• Journal of Ocean Engineering and Technology
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• v.29 no.1
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• pp.94-99
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• 2015

Lead zirconate titanate (PZT) thick films with thicknesses of ㎛ were fabricated on silicon substrates using an aerosol deposition method. A PZT powder solution was prepared using a sol-gel process. The average diameters (d50) obtained were 1.67, 1.98, and 2.40μm when the pyrolysis temperatures were 300℃, 350℃, and 450℃ respectively. The as-deposited film had a uniform microstructure without any cracks or pores. The as-deposited films on silicon were annealed at a temperature of 700℃. The 20-㎛-thick PZT film showed good adherence between the PZT film and substrate, with no tearing observed in the conventional solid phase process. This was probably because the presence of pores produced from organic residue during annealing relieved the residual stresses in the deposited film.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.846-851
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• 2017

Piezoelectricity is the capability of a piezoelectric material to change mechanical energy into electrical energy. The determination of electrical and mechanical properties plays a significant role in characterizing the piezoelectric material. The energy losses characteristics of piezoelectric material can be described by mechanical quality factor. In this paper, the output voltage and mechanical quality factor of Lead Zirconate Titanate (PZT-4A) piezoelectric material is determined under various resistance and loading conditions by using the test setup. The commercial FEM software ABAQUS is used to analyze the performance of piezoelectric material under static loading conditions. It is observed that these properties affect the performance of a material particularly in the designing of smart structures. The experimental results are partially compared to the simulation values.

• Journal of the Korean Ceramic Society
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• v.40 no.4
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.5
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• Journal of Electrical Engineering and Technology
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• v.13 no.6
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• pp.2434-2440
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• 2018

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.395-399
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• 2007

Renewable energy sources such as wind energy is copiously available without any limitation. Wind turbines are used to tap the potential of wind energy which is available in millions of megawatt. Reliability of wind turbine is critical to extract this maximum amount of energy from the wind. We reviewed different techniques, methodologies, and algorithms developed to monitor the performance of wind turbine as well as for an early fault detection to keep away the wind turbines from catastrophic conditions due to sudden breakdowns. To keep the wind turbine in operation, implementation of Condition Monitoring System (CMS) is paramount, and for this purpose ample knowledge of these types of system is mandatory. So, an attempt has been made in this direction to review maximum approaches related to CMS in this piece of writing.

• Smart Structures and Systems
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• v.25 no.4
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• pp.423-432
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• 2020

In this paper, a novel but practical approach named series/parallel multi-sensing technique was proposed to evaluate the bolt looseness in a bolt group. The smart washers (SWs), which were fabricated by embedding a Lead Zirconate Titanate (PZT) transducer into two flat metal rings, were installed to the bolts group. By series connection of SWs, the impedance signals of different bolts can be obtained through only one sweep. Therefore, once the loosening occurred, the shift of different peak frequencies can be used to locate which bolt has loosened. The proposed multi input single output (MISO) damage detection scheme is very suitable for the structural health monitoring (SHM) of joint with a large number of bolts connection. Another notable contribution of this paper is the proposal of 3-dB bandwidth root mean square deviation (3 dB-RMSD) which can quantitatively evaluate the severity of bolt looseness. Compared with the traditional naked-eye observation method, the equivalent circuit based 3-dB bandwidth can accurately define the calculation range of RMSD. An experiment with three bolted connection specimens that installed the SWs was carried out to validate our proposed approach. Experimental result shows that the proposed 3 dB-RMSD based multi-sensing technique can not only identify the loosened bolt but also monitor the severity of bolt looseness.

• Smart Structures and Systems
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• v.6 no.4
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• pp.349-362
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• 2010

Ultrasonic Guided Waves (UGWs) are a useful tool in structural health monitoring (SHM) applications that can benefit from built-in transduction, moderately large inspection ranges and high sensitivity to small flaws. This paper describes a SHM method based on UGWs, discrete wavelet transform (DWT), and principal component analysis (PCA) able to detect and quantify the onset and propagation of fatigue cracks in structural waveguides. The method combines the advantages of guided wave signals processed through the DWT with the outcomes of selecting defect-sensitive features to perform a multivariate diagnosis of damage. This diagnosis is based on the PCA. The framework presented in this paper is applied to the detection of fatigue cracks in a steel beam. The probing hardware consists of a PXI platform that controls the generation and measurement of the ultrasonic signals by means of piezoelectric transducers made of Lead Zirconate Titanate. Although the approach is demonstrated in a beam test, it is argued that the proposed method is general and applicable to any structure that can sustain the propagation of UGWs.

• Transactions on Electrical and Electronic Materials
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• v.6 no.4
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• pp.177-185
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• 2005

Fatigue characteristics of lead zirconate titanate (PZT) films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) were investigated. The fatigue characteristics were investigated with respect to PZT film thickness, domain structure, fatigue pulse height, temperature, electrode materials and electrode configurations. The used top and bottom electrode materials were Pt and $RuO_2$. In the fatigue characteristics with fatigue pulse height and PZT film thickness, the fatigue rates are independent of the applied fatigue pulse height at the electric field regions to saturate the P-E hysteresis and polarization $(P^*,\;P^A)$ characteristics. The unipolar and bipolar fatigue characteristics of PZT capacitors with four different electrode configurations $(Pt//Pt,\;Pt//RuO_2,\;RuO_2//Pt,\;and\;RuO_2//RuO_2)$ were also investigated. The polarization-shifts during the unipolar fatigue and the temperature dependence of fatigue rate suggest that the migration of charged defects should not be expected in our CVD-PZT films. It seems that the polarization degradations are attributed to the formation of charged defects only at the Pt/PZT interface during the domain switching. The charged defects pin the domain wall at the vicinity of Pt/PZT interface. When the top and bottom electrode configurations are of asymmetric $(Pt//RuO_2,\;RuO_2//Pt)$, the internal fields can be generated by the difference of charged defect densities between top and bottom interfaces.

• Journal of Integrative Natural Science
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• v.8 no.4
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• pp.244-249
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• 2015

The PZT thin films were deposited on Si(100) substrate using RF magnetron sputtering method. And the PZT thin films were post annealed at various temperatures to form perovskite phase. To analyze PZT thin films, surface profiler, XRD, XPS, CA, and SFE were used. The thickness increased from 536.5 to 833.2 nm as post annealing temperature increased. The perovskite PZT was observed from PZT-823 and pyrochlore PZT, $ZrO_2$, $TiO_2$, and perovskite $PbZrO_3$ were observed. From the XPS, the atomic percentages of Pb, Zr, Ti, and O were calculated and the portion of Pb increased to PZT-823 and decreased to PZT-923 and then increased to PZT-1023. Also, the CA and SFE was effected on post annealing temperature and as a function of atomic percentage of Pb, the CA and SFE was transformed.