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Effects of SiO$_2$ Buffer Layer on Properties of ZnO thin films and Characteristics of SAW Devices with a Multilayered Configuration of IDT/ZnO/SiO$_2$/Si  

Lee, Jin-Bok (Dept. of Electrical Engineering, Hanyang University)
Lee, Myeong-Ho (Dept. of Electronic Electrical Control Instrumentation Engineering, Hanyang University)
Park, Jin-Seok (Dept. of Electronic Computer Engineering, Hanyang University)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.51, no.9, 2002 , pp. 417-422 More about this Journal
Abstract
ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.
Keywords
ZnO; SiO$_2$ Buffer; Si Orientation; Multi-Layered SAW Device; (002)-Orientation;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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1 이용의, 김형준, 양형국, 박순섭, 박종철, 김영진, 'ZnO 박막과 유전체 박막으로 구성된 이중구조의 물성 및 표면 탄성파', Korean J.Crst., Vol.6, No.2, pp.134-140, 1995   과학기술학회마을
2 H. Nakahata, A. Hachigo, K.Higaki, S.Fuhii, S.Shikata, and N.Fujimori, 'Theoretical study on SAW characteristics of layered structuresincluding a diamond layer', IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.42, No.2, pp.362-375, 1995   DOI   ScienceOn
3 T. Mitsuya, S. Ono, and K.Wasa, 'Structures and 표면탄성파 properties of rf-sputtered single-crystal films of ZnO on sapphire', J. Appl. Phys. Vol.51, pp. 2464-2470, 1980   DOI   ScienceOn
4 이진복, 이혜정, 서수형, 박진석, 'RF 마그네트론 스퍼터링에 의한 ZnO 박막의 증착 및 구리 도우핑 효과', Trans. KIEE, Vol. 49C, No.12, pp.654-664, 2000   과학기술학회마을
5 R. Rodriguez-Clemente, B. Aspar, N.Azema, B. Armas, C.Combescure, 'Morphological properties of chemical vapour deposited AlN films', Journal of Crystal Growth 133, pp.59-70, 1993   DOI   ScienceOn
6 Gregory J. Exarhos, Shiv K.Sharma, 'Influence of processing variables on the structural and properties of ZnO films', Thin Solid Films 270, pp.27-32, 1995   DOI   ScienceOn
7 H.M.Liaw, F.S.Hickernell, ' The characterization of sputtered polycrystalline aluminum nitride on silicon by surface acoustic wave measurements', IEEE Trans. on Ultrasonics, ferro-electrics, and frequency control, Vol.42, No.3, pp.404-409, 1995   DOI   ScienceOn
8 이용의, 양형국, 김영진, 한정인, 김형준, 'RF 마그네트론 스터터링에 의한 ZnO 박막 증착 및 표면탄성파 필터 특성 분석', 한국재료학회지, Vol.4, No.7, pp.783-791, 1994   과학기술학회마을
9 X.L.Xu, S.P.Lau, J.S.Chen, G.Y.Chen, B.K. Tay, 'Polycrystalline ZnO thin films on Si(100) deposited by filtered cathodic vacuum arc', Journal of Crystal Growth 223, pp.201-205, 2001   DOI   ScienceOn
10 C.K.Campbell, 'Surface acoustic wave devices for mobile and wireless communications', Academic Presss, 1998
11 M.S.Wu, W.C.Shih and W.H.Tsai, 'Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applications', J.Phys. D: Appl. Phys. 31, pp.943-950, 1998   DOI   ScienceOn
12 R. Nayak, V. Gupta, and K. Sreenivas, 'SAW and AO propagation characteristics of KNbO3/spinel thin film layered structure', Proceedings of IEEE Ultrasonics Symp., pp. 269-272, 2001   DOI
13 T. Shoji, K. Nakamura, and D. Yamazaki, 'Propagation characteristics of the SH-SAW on (110) ZnO/ (012) $LiTaO_3$', Proceedings of IEEE Ultrasonics Symp., pp. 215-219, 2001   DOI
14 H. M. Liaw and F. S. Hickernell, 'SAW characteristics of sputtered Aluminum Nitride on silicon and Gallium Arsenide', Proceedings of IEEE Ultrasonics Symp., pp. 375-379, 1994   DOI
15 J.Koike, H.Tanaka, H.Ieki,Jpn. 'Quasi-microwave band longitudinally coupled surface acoustic wave resonator filters using ZnO/sapphire substrate', Jpn. J. Appl. Phys., Vol. 34, pp. 2678-2682, 1995   DOI
16 S. J. Chang, Y. K. Su, and Y. P. Shei, High quality ZnO thin films on InP substrate prepared by radio frequency magnetron sputtering. Ⅱ. Surface acoustic wave device fabrication', J. Vac. Sci. Tech. A 13(2), pp. 385-388, 1995   DOI   ScienceOn