• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.438-438
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• 2012

은(Ag) 또는 금(Au) 입자를 촉매로 이용하여 습식식각을 통해 선택적으로 짧은 시간동안 단결정 실리콘 웨이퍼의 표면을 텍스쳐링하여 반사방지막 특성을 효과적으로 얻을 수 있다. 일반적으로 금속입자는 주로 금속 이온이 포함된 용액이나, 전기증착법을 통해서 실리콘 웨이퍼 표면에 형성시켰지만, 금속입자의 크기와 분포를 조절하기 어려웠다. 하지만, 최근 진공장비를 이용하여 열증발증착법(thermal evaporation)과 급속열처리법(rapid thermal annealing)을 통해서 금속입자를 대면적으로 크기와 분포를 균일하게 조절할 수 있다. 이러한 현상은 열적 비젖음(thermal dewetting) 현상에 의해 실리콘 표면위에 증착된 금속 박막으로부터 나노입자로 형성할 수 있다. 본 연구에서는 실리콘 (100)기판위에 다양한 크기의 은 또는 금 나노입자를 형성시켜 식각용액에 짧은 시간동안 담그어 식각하여, 텍스쳐링 효과와 반사방지(antireflection) 특성을 분석하였다. 실험을 위해 각각 은 또는 금 박막을 열증발증착법을 이용하여 ~3-8 nm의 두께로 형성시켰으며, 급속가열장치를 이용하여 $500^{\circ}C$에서 5분 동안 열처리하였다. 그리고 탈이온수(de-ionized water)에 불화수소와 과산화수소가 혼합된 식각용액에 1-5분 동안 습식식각을 하였다. 각각의 텍스쳐링 된 샘플의 식각의 상태와 깊이를 관찰하기 위해 field emission scanning electron microscopy (FE-SEM)을 이용하여 측정하였으며, UV-vis-NIR spectrophotometer를 이용하여 300 nm에서 1,200 nm의 반사특성을 분석하였다. 또한 RCWA (rigorous coupled wave analysis) 시뮬레이션을 이용하여 텍스쳐링 된 기하학적구조에 대하여 반사방지막 특성을 이론적으로 분석하였다.

• Korean Journal of Materials Research
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• v.12 no.4
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• pp.274-278
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• 2002

Discrete-variational(DV)-$X{\alpha}$ method was applied to investigate the electronic structures of spinel- type manganese oxide which is well known to the high performance adsorbent or cathode material for lithium ion. The results of DOS(density of states) and Mulliken population analysis showed that Li was nearly fully ionized and interactions between Mn and O were strong covalent bond. The effective charge of Li and Mn was +0.77 and +1.44 respectively and the overlap population between Mn and O was 0.252 in $LiMn_2O_4$. These results from DV-X$\alpha$ method were well coincided with the experimental result by XPS analysis and supported the feasibility of theoretical interpretation for the $LiMn_2O_4$ compound.

• Journal of the Korean Society of Safety
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• v.20 no.1 s.69
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• pp.94-100
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• 2005

The plasma, ionized gas state, is generally composed as the 4th state in the universe. Generating the plasma artificially has been studied by spending energy and it has been applied so much in human's life. There are several merits to modify the surface of polymer using plasma. Above all, plasma maintains the properties of polymer itself, but changes the properly of polymer surface only. Also, it is the environmentally fraternized because there are no waste processing from organic solvent. Furthermore, it is possible that continuous automated-processing in case of high-pressure plasma. Therefore, we have tried the reforming of surface to rise the adhesive strength between the material of polymer, and have experimented rising the adhesive strength through peel strength by virtue of processing time and using gas, of course, confirmed the change of polymer surface through measuring the contact angle analysis and scanning electron microscopy(SEM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05c
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• pp.201-203
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• 2001

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in Xenon gas calculated for range of E/N values from 0.01~500[Td] at the temperature is $300[^{\circ}K]$ and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. it has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with experimental data by L. S. Frost and A. V. Phelps for a range of E/N. The swarm parameter from the study are expected to server as a critical test of current theories of low energy scattering by atoms and molecules.

• The Korean Journal of Zoology
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• v.8 no.2
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• pp.28-32
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• 1965

It is well known that many kinds of chemical or metalic agent which were ionized or undissociated at toxified external medium and remarkable effect occurred to the fresh water fish. The effects of hydrogen ion concentration on serum protein of fresh water fish, (phycephalus argus CANTOR) had not been reported yet. In this point, authors attempted to study the changes of A/G ratio, total protein, hemoglobin, hematocrit, RBC , liver and kidney weight of snake head in the above environment. 95 snake heads were subjected to external medium with PH-4.5 and A/G ratio, hematocrit, hemoglobin, total protein, RBC, and liver & kidney weight were measured at 32.80, 15202000 and 272 hours respectively. In whole experimental period, L 1 and L2 globulin increased, on the other, albumin decreased as compare with control . Hence, the A/G ratio decreased remarkably . Though, total protein increased prominently through the whole experimental period, hematocrit, hemoglobin, RBC, increased only at 80 hours, and then decreased as compared to the control. Liver weight revealed distinctive increase at 80 hours, but no remarkable change could be seen there after. Hence, kidney weight revealed continuous rise. By these results, it may be said that as snake head were subjected to external medium with PH-4.5, this environmental factor influenced protein metabolism , blood component and organs.

• 연구논문집
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• s.33
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1463-1465
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• 1994

The electrical characteristics of $Al/Ta_2O_5/Si$ metal-oxide-semiconductor (MOS) capacitors were studied. $Ta_2O_5$ films on p-type silicon had been prepared by ionized cluster beam epitaxy technique (ICBE). This $Ta_2O_5$ films have low leakage current, high breakdown strength and low flat band shift. In this research, a single crystalline cpitaxial film of $Ta_2O_5$ has been grown on p-Si wafer using an ICBE technique. The native oxide layer ($SiO_2$) on the silicon substrate was removed below $500^{\circ}C$ by use of an accelerated arsenic ion beam, instead of a high temperature deposition. $Ta_2O_5$ films formed by ICBE technique can be received considerable attention for applications to coupling capacitors, gate dielectrics in MOS devices, and memory storage capacitor insulator because of their high dielectric constants above 20 and low temperature process.

• Journal of Powder Materials
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• v.23 no.6
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• pp.409-413
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• 2016

Electrical wire explosion in liquid media is a promising method for producing metallic nanopowders. It is possible to obtain high-purity metallic nanoparticles and uniform-sized nanopowder with excellent dispersion stability using this electrical wire explosion method. In this study, Ni-Fe alloy nanopowders with core-shell structures are fabricated via the electrical explosion of Ni-Fe alloy wires 0.1 mm in diameter and 20 mm in length in de-ionized water. The size and shape of the powders are investigated by field-emission scanning electron microscopy, transmission electron microscopy, and laser particle size analysis. Phase analysis and grain size determination are conducted by X-ray diffraction. The result indicate that a core-shell structured Ni-Fe nanopowder is synthesized with an average particle size of approximately 28 nm, and nanosized Ni core particles are encapsulated by an Fe nanolayer.

• The Korean Journal of Physiology
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• v.20 no.2
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• pp.199-208
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• 1986

The effects of $Mg^{++}$ upon the spontaneous contraction activated by 1 IU/l oxytocin were studied in the isolated rat uterine muscle. Longitudinal muscle strips u·ere prepared from the rat uteri at the estrous stage. All experiments were performed in tris-buffered Tyrode solution which was aerated with 100% $O_2$ and kept at $35^{\circ}C$. The results obtained were as follows: 1) In the uterine strips contracting spontaneously, as $Mg^{++}$ concentration increased in the Tyrode solution the amplitude of peak tension decreased in all the experimental solutions containing the various concentrations of $Ca^{++}\;(0.5{\sim}4 mM)$. And the amplitude of peak tension increased in inverse proportion to the $[Mg^{++}]/[Ca^{++}]\; ratio$. It is suggested that the tension-lowering effect of $Mg^{++}$ would be developed through decreasing intracellular ionized free calcium ion concentration by uncertain mechanism. 2) The frequency of the uterine contraction activated by oxytocin increased as the $[Mg^{++}]/[Ca^{++}]\;ratio$ ratio increased up to 1/2, but the frequency decreased above this ratio. It is speculated that $Mg^{++}$ would influence the excitability control action of $Ca^{++}$.

• Bulletin of the Korean Chemical Society
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• v.27 no.4
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• pp.539-544
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• 2006

Proton transfer reactions and ion-molecule reactions of bifunctional ethanes of $H_2NCH_2CH_2NH_2$, $H_2NCH_2CH_2OH$, and $HOCH_2CH_2OH$ were studied using Fourier transform mass spectrometry (FTMS). The rate constants for proton transfer reactions between the fragment ions and neutral molecules were obtained from the temporal variation of the ion abundances. The rate constants were consistent with the heats of reaction. The fastest proton transfer reactions were the reactions of $CH_2N^+$, $CHO^+$, and $CH_3O^+$ for $H_2NCH_2CH_2NH_2$, $H_2NCH_2CH_2OH$, and $HOCH_2CH_2OH$, respectively. The $[M+13]^+$ ion was formed by the ion-molecule reaction between $H_2C=NH_2 ^+$ or $H_2C=OH^+$ and the neutral molecule. The major product ions generated from the ion-molecule reactions between the protonated molecule and neutral molecule were $[2M+H]^+$, $[M+27]^+$, and $[M+15]^+$.