• 제목/요약/키워드: Langmuir-Blodgett film(LB film)

검색결과 195건 처리시간 0.029초

감광성 polyimide LB막의 pattern형성에 관한 연구 (A study on patterning of photosensitive polyimide LB film)

  • 김현종;채규호;김태성
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제9권1호
    • /
    • pp.59-66
    • /
    • 1996
  • Polyimides containing cyclobutane ring in main chain is known to be thermally stable and able to be developed in organic solvents after photolysis with 254 nm UV light. This type of polyimides can be used as promising positive photoresist in VLSI fabrication process. In the current VLSI process, photoresist films are formed by spin coating. The film thickness is more than several hundred nano meters. It seems that there is room for improvement of film coating process by introducing Langmuir Blodgett technique. Thereby ultra thin film photoresist can be formed, and higher density of integration in VLSI be achieved. In the present work, depositing procedure of LB films of this polyimide was investigated. LB film thickness was measured by ellipsometry to evaluate deposited film status. Chemical imidization procedure was studied to avoid several problems in thermal imidization. The pattern of submicron dimension has successfully formed on LB film of 8nm thick, which found showing good contrast.

  • PDF

폴리이미드 전구체 초박막의 분자배향과 표면상태에 관한 연구 (A Study on the Molecular Orientation and the Surface Mophology of polyimide precursor ultrathin film)

  • 정순욱
    • 한국응용과학기술학회지
    • /
    • 제22권3호
    • /
    • pp.228-233
    • /
    • 2005
  • Langmuir-Blodgett(LB) technique can speak the best candidate of the future molecular electronic devices. But, precursor as molecular ultrathin film devices require the bulk property that are influenced by the molecular orientation. So, this device is one of current interest in molecular electronic device development of new materials. In this study, quantitative evaluation of molecular orientation in LB films of polyamic acid alkylamine salt was performed analysis experiment comparing the absorption or transmission intensity of the FT-IR spectrometer and reflection or absorption spectra with UV-visible absorption spectra. It could find that the polar angle(${\theta}$) of the dipole moment appears in about $68^{\circ}$ and the tilting angle of the alkyl chain is about $11.5^{\circ}$.

LB법을 이용한 viologen-diTCNQ 박막의 광학적 및 전기적 특성 (Optical and Electrical Characteristics of viologen-diTCNQ thin film prepared by Langmuir-Blodgett Technique)

  • 이용수;신동명;김태완;강도열
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
    • /
    • pp.45-48
    • /
    • 1997
  • Enhancing the electrical conductivity of the ultrathin organic films is one of the important factors for the development of molecular electronic devices. The Langmuir-Blodgett(LB) technique has recently been attracted interest as the a method of deposition ultrathin films. We have fabricated N-docosyl-N'-methyl viologen-diTCNQ(DMVT) anion radical LB film and investigated the optical and electrical conductivity. We have measured UV/visible and FT-lR spectrum. In ESR spectrum, we confirmed that a half-amplitude linewidth is clearly dependent on both temperature and incident angle, which indicates conducting species change. The in-plane electrical conductivity of 21 layers is approximately 1.37$\times$10$^{-6}$ (S/cm).

  • PDF

Octa(2-ethylhexyloxy)Copper-Phthalocyanine LB막의 $NO_2$ 가스 탐지 특성에 관한 연구 (A study on the $NO_2$ Gas Detection Characteristics of Octa(2-ethylhexyloxy)Copper-Phthalocyanine Langmuir-Blodgett films)

  • 임준석;김영관;김정수
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제10권5호
    • /
    • pp.419-424
    • /
    • 1997
  • It is well known that the metallo-phthalocyanines (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$ as well as are chemically and thermally stable. Therefore, lots of MPcs have been studied as the potential chemical sensor for NO$_2$gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, thin films of octa(2-ethylhexyloxy)copper-phthalocyanine were prepared by Langmuir-Blodgett method and characterized by using UV-VIS absorption spectroscopy and ellipsometry. Optimal transfer condition of LB films was investigated and preliminary results of current-voltage(I-V) characteristics of these films exposed to NO$_2$gas as a function of film thickness, temperature and concentration were discussed.

  • PDF

유기전하이동착체 랭뮤어-블로젯 초박막의 광전도 특성 (Photoelectric Properties of Organic Charge Transfer Complex Langmuir-Blodgett Ultra Thin Films)

  • 정순욱
    • 한국응용과학기술학회지
    • /
    • 제18권1호
    • /
    • pp.49-54
    • /
    • 2001
  • Ultra-thin films of organic charge transfer complex were prepared on a hydrophilic substrate by Langmuir-Blodgett(LB) technique. In this study, the photoelectric properties of a LB film consisting of (N-docosyl quinolinium)-TCNQ(1:2) complex was investigated. The visible light(${\lambda}$ : 700 nm) of xenon lamp was illuminated on the LB films and light absorptivity and photoconductivity were observed. The photocurrent increased linearly and was saturated at the light intensity of 23 ${\mu}W/cm^{2}$.

MEH-PPV 공액성 고분자 Langmuir-Blodgett막의 제작에 관한 연구 (Study on the Preparation of MEH-PPV Langmuir-Blodgett Film)

  • 이명호;김영관;손병청
    • 한국응용과학기술학회지
    • /
    • 제14권3호
    • /
    • pp.79-87
    • /
    • 1997
  • In this study, MEH-PPV was synthesized and MEH-PPV and its mixtures with PMMA were deposited on substrates with Langmuir-Blodgett(LB) technique and their photoluminescent char acteristics were investigated using UV-Vis absorption spectroscopy, and photoluminescence(PL) measurements. The surface morphology of the LB films of MEH-PPV and its mixture with PMMA were investigated using Atomic Force Microscopy(AFM). Electroluminescent devices using LB films were fabricated with Al and ITO as a top and bottom electrode, respectively, and their I-V characteristics were investigated.

Sphingomyelin과 Polyamic Acid의 농도 변화에 대한 단분자 LB막의 전기화학적 특성에 관한 연구 (A Study on the Electrochemical Properties of Langmuir-Blodgett Monolayer Film for the Changes of Concentration with Polyamic Acid and Sphingomyelin Mixture)

  • 박근호
    • 한국응용과학기술학회지
    • /
    • 제30권4호
    • /
    • pp.754-760
    • /
    • 2013
  • 순환전압전류법에 의한 인지질(sphingomyelin, SP)과 polyamic acid(PAA) 혼합물의 농도(몰비 1:1, 2:1 및 3:1)를 변화시켜 혼합단분자 LB막에 대한 전기화학적 특성을 조사하였다. SP과 PAA 혼합물의 단분자 LB막은 ITO glass에 LB법을 사용하여 제막하였다. 전기화학적 특성은 $KClO_4$ 용액에서 3 전극 시스템으로 측정하였다. 측정 범위는 연속적으로 1650 mV로 산화시키고, 초기 전위인 -1350 mV로 환원시켰다. 주사속도는 각각 50~250 mV/s로 설정하였다. 그 결과 SP와 PAA 혼합물의 LB막은 순환전압전류도표로부터 환원전류로 인한 비가역공정으로 나타났다. 혼합물 LB막의 혼합(SP:PAA) 몰비가 1:1, 2:1 및 3:1에서 확산계수(D)는 각각 $2.670{\times}10^{-5}$, $3.562{\times}10^{-5}$$1.005{\times}10^{-5}cm^2s^{-1}$을 얻었다.

인지질(Sphingomyelin)과 Polyamic Acid 혼합물의 단분자 LB막의 전기화학적 특성에 관한 연구 (A Study on the Electrochemical Properties of Langmuir-Blodgett Monolayer Film Mixed with Polyamic Acid and Sphingomyelin)

  • 박근호
    • 한국응용과학기술학회지
    • /
    • 제30권1호
    • /
    • pp.64-70
    • /
    • 2013
  • 우리는 순환전압전류법에 의한 인지질(sphingomyelin)과 polyamic acid 혼합물의 단분자 LB막에 대한 전기화학적 특성을 조사하였다. Sphingomyelin과 polyamic acid 혼합물의 단분자 LB막은 ITO glass에 LB법을 사용하여 제막하였다. 전기화학적 특성은 $KClO_4$ 용액에서 3 전극 시스템으로 측정하였다. 측정 범위는 연속적으로 1650 mV로 산화시키고, 초기 전위인 -1350 mV로 환원시켰다. 주사속도는 각각 50, 100, 150, 200 및 250 mV/s로 설정하였다. 그 결과 sphingomyelin과 polyamic acid 혼합물의 LB막은 순환전압전류도표로부터 환원전류로 인한 비가역공정으로 나타났다. Sphingomyelin과 polyamic acid 혼합물 LB막에서 전해질농도가 0.1N과 0.2N에서 확산계수(D)는 각각 $2.67cm^2s^{-1}{\times}10^5$$5.23cm^2s^{-1}{\times}10^6$을 얻었다.

Stearic Acid Langmuir-Blodgett (LB) 막의 ${\pi}-A$ 특성 (${\pi}-A$ Characteristics of Stearic Acid LB Films)

  • 이대일;최용성;장상목;권영수
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1991년도 하계학술대회 논문집
    • /
    • pp.241-243
    • /
    • 1991
  • The LB technique is one of the most, powerful fabricating methods of organic ultra thin film, which deposits a monolayer film in molecular level onto the surface of the substrate. In order to fabricate the LB film with optimal condition, we have to deposite monolayer film at optimum depositing pressure. which is dependent on the kind of deposit materials. ${\pi}-A$ curve is one of the most important, criteria to determine the optimum pressure. In this paper, we obtained that the optimum pressure is $20{\sim}50(mN/m)$ from ${\pi}-A$ curve of the stearic acid. In our experiments, it was known that LB ultra thin film is deposited beat at 30(mN/m) by checking the characteristics of LB film.

  • PDF

Mono- and Multi-layer Langmuir-Blodgett Films of Maleimide Polymers Possessing Nonlinear Optical-Active Side Chains

  • Yoon Kuk Ro;Lee Hoosung;Rhee Bum Ku;Jung Changsoo
    • Macromolecular Research
    • /
    • 제12권6호
    • /
    • pp.581-585
    • /
    • 2004
  • A copolymer P[OSA-MI] was synthesized by copolymerization of its corresponding monomers, N-phenyl maleimide (MI) and 2-octen-l-ylsuccinic anhydride (OSA). The polymer (poly[2-[1-(2,5-dioxo-l-phenylpyrroli­din-3-ylmethyl)heptyl]-succinic acid 4-(2-$\{$ethyl-[4-(4-nitrophen-ylazo)phenyl]amino$\}$ethyl)ester]) P[DR1MA-MI] was obtained from the reaction of P[OSA-MI] with 2-[4-(4-nitrophenylazo)-N-ethylphenylamino] ethanol (DR1). A stable monolayer of P[DRIMA-MI] was formed by spreading the solution of the polymer in chloroform. In Y-type Langmuir-Blodgett (LB) films prepared using this Langmuir-Blodgett method, the second harmonic waves generated from adjacent mono layers canceled each other out. In X-and Z-type LB films, the second harmonic intensity increased upon increasing the number of monolayers, but this increase was somewhat smaller than predicted by the square law. This phenomenon is due to defects or imperfect alignment of the dipoles in the LB film. The generation of second harmonic waves from Y-type LB films having an even number of mono layers supports this argument. The degree of imperfection seemed to increase as the number of layers increased. The second-order nonlinear optical properties of spin-cast films of these polymers were also measured. The largest second harmonic coefficient of the poled P[DRIMA-MI] film coated on a glass plate was 19 pm/V.