• 제목/요약/키워드: Lift-off

검색결과 420건 처리시간 0.033초

SiO$_2$ 완충층이 ZnO 박막의 물성 및 IDT/ZnO/SiO$_2$/Si 다층막 구조 표면탄성파 소자의 특성에 미치는 영향 (Effects of SiO$_2$ Buffer Layer on Properties of ZnO thin films and Characteristics of SAW Devices with a Multilayered Configuration of IDT/ZnO/SiO$_2$/Si)

  • 이진복;이명호;박진석
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제51권9호
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    • pp.417-422
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    • 2002
  • ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.

RF 마그네트론 스퍼터링법으로 증착된 ZnO 박막 SAW 필터의 제작 (Fabrication of a SAW Filter Using a ZnO Thin Film deposited by RF Magnetron Sputtering)

  • 정은자;장철영;정영철;최현철;이용현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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    • pp.141-144
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    • 2003
  • This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.

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HDD 의 언로딩 성능 개선을 위한 디스크 범프의 설계 및 해석 (Design and Analysis of Disk Bump to Improve the Unloading Performance in HDD)

  • 이용은;이용현;이형준;박노철;박경수;박영필
    • 정보저장시스템학회논문집
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    • 제3권4호
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    • pp.183-190
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    • 2007
  • In most hard disk drives that apply the ramp load/unload technology, the head is unloaded at the outer edge of the disk while the disk is rotating. During the unloading process, slider-disk contacts may occur by lift-off force and rebound of the slider. The main issue of this paper is to prevent the slider-disk contact by rebound, and we apply a disk bump to the unloading process. To do so, first, the ranges of bump dimension are determined. Second, the stability of each bump is checked by dynamic simulation. Finally, unload simulations are performed for stable bump designs. As a result of these steps, the effect of the bump design and the position for the unloading performance were investigated. As a consequence, we propose the optimal bump design to improve the unloading performance. Furthermore, we can identify to remove rebound contact by applying a bump on disk during the unloading process.

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나로우주센터 초고화질(UHD) 고속 디지털카메라 시스템에 대한 구성방안 연구 (A Study On The Configuration Of UHD High Speed Digital Camera System In the Naro Space Center)

  • 박두진;노영환
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2017년도 추계학술대회
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    • pp.536-538
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    • 2017
  • 나로우주센터에서는 한국형우주발사체(KSLV-II)의 이륙순간 발사체 주요부분에 대한 초고화질(UHD) 고속영상 획득 및 영상분석을 위해서 발사대 주변과 발사대 타워에 초고화질 고속 디지털카메라 시스템을 설치할 계획이다. 본 논문에서 현재 나로우주센터에서 운용중인 고속 디지털카메라 시스템의 구성과 한국형우주발사체 발사임무 수행을 위한 초고화질(UHD) 고속 디지털카메라 시스템의 구성을 비교하여 기술하였다.

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나노 소자의 응용을 위한 표면 패터닝 기술을 이용한 평형한 나노구조물 형성 (Formation of parallel nanostructures by Surface-Patterning Technique for the Application to Nano-Device)

  • 김유덕;김형진;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.514-514
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    • 2007
  • 1차원 구조를 갖는 나노 와이어들은 나노 소자를 구현하기 위한 building-block으로 많은 과학자들의 주목을 받고 있고 또한 연구되고 있다. 하지만 그것을 정확하게 위치시키고 일정한 간격으로 정렬시키기 위한 기술 개발은 아직도 해결해야 할 큰 과제로 남아 있다. 이 논문에서, 우리는 ahsing 기술과 표면 패터닝 기술을 이용하여 대면적의 실리콘웨이퍼 위에 DNA(deoxyribonucleic acid)를 기반으로 한 금 나노 와이어를 정확하게 위치시키고 일정한 간격으로 정렬시킬 수 있는 새로운 제어 기술을 제안한다. 먼저 우리는 포토 리소그래피 공정과 $O_2$ 플라즈마 ashing 기술을 이용하여 선폭을 100 nm로 감소 시켰다. 그리고 자기조립단분자막 (self-assembled monolayers; SAMs) 방법과 lift-off 공정을 반복함으로서 1-octadecyltrichlorosilane(OTS) 층과 aminopropylethoxysilane(APS) 층을 형성하였다. 마지막으로 DNA 용액을 샘플 표면 위에 도포하고 분자 빗질 방법으로 DNA를 한 방향으로 정렬 시켰고 금 나노입자 용액을 처리하였다. 그 결과 금 나노 와이어는 $10{\mu}m$ 간격으로 일정하게 정열 되었고, APS 층에만 정확하게 정렬되었다. 우리는 금 나노 와이어를 관찰하기 위하여 원자간력 현미경 (Atomic Force Microscope AFM)을 사용하였다.

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단일 ZnO 나노선의 전극 형성 및 광전도 특성 연구 (Study for the fabrication of electrodes and photoconductive properties of a single ZnO nanowire)

  • 김기현;정동영;김경환;강정민;윤창준;민병돈;김상식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.33-34
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    • 2005
  • Electrodes were fabricated on a single ZnO nanowire by photolithography process, metal evaporation, and lift-off. The slow photoresponses of the ZnO nanowire under the continuous illumination of 325nm-wavelength light (corresponding to above-bandgap excitation) indicate that the traps related to oxygen vacancy disturb the flow of electron in ZnO nanowire. The photoresponse and PL spectra were measured, and observed that the excitonic band in the PL spectrum was absent in the photoresponse.

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프로세스 대형 모터-발전기의 저어널 베어링 설계 개선 - Part I : 베어링 성능해석 (Journal Bearing Design Retrofit for Process Large Motor-Generator - Part I : Bearing Performance Analysis)

  • 이안성
    • Tribology and Lubricants
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    • 제28권5호
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    • pp.197-202
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    • 2012
  • In this study, with the purpose of fundamentally improving the unbalance response vibration of a large PRT motor-generator rotor by design, a performance improvement design analysis is carried-out by retrofitting tilting pad bearings, replacing the plain partial journal bearings that were originally applied for operation at a rated speed of 1,800 rpm. In this process, a goal of the design analysis is to obtain a design solution for maximizing the direct stiffness of the bearings while satisfying the key basic lubrication performance requirements such as the minimum lift-off speed and maximum oil-film temperature. The results show that with a careful design application of tilting pad journal bearings for operation at such a relatively low speed of 1,800 rpm, direct stiffness increment of the bearings by about two times can be effectively achieved. Prevention of pad unloading is also considered in the analysis. Moreover, the designs of elliptical and offset half journal bearings are also analyzed and reviewed.

비접촉 초음파 방식의 철도레일 내부결함 검출에 관한 연구 (Research on the Non-Contact Detection of Internal Defects in a Rail Using Ultrasonic Waves)

  • 한순우;조승현;김준우;허태훈
    • 한국소음진동공학회논문집
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    • 제22권10호
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    • pp.1010-1019
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    • 2012
  • Non-contact detection of internal defects in a rail using ultrasonic waves is discussed in this paper. Cracks in a rail may be the cause of a serious railway accident such as derailment if left undetected. Concurrent rail inspection method based on ultrasonic testing using piezoelectric transducers has several limitations as it should keep physical contact with the rail. This work suggests a non-contact detection of internal defects in a rail using ElectroMagnetic Acoustic Transducers (EMAT) which can produce and measure ultrasonic waves in a rail without any couplant. The EMATs for rail inspection are designed and fabricated and their working performance is verified through a series of experiments on various types of internal defects in test rails. The effect of lift-off between the transducers and the rail on the generated signals is also discussed.

포토 리소그래피 공정을 이용한 DLC 마이크로 패턴 원통 금형 제작 (Fabrication of DLC Micro Pattern Roll Mold by Photolithography Process)

  • 하태규;김정완;이태동;윤수종;김태규
    • 열처리공학회지
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    • 제31권2호
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    • pp.63-67
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    • 2018
  • Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.

고성능 TFT 소자 응용을 위한 폴리스티렌 나노입자를 이용한 나노 그물망 제작공정 개발 (Formation of nanonet structure using polystyrene nanoparticle for high-performances TFT applications)

  • 윤길상;이준영;박익수;;백록현;신현진;이정수
    • 반도체디스플레이기술학회지
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    • 제17권3호
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    • pp.36-40
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    • 2018
  • We have developed a nonlithographic patterning technique using polystyrene nanoparticles to form nanonet channel structures which is promising for high-performance TFT applications. Nanoparticles assisted patterning (NAP) is a technique to form uniform nano-patterns by applying lift-off and dry etch process. Oxygen plasma treatment was used to control the diameters of nanonet hole size to realize a branch width down to 100 nm. NAP technology can be very promising to fabricate nanonet structure with advantages of lower manufacturing cost and large-area patterning capability.