• 설비공학논문집
• /
• 제16권5호
• /
• pp.475-481
• /
• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

• Journal of Mechanical Science and Technology
• /
• 제20권1호
• /
• pp.51-58
• /
• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2003년도 추계학술대회
• /
• pp.36-40
• /
• 2003

In order to discuss the availability of aerostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156N and a laser scale with the resolution of $0.01\mu\textrm{m}$ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway also has $0.21\mu\textrm{m}$ of positioning error and $0.09\mu\textrm{m}$ of repeatability, and it shows the stable response against the $0.01\mu\textrm{m}$ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the aerostatic guideway driven by the coreless linear motion is very useful for the ultra precision machine tools.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2001년도 춘계학술대회논문집
• /
• pp.289-294
• /
• 2001

Three kinds of viscoelastic damper model, which has a non-linear spring as an element is studied analytically and numerically. The behavior of the damper model shows non-linear hysteresis curves which is qualitatively similar to those of real viscoelastic materials. The motion is governed by a non-linear constitutive equation and an additional equation of motion. Harmonic balance method is applied to get analytic solutions of the system. The frequency-response curves show that multiple solutions co-exist and that the jump phenomena can occur. In addition, it is shown that separate solution branch exists and that it can merge with the primary response curve. Saddle-node bifurcation sets explain the occurrences of such non-linear phenomena.

• 한국소음진동공학회논문집
• /
• 제12권1호
• /
• pp.57-64
• /
• 2002

Three kinds of viscoelastic damper model, which has a non-linear spring as an element is studied analytically and numerically The behavior of the damper model shows non-linear hysteresis curves which is qualitatively similar to those of real viscoelastic materials. The motion is governed by a non-linear constitutive equation and an additional equation of motion. Harmonic balance method is applied to get analytical solutions of the system. The frequency-response curves sallow that multiple solutions co-exist and that the jump phenomena can occur. In addition, it is shown that separate solution branch exists and that it can merge with the primary response curve. Saddle-node bifurcation sets explain the occurrences of such non-linear Phenomena.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2004년도 추계학술대회 논문집
• /
• pp.326-333
• /
• 2004

This paper presents the structural characteristics analysis of a high-speed horizontal machining center with spindle speed of 50, 000rpm and feedrate of 120m/min. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motor and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guide. The structural analysis model of the high-speed horizontal machining center is constructed by the finite element method, and the validity of structural design is estimated based on the structural deformation of the high-speed horizontal machining center and spindle nose caused by the gravity and inertia forces.

• 한국정밀공학회지
• /
• 제31권5호
• /
• pp.423-430
• /
• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.1380-1383
• /
• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2003년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
• /
• pp.113-115
• /
• 2003

Recently, many linear motion generators and are rapidly finding applications that ranges from short stroke linear motion vibrators, such as dynamic cone type loud speakers tostirling engine driven linear reciprocatings, alternators, compressors, textile machines etc. In this paper the dynamic performance with load is computed by a general purpose method, which the equation of electromagnetic field, the equation of electric circuit and the equation of motion are coupled together. We fumed out the driving system and the dynamic characteristics of current, voltage and displacement is confirmed experiment.

• 한국정밀공학회지
• /
• 제22권6호
• /
• pp.76-82
• /
• 2005

In this paper, the pole placement controller based on the Robust Internal-loop Compensator (RIC) structure, which has inherent structural equivalence to disturbance observer, is proposed to control a linear positioning system. This controller has the advantage to easily select controller gains by using pole placement without loss of that of original RIC structure. The principal is to construct the pole placement controller for a nominal internal model instead of unknown real plant. Using linear motion experiment showed the effectiveness of the proposed controller.