• Title/Summary/Keyword: Ion Beam Control

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The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

  • Ben Tordoff;Cheryl Hartfield;Andrew J. Holwell;Stephan Hiller;Marcus Kaestner;Stephen Kelly;Jaehan Lee;Sascha Muller;Fabian Perez-Willard;Tobias Volkenandt;Robin White;Thomas Rodgers
    • Applied Microscopy
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    • v.50
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    • pp.24.1-24.11
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    • 2020
  • The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

Numerical simulation for increment of neutron production rate in SCBF device (SCBF 장치에서 중성자 생성률 증대를 위한 수치해석)

  • Ju, Heung-Jin;Park, Jeong-Ho;Ko, Kwang-Cheol
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2184-2186
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    • 2005
  • Neutron production is very important to apply fusion energy through SCBF(Spherically Convergent Beam Fusion) device and its rate is Proportional to the square of the ion current$({\propto}I^2)$. Also the ion current has a close relation with the potential well structure in grid cathode. In this paper, the ion current is calculated for the increasement of neutron production rate in a variety of grid cathode geometry. The atomic and molecular collision are taken into account by Monte Carlo Method and Potential is calculated by Finite Element Method. Main processes of the discharge is the ionization of $D_2$ by fast $D_2^+$ ion. As the number of a cathode ring is small and gap distance decreases, the ion current increases and neutron production rate will increase.

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Development of certified reference material (CRM)s for surface analysis I : alloy thin film for surface compositional analysis (표면분석용 인증표준물질의 개발 I : 표면조성분석용 합금박막 표준물질)

  • 김경중;박용섭;문대원
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.276-282
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    • 1999
  • For the quantitative surface analysis of multicomponent materials, algorithms for the compensation of the matrix effect and surface compositional change by ion beam sputtering must be established and reference materials having certified compositions are necessary. These certified reference material (CRM)s are needed for the improvement of instrument performance, inter-laboratory comparison and quantitative surface analysis. Surface analysis group of KRISS developed alloy thin film CRMs by and ion beam sputter deposition system and in-situ surface analysis system to control the composition of alloy thin films The real compositions of the CRMs were certified by inductively coupled plasma-atomic emission spectroscopy (ICP-AES).

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The Study on Impurity Concentration Optimizing for the Refresh Time Improvement of DRAM (DRAM의 Refresh 시간 개선을 위한 불순물 농도 최적화에 관한 연구)

  • Lee Yong-Hui;Woo Kyong-Hwan;Yi Cheon Hee
    • Proceedings of the IEEK Conference
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    • 2000.11b
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    • pp.325-328
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    • 2000
  • The control of the data retention time is a main issue for realizing future high density dynamic random access memory. In this paper, we propose the new implantation scheme by gate-related ion beam shadowing effect and buffer-enhanced $\Delta$ Rp increase using buffered N- implantation with tilt and 4X-rotation that is designed on the basis of the local-field-enhancement model of the tail component. We report an excellent tail improvement of the retention time distribution attributed to the reduction of electric field across the cell junction due to the redistribution of N- concentration which is intentionally caused by Ion Beam Shadowing and Buffering Effect using tilt implantation with 4X-rotation.

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Development of Focused Ion Beam Column Using Ga Source (갈륨 소스를 이용한 집속이온빔 컬럼 개발)

  • Gim, Tzang-Jo;Lee, Jae-Seung;Choi, Yoon;Choi, Eun-Ha;Park, Chul-Woo;Kim, Jong-Kuk;Kim, Young-Gweon;Um, Chang-Yong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.3
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    • pp.185-189
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    • 2009
  • Focused ion beam system was designed, which includes LMIS, electrostatic lens and high voltage power supply. Control program is updated for high speed image processing. The details of vibration-free vacuum system and other important electrical parts were trouble-shooted for appropriately controlling high acceleration voltages.

Fabrication of Electrostatically Actuated Nano Tweezers Using FIB(Focused Ion Beam) (집속이온빔 장치를 이용한 정전기 구동 나노트위저의 제작)

  • Chang Ji-Young;Kim Jong-Baeg;Min B.K.;Lee S.J.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.495-496
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    • 2006
  • Electrostatically actuated nanoscale tweezers are fabricated on micro processed electrodes using FIB-CVD. Heavily doped electrode works as interconnection platform for controlling nanoscale devices. Short bent pillars are deposited to control the gap distance of main tweezers fabricated on bent ones. Two types of tweezers which have different gap distances are fabricated and tweezing motion was successfully demonstrated. The threshold voltages at snap-down of the pillars are dependent on the initial gap distance of the unactuated pillars, and the measured values were 93V for 3.6um and 30V for 2.2um. The dimension of nano tweezers and initial gap distances are controllable as demonstrated and we expect more complicated 3-dimensional shapes are also possible.

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Use of Modern Non­destructive Techniques in High Temperature Degradation of Material and Coatings

  • Lee, C.K.;Sohn, Y.H.
    • International Journal of Korean Welding Society
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    • v.3 no.2
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    • pp.29-39
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    • 2003
  • The durability and reliability of thermal barrier coatings (TBCs) play an important role in the service reliability, availability and maintainability (RAM) of hot­section components in advanced turbine engines for aero and utility applications. Photostimulated luminescence spectroscopy (PSLS) and electrochemical impedance spectroscopy (EIS) are being concurrently developed as complimentary non­destructive evaluation (NDE) techniques for quality control and life­remain assessment of TBCs. This paper overviews the governing principles and applications of the luminescence and the impedance examined in the light of residual stress, phase constituents and resistance (or capacitance) in TBC constituents including the thermally grown oxide (TGO) scale. Results from NDE by PSLS and EIS are discussed and related to the microstructural development during high temperature thermal cycling, examined by using a variety of microscopic techniques including focused ion beam (FIB) in­situ lift­out (INLO), transmission and scanning transmission electron microscopy (TEM and STEM).

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Development of Optical Signal Transmission for the KSTAR Project Pertaining to Instrumentation and Control of the Neutral Beam Test Stand at KAERI

  • Jung, Ki-Sok;Oh, Byung-Hoon
    • KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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    • v.5B no.3
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    • pp.289-295
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    • 2005
  • Instrumentation and Control (I&C) of the Neutral Beam Test Stand (NB- TS) Facility at the Korea Atomic Energy Research Institute (KAERI) for the Korea Superconducting Tokamak Advanced Research (KSTAR) project has been underway since the start of the project to answer the diverse requests arising from the various facets of the development and construction phases of the project. Optical signal transmission constitutes a significant portion of I&C works and has been performed for the entirety of the project. During the NB- TS construction and related experiments, significant achievements to a more accurate as well as more refined optical signal transmissions have been made. Examples of those I&C works that utilized the optical signal transmission are the Langmuir probe signal transmission, gradient grid current signal transmission, gas flow control and signal transmission, ion source temperature measurement, beam line component temperature monitoring, and coolant flow signal transmission, etc. These optical signal transition provisions are now performing part of the indispensable functions for the proper operation of the NB- TS facility. Attained experience and expertise are expected to be well applied to the upcoming main neutral beam injection (NBI) system construction for the KSTAR project.

Effect of the Droplets on the Wear Characteristics of Steel for the Cold Working Roller (Droplet가 냉연 롤러용 강의 마모 특성에 미치는 영향)

  • 문봉호
    • Tribology and Lubricants
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    • v.20 no.3
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    • pp.145-151
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    • 2004
  • A modified surface layer by ion implantation is very thin (under 1 $\mu\textrm{m}$) but has superior mechanical characteristics. therefore ion implantation has been used successfully as a surface treatment technology to improve the wear, fatigue, and corrosion resistances of materials. MEVVA which is a kind of ion beam apparatus has merits of low cost and is usable to various metals, but occurs a droplet ranging from micron to tens of micron on the implanted surface at ion implantations. wear is a dynamic phenomenon on interacting surfaces with rotative motion. Since wear changes in condition of the surface, we should control to surface. In order to improve a wear resistance of Ti ion implanted 1C-3Cr steel(material for roller in the cold working process), it is essential to investigate the effect of the droplets on the wear characteristics. In this study, we investigate the effect of the droplets on the wear characteristics of 1C-3Cr steel using SEM Tribosystem as in-situ system. Results show that the droplet occurred at ion implantation becomes the cause of severe wear. Therefore, the ion-implanted surface should be removed the droplet to improve wear resistance.

Characteristics of Polycarbonate Film by Ion Beam for UV Block (이온빔을 이용한 폴리카보네이트 필름의 자외선 차단 특성)

  • Choi, Byoung-Hoon;Kim, Young-Jun
    • Polymer(Korea)
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    • v.29 no.6
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    • pp.588-592
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    • 2005
  • For the purpose of obtaining polycarbonate film which blocks ultra-violet ion beam was irradiated onto the surface of PC film. This method has gotten several advantages compared with the techniques, such as the protection of changes in film thickness and UV blocking material deposited onto a base film. In order to investigate UV blocking PC film, the optical and chemical characteristics, surface morphology and lightfastness were confirmed by UV/Vis, FTIR(ATR) spectroscopy, AFM, and Q-UV fasoess analyses. As a result, it was shown that the modified PC film was able to block almost all of UV region and easily control the degree of UV block. The optical changes in the film were attributed to chemical changes in PC surface by ion beam irradiation. Moreover, we expect that the modified PC film can durably block UV due to no changes in colour and UV transmittance after UV fastness test.