Fabrication of DLC Micro Pattern Roll Mold by Photolithography Process |
Ha, T.G.
(Department of Nano Fusion Technology, Pusan National University)
Kim, J.W. (Department of Nano Fusion Technology, Pusan National University) Lee, T.D. (Department of Nano Fusion Technology, Pusan National University) Yoon, S.J. (Department of Nanomechatronics Engineering, Pusan National University) Kim, T.G. (Department of Nanomechatronics Engineering, Pusan National University) |
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