• Journal of the Korean Crystal Growth and Crystal Technology
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• v.15 no.6
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• pp.234-238
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• 2005

Effects of plasma composition, ion flux and ion energy on the etch rate, surface morphology and near surface stoichiometry of a single crystalline $La_3Ga_5SiO_{14}$ wafer have been examined in $Cl_2/Ar$ inductively coupled plasma (ICP) discharges. Maximum etch rate ${\sim}1600{\AA}/min$ was achieved either at relatively high source power $({\sim}1000W)$ or high $Cl_2$ content conditions in $Cl_2/Ar$ discharges. The etched surfaces showed similar or better RMS roughness values than those of the unetched control sample and the near surface stoichiometry was found not to be affected by ICP etching.

• Mass Spectrometry Letters
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• v.15 no.1
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• pp.54-61
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• 2024

An improved voltage modulation method (VMM) was used to control the heat release and adsorption properties of the adsorbent. In this work, the voltage and flux modulation methods were considered under unified experimental conditions of dissociative surface ionization (SI) of polyatomic organic molecules, the criteria were found when under VMM conditions the current relaxation of SI carries information about the kinetic properties of thermal desorption of ionizable dissociation particles arriving on the surface of polyatomic molecules. Conditions were found under which the relaxation of the ionic current in the flux modulation method is determined by the kinetics of the heterogeneous dissociation reaction of the original polyatomic molecules. The values of the thermal desorption rate constant K⁺ and the activation energy E⁺ obtained with VMM for desorption of (CH₃)₂NCH⁺₂ ions with m/z 58 by adsorption of imipramine and amitriptyline molecules agree well with each other and with the results for the desorption of the same ions by adsorption of other molecules. This confirms one of the basic conditions for the equilibrium process SI - the a degree (β coefficient) of the same particles SI on the same emitter surface is the same and does not depend on the way these particles are formed on the emitter surface.

• Journal of the Korean Vacuum Society
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• v.2 no.4
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• pp.501-506
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• 1993

The spatial potential distribution of electron cyclotron resonance plasma is measured as a function of tehsubstrate DC bias by Langmuir probe method. It is observed that the substrate DC bias changes the slope of the plasma potential near the subsrate, resulting in changes in flux and energy of the impinging ions across plasma $_strate boundary along themagnetric field. The effect of the substrate DC bias on the low-temperature silicon homoepitaxy (below $560^{\circ}C$) is examine dby in situ reflection high energy electron diffraction (RHEED), cross-section transmission electron microscopy (XTEM),plan-view TEM and high resolution transmision electron microscopy(HRTEM). While the polycrystalline silicon layers are grow withnegative substrate biases, the single crystaline silicon layers are grown with negative substrate biases, the singel crystalline silicon layers are grown with positive substrate biases. As the substrate bias changes form negative to positive values, the growth rate decreases. It is concluded that the control of the ion energy during plasma deposition is very important in silicon epitaxy at low temperatures below $560^{\circ}C$ by UHV-ECRCVD.VD.

• Membrane Journal
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• v.32 no.4
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• pp.209-217
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• 2022

Ion exchange membrane (IEM) is an important class of membrane applied in batteries, fuel cells, chloride-alkali processes, etc to separate various mono and multivalent ions. The membrane process is based on the electrically driven force, green separation method, which is an emerging area in desalination of seawater and water treatment. Electrodialysis (ED) is a technique in which cations and anions move selectively along the IEM. Anion exchange membrane (AEM) is one of the important components of the ED process which is critical to enhancing the process efficiency. The introduction of cross-linking in the IEM improves the ion-selective separation performance due to the reduction of free volume. During the desalination of seawater by reverse osmosis (RO) process, there is a lot of dissolved salt present in the concentrate of RO. So, the ED process consisting of a monovalent cation-selective membrane reduces fouling and improves membrane flux. This review is divided into three sections such as electrodialysis (ED), anion exchange membrane (AEM), and cation exchange membrane (CEM).

• Nuclear Engineering and Technology
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• v.55 no.3
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• pp.939-946
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• 2023

Comprehensive Research Facility for Fusion Technology (CRAFT) is an integration of different demonstrating or testing facilities, which aim to develop the critical technology or composition system towards the fusion reactor. Due to the importance and challenge of the negative ion based neutral beam injection (NNBI), a NNBI test facility is included in the framework of CRAFT. The initial object of CRAFT NNBI test facility is to obtain a H⁰ beam power of 2 MW at the energy of 200-400 keV for the pulse duration of 100 s. Inside the negative ion accelerator of NNBI system, the interactions of the negative ions with the background gas and electrodes can generate abundant stray electrons. The stray electrons can be further accelerated and dumped on the electrodes or eject from the accelerator. The stray electrons, including the ejecting electrons, cause the unwanted particle and heat flux onto the electrodes and the inner components of beamline (especially the temperature sensitive cryopump). The suppression of the stray electrons from the CRAFT accelerator is carried out via a series of design and simulation works. The paper focuses the influence of different magnetic field configurations on the stray electrons and the character of the ejecting electrons.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.56-60
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• 2006

We review our studies on the growth of microcrystalline silicon films by the standard PECVD technique. In situ spectroscopic ellipsometry studies allow the optimization of the complex film structure with respect to competing aspects of the growth process. Fine tuning the hydrogen flux, the ion energy, and the nature of the species contributing to deposition produces unique films with a fully crystallized interface with silicon nitride. These materials have been successfully incorporated in bottom gate TFTs which present mobility values in the range of 1 to 3 $cm^2/V.s$, and stable characteristics when submitted to a bias stress. The stability of these TFTs makes them suitable for driver applications in AMLCDs as well as pixel elements in OLED displays.

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.9-12
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• 2003

This paper describes a newly developed simulation environment for analysis and design of a plasma processing chamber based on first principles including complicated physical and chemical interactions of plasma, fluid dynamics of neutrals, and transport phenomena of particles. Capabilities of our simulator, named VIP-SEPCAD (Virtual Integrated Prototyping Simulation Environment for Plasma Chamber Analysis and Design), are demonstrated through a two dimensional simulation of an oxygen plasma chamber. VIP-SEPCAD can provide plasma properties such as spatiotemporal profiles of plasma density and potential, electron temperature, ion flux and energy, etc. By coupling neutral and particle transport models with a three moment plasma model, VIP-SEPCAD can also predict spatiotemporal profiles of chemically reactive species and particles exist in plasma.

• Bulletin of the Korean Chemical Society
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• v.20 no.8
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• pp.939-942
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• 1999

The tie lines delineating ion-exchange equilibria between NiFe2O4-NiCr2O4 spinel solid solution and Fe2O3-Cr2O3 corundum solid solution were determined at 900, 1000, and 1200 ℃ by electron microprobe and energy dispersive X-ray analysis of oxide phases, using the flux growth technique. Activities of the spinel components were calculated from the tie lines, assuming Temkin's ideal mixing in the corundum solid solution. The spinel phase could be expressed by a regular solution with negative deviations from ideality. The Gibbs free energies of mixing for spinel solid solution were discussed in terms of the cation distribution model, based on site preference energies and assuming random mixing on both tetrahedral and octahedral sites.

• Journal of radiological science and technology
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• v.44 no.4
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• pp.359-365
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• 2021

A heavy particle accelerator is a device that accelerates particles using high energy and is used in various fields such as medical and industrial fields as well as research. However, secondary neutrons and particle fragments are generated by the high-energy particle beam, and among them, the neutrons do not have an electric charge and directly interact with the nucleus to cause radiation of the material. Quantitative evaluation of the radioactive material produced in this way is necessary, but there are many difficulties in actual measurement during or after operation. Therefore, this study compared and evaluated the generated radioactive material in the concrete shield for protons and carbon ions of specific energy by using the simulation code FLUKA. For the evaluation of each energy of proton beam and carbon ion, the reliability of the source term was secured within 2% of the relative error with the data of the NASA Space Radiation Laboratory(NSRL), which is an internationally standardized data. In the evaluation, carbon ions exhibited higher neutron flux than protons. Afterwards, in the evaluation of radioactive materials under actual operating conditions for disposal, a large amount of short-lived beta-decay nuclides occurred immediately after the operation was terminated, and in the case of protons with a high beam speed, more radioactive products were generated than carbon ions. At this time, radionuclides of ⁴⁴Sc, ³H and ²²Na were observed at a high rate. In addition, as the cooling time elapsed, the ratio of long-lived nuclides increased. For nonparticulate radionuclides, ³H, ²²Na, and for particulate radionuclides, ⁴⁴Ti, ⁵⁵Fe, ⁶⁰Co, ¹⁵²Eu, and ¹⁵⁴Eu nuclides showed a high ratio. In this study, it is judged that it is possible to use the particle accelerator as basic data for facility maintenance, repair and dismantling through the prediction of radioactive materials in concrete according to the cooling time after operation and termination of operation.

• Nuclear Engineering and Technology
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• v.25 no.3
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• pp.361-370
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• 1993

Low power physics tests should be peformed for the domestic pressurized light water reactors (PWRs) after refueling. The tests are peformed to ensure that operating characteristics of the core are consistent with predictions and that the core can be operated as designed. But in some low power physics tests, slow but steady reactivity increasing phenomena were noticed after step reactivity insertion by the control rod movement. These reactivity increasing phenomena are due to the low flux level and the gamma background because an uncompensated ion chamber (UIC) is used as the ex-core neutron detector. The gamma background may affect the results or the lour power physics tests. The aims or this paper are to analyze the grounds of such phenomena, to simulate a reference bank worth measurement test and to present a resolution quantitatively. In this study, the gamma background level was estimated by numerically solving the point kinetics equations accounting the gamma background effect. The reactivity computer check test was simulated to verify the model. Also, an appropriate neutron flux level was determined by simulating the reference bank worth measurement test. The determined neutron flux level is approximately 0.3 of the nuclear heating flux. This level is about 3 times as high as the current test upper limit specified in the test procedure. Then, the findings from this work were successfully applied to Kori unit 4 cycle 7 and Yonggwang unit 1 cycle 7 physics tests.