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• pp.1489-1497
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• 2010

In this paper, we study convergence of both two-stage multisplitting method with preweighting and ILU-multisplitting method with preweighting for solving a linear system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.601-602
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• 2008