• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.134-139
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• 2000

In order to understand the removal mechanism and seek the optimal conditions. KrF excimer laser ablation of Cr films on glass substrates is investigated. The surface morphology of the laser-irradiated spot is examined by SEM. The measured single-shot ablation rate is found to be about two times the result of numerical analysis based on a surface vaporization model and heat conduction theory. Surface morphology examination indicates that the Cr film is removed by the sequence of melting-surface vaporization-,melt expulsion by plasma recoil and that the outmost ripple of the diffraction pattern gives a strong effect on the morphology of molten Cr during the melting and vaporization processes. To seek the optimal process parameters for micro patterning morphological investigation is carried out experimentally on samples having different chromium film thicknesses. Optimal processing conditions are determined to enhance the accuracy and quality of thin film removal for micro patterning.

• Journal of Powder Materials
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• v.29 no.2
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• pp.99-109
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• 2022

Powder flowability is critical in additive manufacturing processes, especially for laser powder bed fusion. Many powder features, such as powder size distribution, particle shape, surface roughness, and chemical composition, simultaneously affect the flow properties of a powder; however, the individual effect of each factor on powder flowability has not been comprehensively evaluated. In this study, the impact of particle shape (sphericity) on the rheological properties of Ti-6Al-4V powder is quantified using an FT4 powder rheometer. Dynamic image analysis is conducted on plasma-atomized (PA) and gas-atomized (GA) powders to evaluate their particle sphericity. PA and GA powders exhibit negligible differences in compressibility and permeability tests, but GA powder shows more cohesive behavior, especially in a dynamic state, because lower particle sphericity facilitates interaction between particles during the powder flow. These results provide guidelines for the manufacturing of advanced metal powders with excellent powder flowability for laser powder bed fusion.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.456-456
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• 2009

Boron doping on an n-type Si wafer is requisite process for IBC (Interdigitated Back Contact) solar cells. Fiber laser annealing is one of boron doping methods. For the boron doping, uniformly coated or deposited film is highly required. Plasma enhanced chemical vapor deposition (PECVD) method provides a uniform dopant film or layer which can facilitate doping. Because amorphous silicon layer absorption range for the wavelength of fiber laser does not match well for the direct annealing. In this study, to enhance thermal affection on the existing p-a-Si:H layer, a ${\mu}c$-Si:H intrinsic layer was deposited on the p-a-Si:H layer additionally by PECVD. To improve heat transfer rate to the amorphous silicon layer, and as heating both sides and protecting boron eliminating from the amorphous silicon layer. For p-a-Si:H layer with the ratio of $SiH_4$ : $B_2H_6$ : $H_2$ = 30 : 30 : 120, at $200^{\circ}C$, 50 W, 0.2 Torr for 30 minutes, and for ${\mu}c$-Si:H intrinsic layer, $SiH_4$ : $H_2$ = 10 : 300, at $200^{\circ}C$, 30 W, 0.5 Torr for 60 minutes, 2 cm $\times$ 2 cm size wafers were used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 20 ~ 27 % of power, 150 ~ 160 kHz, 20 ~ 50 mm/s of marking speed, and $10\;{\sim}\;50 {\mu}m$ spacing with continuous wave mode of scanner lens showed the correlation between lifetime and sheet resistance as $100\;{\Omega}/sq$ and $11.8\;{\mu}s$ vs. $17\;{\Omega}/sq$ and $8.2\;{\mu}s$. Comparing to the singly deposited p-a-Si:H layer case, the additional ${\mu}c$-Si:H layer for doping resulted in no trade-offs, but showed slight improvement of both lifetime and sheet resistance, however sheet resistance might be confined by the additional intrinsic layer. This might come from the ineffective crystallization of amorphous silicon layer. For the additional layer case, lifetime and sheet resistance were measured as $84.8\;{\Omega}/sq$ and $11.09\;{\mu}s$ vs. $79.8\;{\Omega}/sq$ and $11.93\;{\mu}s$. The co-existence of $n^+$layeronthesamesurfaceandeliminating the laser damage should be taken into account for an IBC solar cell structure. Heavily doped uniform boron layer by fiber laser brings not only basic and essential conditions for the beginning step of IBC solar cell fabrication processes, but also the controllable doping concentration and depth that can be established according to the deposition conditions of layers.

• The Journal of the Acoustical Society of Korea
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• v.13 no.6
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• pp.45-49
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• 1994

In this paper, photoacoustic image processing system was constructed by using 2W CW $CO_{2}$ laser of $10.6{\mu}m$ wavelength and PZT 5A acoustic transducer. Stainless steel of 5mm thickness was used as a sample in experiment. Three line cracks of $50{\mu}m$ in each width and depth were made by using plasma on the surface of the sample. Also, each gap among their lines was $200{\mu}m$ and $300{\mu}m$ in width. In the scan range of $2.2mm\times2mm$ including surface defects, a good image of $50{\mu}m$ resolution had been shown when modulation frequency of CW laser was 100Hz.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2004.02a
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• pp.130-139
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• 2004

The cladding materials remaining after reprocessing process of the nuclear fuel, generally called as hulls, are classified as a high-level radioactive waste. They are usually packaged in the container for disposal after being compacted, melted, or solidified into the matrix. The efforts to fabricate a better ingot for a more favorable disposal to the environment have failed due to the technical difficulties encountered in the chemical decontamination method. In the early 1990s, the accumulation of radio-chemical data on hulls and the advent of new technology such as a laser or plasma have made the pre-treatment of the hulls more efficient. This paper summarizes the information regarding the radio-chemical analysis of the hull through a literature survey and determines the characteristics of the hull and depth profile of the radio-nuclides within the hull thickness. The feasibility study was carried out to evaluate the reduction of the radioactivity by peeling off the surface of the hull with the application of laser technology.

• 한국초전도학회:학술대회논문집
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• v.10
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• pp.179-183
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• 2000

For a ground plane in high-temperature superconducting ramp-edge junction devices, YBa$_2$Cu$_3$O$_{7-{\delta}}$/SrTiO$_3$/YBa$_2$Cu$_3$O$_{7-{\delta}}$ multilayer structures were fabricated using pulsed laser deposition and ECR ion milling. Various process parameters were adjusted to enhance the device characteristics. By etching the STO layer to form a tapered edge of about 15$^{\circ}$ and in-situ RF plasma treatment of bottom YBCO surface prior to deposition of top YBCO, the top-to-bottom YBCO showed T$_c$ of 75${\sim}$80 K and I$_c$ of about 40 mA through holes. It was found that the deposition of bottom YBCO at a reduced laser repetition rate of 1Hz increased the T$_c$ of top YBCO to 79.9 K. The resistivity of 570 layer was about 10$^6$ ${\Omega}$cm at 60 K, which ensures good electrical isolation between successive YBCO layers.

• Korea-Australia Rheology Journal
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• v.19 no.2
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• pp.61-66
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• 2007

The aggregation characteristics of red blood cells (RBCs) are known as important factors in the microvascular flow system, and increased RBC aggregation has been observed in various pathological diseases, such as thrombosis and myocardial infarction. This paper describes a simple microfluidic device for measuring the RBC aggregation by integrating a microfluidic slit rheometry and laser-backscattering technique. While a decreasing-pressure mechanism was applied to the microfluidic rheometry, a syllectogram (the light intensity versus time) showed an initial increase and a peak caused by the high shear stress-induced disaggregation, immediately followed by a decrease in the light intensity due to RBC aggregation. The critical shear stress (CST) corresponding to the peak intensity was examined as a new index of the RBC aggregation characteristics. The CST of RBCs increased with increasing aggregation-dominating protein (fibrinogen) in the blood plasma. The essential feature of this design was the combination of the rheometric-optic characterization of RBC aggregation with a microfluidic chip, which may potentially allow cell aggregation measurements to be easily carried out in a clinical setting.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.379-379
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• 2012

본 연구에서는 고품질의 ZnO 박막을 제작하기 위해 사파이어 기판 위에 ZnO 박막을 Pulsed Laser Deposition (PLD) 법으로 성장하였다. 레이저 에너지 밀도와 펄스주파수를 고정시켰으며, 성장온도와 산소 분압은 각각 $450{\sim}600^{\circ}C$ 및 5~20 sccm으로 변화를 주어 성장 온도와 산소 분압이 박막 특성에 미치는 영향을 분석하였다. 제작된 박막의 전기적 특성을 측정한 결과 성장온도의 증가에 따라 캐리어 농도는 $9.18{\times}10^{18}cm^{-3}$에서 $3.9{\times}10^{16}cm^{-3}$까지 감소하였고, 캐리어 이동도는 $0.95cm^2/Vs$에서 $8.47cm^2/Vs$ 까지 증가하는 경향을 나타내었으며, 산소분압의 변화에는 특정 임계조건을 갖는 것을 확인하였다. 이러한 이유는 PLD 법 성장 메커니즘에서 플라즈마 플럼(plasma flume) 내에 결합된 ZnO 분자가 기판으로 직접 성장이 이루어지는 과정에서 성장 온도가 증가함에 따라 플럼 내에서 결합 된 ZnO 분자의 열적 안정성이 향상되었으며, 유입되는 산소량의 감소로 인해 원자들의 표면 확산 거리 및 확산 시간이 길어져 보다 안정적인 박막 형성에 기인한 것으로 보인다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.2 s.257
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• pp.159-166
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• 2007

Mixing between two or more reagents is one of important processes in biochemical microfluidics. In efficient micromixer design, it is essential to analyze flow pattern and evaluate mixing efficiency with good precision. In this work, mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS) and those are bonded to glass plate through Plasma bonding. Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. For visualization of the flow pattern, dynamic image capturing is carried out using CAM scope. For the comparison with computer simulation, modified SIMPLE algorithm for incompressible flow equation is solved for the same geometry as in the experiment. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2052-2054
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• 2005

TFT-LCD requires to use poly silicon for High resolution and High integration. Thin film make of Poly silicon on the excimer laser-induced crystallization of PECVD(plasma-enhanced chemical vapor deposition)-grown amorphous silicon. In the thin film hydrogen affects to a device performance from bad elements like eruption, void and etc. So dehydrogenation prior to laser exposure was necessary. In this study, use RTP(Rapid Thermal Process) at various temperature from $670^{\circ}C$ to $750^{\circ}C$ and fabricate poly-silicon. it propose optimized RTP window to compare grain size to use poly silicon's SEM pictures and crystallization to analyze Raman curved lines.