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http://dx.doi.org/10.7735/ksmte.2013.22.5.845

Robust Control of Two-axes Precise Stage Using LMI Optimization  

Kim, Yeung-Shik (Department of Mechatronics, Kumoh National Institute of Technology)
Park, Heung-Seok (Department of Mechatronics, Kumoh National Institute of Technology)
Kim, In-Soo (Department of Mechatronics, Kumoh National Institute of Technology)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.22, no.5, 2013 , pp. 845-851 More about this Journal
Abstract
In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.
Keywords
LMI; LQG/LTR; Robust control; Two-axes precise stage;
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Times Cited By KSCI : 1  (Citation Analysis)
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