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http://dx.doi.org/10.5574/KSOE.2015.29.1.094

Fabrication of Piezoelectric PZT Thick Film by Sol-gel Process  

Park, Jong-whan (Department of Materials Science and Engineering, Pukyong National University)
Bang, Kook-soo (Department of Advanced Materials system Engineering, Pukyong National University)
Park, Chan (Department of Materials Science and Engineering, Pukyong National University)
Publication Information
Journal of Ocean Engineering and Technology / v.29, no.1, 2015 , pp. 94-99 More about this Journal
Abstract
Lead zirconate titanate (PZT) thick films with thicknesses of ㎛ were fabricated on silicon substrates using an aerosol deposition method. A PZT powder solution was prepared using a sol-gel process. The average diameters (d50) obtained were 1.67, 1.98, and 2.40μm when the pyrolysis temperatures were 300℃, 350℃, and 450℃ respectively. The as-deposited film had a uniform microstructure without any cracks or pores. The as-deposited films on silicon were annealed at a temperature of 700℃. The 20-㎛-thick PZT film showed good adherence between the PZT film and substrate, with no tearing observed in the conventional solid phase process. This was probably because the presence of pores produced from organic residue during annealing relieved the residual stresses in the deposited film.
Keywords
PZT powder; Sol-gel process; Aerosol deposition method; FE-SEM; Thick film; TEM;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 Akedo, J., Lebedev, M., 1999. Microstructure and Electrical Properties of Lead Zirconate Titanate Thick Films Deposited by Aerosol Deposition Method. Japanese Journal of Applied Physics, 38, 5397-5401.   DOI
2 Choi, J.J., Jang, J.H., Hahn, B.D., Park, D.S., Yoon, W.H., Ryu, J.H., Park, C., 2007. Preparation of Highly Dense PZN-PZT Thick Films by the Aerosol Deposition Method using Excess PbO Powder. Journal of American Ceramic Society, 90(11), 3389-3394.   DOI
3 Evans, A.G., Hutchinson, J.W., 1995. The Thermomechanical Integrity of Thin Films and Multilayers. Acta Metallurgica et Materialla, 43(7), 2507-2530.   DOI   ScienceOn
4 Haertling, G.H., 1999. Ferroeletric Ceramics: History and Technology. Journal of American Ceramic Society, 84(3), 797-818.
5 Hong, D.S., Kim, J.T., 2012. Temperature Effect on Impedence-based Damage of Steel-Bolt Connection using wireless Impedence Sensor Node. Journal of Ocean Engineering and Technology, 26(1), 27-33.   DOI
6 Khilkin, A.L., Yarmarkin, V.K., Wu, A., Avdeev, M., Vilarinbo, P.M., Baptista, J., 2001. PZT-based Piezoelectric Composites via Modified Sol-Gel Route. Journal of European Ceramic Society, 21(10), 1535-1538.   DOI
7 Kim, C.J., Yoon, D.S. Jiang, Z., No, K., 1997. Investigation of the Drying Temperature Dependence of the Orientation in Sol-Gel Processed PZT Thin Films. Journal of Materials Science, 32, 1213-1219.   DOI
8 Kim, K.H., Bang, K.S., Park, C., 2013. Fabrication of Piezoelectric PZT film by Aerosol Deposition Method. Journal of Ocean Engineering and Technology, 27(6), 95-99.   DOI
9 Malic, B., Cilensek, J., Mandeljc, M., Kosec, M., 2005. Crystallization Study of the Alkoxide-Based $Pb(Zr_{0.30}Ti_{0.70})O_3$ Thin-Film Precursor. Acta Chimica Slovenica, 52, 259-263.
10 Park, J.H., Lee, S.H., Kim, J.T., 2010. Development of Acceleration-PZT Impedence Hybrid Sensor Nodes Embedding Damage Identification Algorithm for PSC Girders. Journal of Ocean Engineering and Technology, 24(3), 1-10.
11 Park, Y., Lee, J.K., Chung, I., Lee, J.Y., 2001. Delamination Behavior of Pt in a $SiO_2/Pb(ZrxTi1-x)O_3/$ Pt Ferroelectric Thin-Film Capacitor. Journal of Applied Physics, 89(3), 2327-2331.   DOI   ScienceOn
12 Zhilun, G., Longtu, L., Suhua G., Xiaowen, Z., 1989. Low-Temperature Sintering of Lead-Based Piezoelectric Ceramics. Journal of American Ceramic Society, 72 (3), 486-491.   DOI
13 Schwartz, R.W., 1997. Chemical Solution Deposition of Perovskite Thin Films. Chemistry of Materials, 9, 2325-2340.   DOI   ScienceOn