Development of Analysis Simulation Tool of High-Energy Ion Implantation Process for GSI MOS Transistor (GSI급 MOS Transistor 개발을 위한 HEI (High-Energy Ion Implantation) 공정 분석 시뮬레이터 개발)
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- Proceedings of the IEEK Conference
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- 1999.06a
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- pp.946-949
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- 1999