• Title/Summary/Keyword: Ion Density

Search Result 1,233, Processing Time 0.025 seconds

The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.06a
    • /
    • pp.105-105
    • /
    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

  • PDF

Effects of Korean Wheat on LDL Oxidation and Atherosclerosis in Cholesterol-Fed Rabbits (고콜레스테롤혈증 유발 가토를 이용한 우리밀의 LDL산화 및 동맥경화 예방 효과)

  • Choe, Myeon;Kim, Hyun-Sook
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.31 no.1
    • /
    • pp.104-108
    • /
    • 2002
  • Numerous studies have suggested the involvement of oxidative processes in the pathogenesis of atherosclerosis and especially of oxidized low density lipoproteins (LDL). We studied the effect of Korean wheat on the oxidizability of LDL and the development of experimental atherosclerosis in rabbits on cholesterol diet. For the approach of the aim, antioxidative activity of wheat extracts against oxidation of LDL was investigated. The antiatherogenic effect of wheat was studied against Newzealand whithe (NZW) rabbits fed containing the wheat powder for 12 weeks. PBS extracts of Korean and imported wheats decreased LDL oxidation induced by copper ion by 62.3%, 52.6% respectively in comparison with control. Liver thiobarbituric acid reactive substance (TBARS ) levels of rabbits were significantly lowered in Korean wheat fed group (0.397$\pm$ 0.029 nmol MDA/mg protein, p<0.05) compared to control (0.496$\pm$0.021 nmol MDA/mg protein) and imported wheat group (0.478$\pm$0.019 nmol MDA/mg protein). TBARS levels of kidney showed no significant difference among treatment groups. The aorta of cholesterol-fed rabbits showed typical atherosclerotic lesions when compared with the controls, but the microscopic differences between groups was not clear. The present study suggests that Korean wheat may have higher antioxidative capacity than imported wheat and have more beneficial effects for the treatment of disease by inhibiting the oxidation of LDL.

Fibrinogen mRNA Expression Up-Regulated in Follicular Cyst of Korean Cattle (한우 난포낭종에서 증가되는 섬유소원 유전자 발현)

  • Tak, Hyun-Min;Han, Jae-Hee;Kang, Da-Won
    • Journal of Embryo Transfer
    • /
    • v.25 no.1
    • /
    • pp.29-34
    • /
    • 2010
  • Follicular cystic ovary (FCO) is one of the major causes of reproductive failure in cattle. Genetic alterations affect the function of diverse cells and/or tissues, which could be present in cystic ovaries. A microarray analysis was performed to screen differential gene expressions in follicular cystic follicles of cattle. In this study, we hypothesized that follicular cysts may be induced by changes in ion- and transporter-related gene expression. Microarray data showed that fibrinogen-gamma (FGG) and low density lipoprotein receptor-related protein 8 (LRP8) were up-regulated, while choline transporter-like protein 4 (SLC44A4), very long-chain acyl-CoA synthetase homolog 2 (SLC27A5), annexin 8 (ANXA8), and aquaporin 4 were down-regulated in follicular cystic follicles. A semi-quantitative RT-PCR was carried out to validate DEGs altered in follicular cystic follicles. Of six DEGs, three DEGs (FGG, SLC44A4, and aquaporin 4) showed a positive correlation between microarray and semi-quantitative PCR data. We focused on FGG, among three DEGs, which was highly up-regulated in follicular cystic follicles. The FGG mRNA was upregulated by 8.4-fold and by 1.7-fold in the bovine follicular cystic follicles as judged by microarray and RT-PCR analysis, respectively. However, there was no significant changes in the expression level of FGG protein in both follicular cystic follicles and granulosa cells isolated from follicular cystic follicles by Western blot analysis. Although this study does not reveal a positive correlation between the mRNA and protein level, FGG appears to be an important biomarker in the discrimination of follicular cyst from normal ovary.

Microwave Detector Using $YBa_2Cu_3O_{7-x}$ Grain Boundary Junction ($YBa_2Cu_3O_{7-x}$ 결정입계 접합을 이용한 마이크로파 감지소자)

  • Sin, Jung-Sik;Jo, Chang-Hyeon;Hwang, Du-Seop;Kim, Yeong-Geun;Wi, Dang-Mun;Cheon, Seong-Sun;Sin, U-Seok;Bae, Seong-Jun;Hong, Seung-Beom
    • Korean Journal of Materials Research
    • /
    • v.4 no.6
    • /
    • pp.681-686
    • /
    • 1994
  • Microwave Detector Using $YBa_{2}Cu_{3}O_{7-x}$, Grain Boundary Junction $YBa_{2}Cu_{3}O_{7-x}$ superconductor thin films were deposited on $LaAIO_{3}$ (100) single crystal substrates using a metal organic chemical vapor deposition (MOCVD) method. These films showed the critical temperature of about 9OK and critical current density of over $10^5/A \textrm{cm}^2$at 77K. These films showed granular structure with 0.5~1.5$\mu \textrm{m}$ grains. Bridge-type junctions, 6$\mu \textrm{m}$ in width and 6pm in length, were fabricated using the photolithography and the Ar ion milling techniques. Current-voltage (I-V) characteristics of these junctions with the microwave irradiation at 77K were studied. The critical current densities decreased as the irradiated microwave power increased. When microwaves were irradiated on the bridge at 77K. the I-V charateristics showed constant voltage stcp(Shapiro steps) at $\Delta$=nho/2e.

  • PDF

Preparation and Characterization of PVA/PSSA-MA Electrolyte Membranes Containing Silica Compounds and Surface Fluorination for Fuel Cell Applications (연료전지 응용을 위한 실리카 성분을 함유하며 표면불소화된 PVA/PSSA-MA 막의 제조 및 특성 연구)

  • Kim, Dae-Hoon;Lee, Bo-Sung;Rhim, Ji-Won
    • Polymer(Korea)
    • /
    • v.34 no.6
    • /
    • pp.540-546
    • /
    • 2010
  • In this manuscript, in order to reduce methanol permeability and, at the same time, to increase proton conductivity THS-PSA containing silica compound, responsible for methanol permeability reduction, and sulfonic acid, responsible for proton conductivity enhancement, was applied onto PVA/PSSA-MA membranes. And in order to improve durability, the resulting membranes, PVA/PSSAMA/THS-PSA, were exposed to 500ppm F2 gas at varying reaction times. The surface-fluorinated membranes were characterized through the measurement of contact angles, thermo-gravimetric analysis, and X-ray photoelectron spectroscopy to observe the physico-chemical changes. For the evaluation of the electro-chemical changes in the resulting membranes, its water contents, ion exchange capacity, proton conductivity, and methanol permeability were measured and then compared with the commercial membrane, Nafion 115. Finally, the membran electrode assembly(MEA) was prepared and the cell voltage against the current density was measured. As fluorination time increased, the contents of F2 increased up to maximum 4.3% and to depth of 50 nm. At 60 min of fluorination, the proton conductivity was 0.036 S/cm, larger than Nafion 115 at 0.024 S/cm, and the methanol permeability was $9.26E-08cm^2/s$, less than Nafion 115 at $1.17E-06cm^2/s$.

Effect of Cathode Porosity on the Cathodic Polarization Behavior of Mixed Conducting LSCF(La0.6Sr0.4Co0.2Fe0.8O3) (혼합전도체 LSCF(La0.6Sr0.4Co0.2Fe0.8O3) 양극의 기공률에 따른 양극분극 특성)

  • Yun, Joong-Cheul;Lee, Jong-Ho;Kim, Joosun;Lee, Hae-Weon;Kim, Byong-Ho
    • Journal of the Korean Ceramic Society
    • /
    • v.42 no.4
    • /
    • pp.251-259
    • /
    • 2005
  • In order to characterize the influence of the reaction-site density on the cathodic polarization property of LSCF, we chose the porosity of LSCF as a main controlling variable, which is supposed to be closely related with active sites for the cathode reaction. To control the porosity of cathodes, we changed the mixing ratio of fine and coarse LSCF powders. The porosity and pore perimeter of cathodes were quantitatively analyzed by image analysis. The electrochemical half cell test for the cathodic polarization was performed via 3-probe AC-impedance spectroscopy. According to the investigation, the reduction of oxygen at LSCF cathode was mainly controlled by following two rate determining steps; i) surface diffusion and/or ionic conduction of ionized oxygen through bulk LSCF phase, ii) charge transfer of oxygen ion at cathode/electrolyte interface. Moreover, the overall cathode polarization was diminished as the cathode porosity increased due to the increase of the active reaction sites in cathode layer.

Synthesis and Densification Behavior of Al Doped (La0.8Ca0.2)(Cr0.9Co0.1)O3(LCCC) Ceramics for SOFC Interconnects (SOFC 연결재용 Al이 도핑된 (La0.8Ca0.2)(Cr0.9Co0.1)O3(LCCC)계 세라믹스의 합성 및 치밀화 특성)

  • Lee, Ho-Young;Kang, Bo-Kyung;Lee, Ho-Chang;Heo, Young-Woo;Kim, Jeong-Joo;Kim, Jae-Yuk;Lee, Joon-Hyung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.25 no.5
    • /
    • pp.392-397
    • /
    • 2012
  • In the $(La_{0.8}Ca_{0.2})(Cr_{0.9}Co_{0.1})O_3$ (LCCC), which has been using as interconnector materials in SOFC, Al ions were substituted for Co because ionic radius of Al is similar to that of Co. Because of the almost identical ionic radius of Al and Co, the substitution was not thought to be affect the tolerance factor of LCCC, and the densification behavior, high temperature electrical conductivity and thermal expansion coefficient were examined as a function of Al concentration. In the cases of the x= 0 and x= 0.02 in $(La_{0.8}Ca_{0.2})(Cr_{0.9}Co_{0.1-x}Al_x)O_3$ (x= 0~0.1), the samples showed the relative densities above ${\geq}95%$ when those were sintered at ${\geq}1,350^{\circ}C$. In the case of the $x{\geq}0.06$ the sintered density deteriorated greatly at lower sintering temperatures. High temperature electrical conductivity of the samples decreased as the content of Al increased. Since the valence state of Al ion is unchangeable, while Cr or Co ions contribute to the electrical conduction by changing those valence states, Al substitution resulted in the decreased electrical conductivity. Al doping of LCCC was an effective way of decreasing the thermal expansion coefficient (TEC).

Nanocrystalline Si formation inside SiNx nanostructures usingionized N2 gas bombardment (이온화 N2 가스 입사를 이용한 SiNx 나노구조 내부의 Si 나노결정 형성)

  • Jung, Min-Cherl;Park, Young-Ju;Shin, Hyun-Joon;Byun, Jun-Seok;Yoon, Jae-Jin;Park, Yong-Sup
    • Journal of the Korean Vacuum Society
    • /
    • v.16 no.6
    • /
    • pp.474-478
    • /
    • 2007
  • Nanostructures of $SiN_x$ were made by bombardment of ionized $N_2$ on Si surface and subsequent annealing. Atomic force micrograph showed the density of $SiN_x$ nanostructures was $3\times10^{10}/cm^2$. Their lateral size and height were 40$\sim$60 nm and 15 nm, respectively. The chemical state of the nanostructure was measured using X-ray photoelectron spectroscopy, which changed from $SiN_x$ to $Si_3N_4\;+\;SiN_x$ as the bombarding ionized gas current increases. Upon annealing, transmission electron micrograph showed a clear evidence for crystalline Si phase formation inside the $SiN_x$ nanostructures. Photoluminescence peak observed at around 400nm was thought to be originated from the interface states between the nanocrystalline Si and surrounding $SiN_x$ nanostructures.

The Effect of Reaction Temperature for Synthesis of LiMn2O4 by Calcination Process and the Electrochemical Characteristics (소성법에 의한 LiMn2O4의 제조시 반응 온도의 영향과 전기화학적 특성)

  • Lee, Chul-Tae;Lee, Jin-Sik;Kim, Hyun-Joong
    • Applied Chemistry for Engineering
    • /
    • v.9 no.2
    • /
    • pp.220-225
    • /
    • 1998
  • The spinel structured $LiMn_2O_4$ was prepared from $Li_2CO_3$ and $MnO_2$ by calcination at various temperatures in the range of $750{\sim}900^{\circ}C$. It was found that the most suitable cubic structure of $LiMn_2O_4$ was obtained by heating at $850^{\circ}C$ for 12 hrs. However, in the calcination at $900^{\circ}C$, $Mn^{4+}$ of 0.06M was changed to $Mn^{+3}$ by the oxygen loss, so that it has been shown that the formula has changed to $LiMn_2O_{3.97}$. This phenomena were in agreement with the Jahn-Teller distortion by the increment of $Mn^{+3}$ ion on the octahedral sites of the spinel structured $LiMn_2O_4$. The results showed that after 15 charge/discharge cycles in the voltage range from 3.5V to 4.3V versus Li/$Li^+$ with a current density of $0.25mA/cm^2$, the spinel structured $LiMn_2O_4$ that was prepared at $900^{\circ}C$ showed a lower discharge capacity, 82~50 mAh/g, while the $LiMn_2O_4$, prepared at $850^{\circ}C$, showed the discharge capacity of 102~64 mAh/g.

  • PDF

Beneficial effects of natural Jeju groundwaters on lipid metabolism in high-fat diet-induced hyperlipidemic rats

  • Wang, Yan-Chao;Lu, Jin-Miao;Jin, Hui-Zi;Ma, Ai-Niu;Zhang, Jin-Yang;Gong, Nian;Xiao, Qi;Zhu, Bin;Lv, Ying-Fang;Yu, Na;Zhang, Wei-Dong;Wang, Yong-Xiang
    • Nutrition Research and Practice
    • /
    • v.8 no.2
    • /
    • pp.165-171
    • /
    • 2014
  • BACKGROUND: Groundwater is believed to possess many beneficial effects due to its natural source of various minerals. In this study, we examined the effects of natural Jeju groundwater S1 (Samdasoo$^{TM}$), S2 and S3 pumped up from different locations of Jeju Island, Korea, along with local tap water, on body weight gain, serum lipids and lipoproteins, and liver histopathology in high-fat diet-induced hyperlipidemic rats. MATERIALS/METHODS: Rats were randomly and equally divided into 6 groups. Different water samples were supplied to the hyperlipidemic rats as their daily drinking water and the widely-used anti-hyperlipidemic drug simvastatin was used as a positive control. Body weight, serum lipids and lipoproteins were measured weekly. Liver weight, liver index and liver histopathology were examined after the execution of the rats. RESULTS: After drinking Jeju groundwaters for two months, S2 but not S3 significantly reduced weight growth and serum triglycerides levels and increased high density lipoprotein-C (HDL-C) without affecting total cholesterol or LDL-C. S1 and particularly S2 significantly reduced the severity of liver hypertrophy and steatosis. All Groundwaters had much higher contents of vanadium (S3>S2>S1>>tap water) whereas S1 and S2 but not S3 markedly blocked autoxidation of ferrous ions. CONCLUSION: Jeju Groundwater S1 and particularly S2 exhibit protective effects against hyperlipidemia and fatty liver and hypothesize that the beneficial effect of Jeju Groundwaters may be contributed from blockade of autoxidation of ferrous ions rather than their high contents of vanadium.