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http://dx.doi.org/10.12656/jksht.2018.31.2.63

Fabrication of DLC Micro Pattern Roll Mold by Photolithography Process  

Ha, T.G. (Department of Nano Fusion Technology, Pusan National University)
Kim, J.W. (Department of Nano Fusion Technology, Pusan National University)
Lee, T.D. (Department of Nano Fusion Technology, Pusan National University)
Yoon, S.J. (Department of Nanomechatronics Engineering, Pusan National University)
Kim, T.G. (Department of Nanomechatronics Engineering, Pusan National University)
Publication Information
Journal of the Korean Society for Heat Treatment / v.31, no.2, 2018 , pp. 63-67 More about this Journal
Abstract
Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.
Keywords
DLC coating; CVD; Lithography; Micro pattern; Roll Mold;
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